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Selective thin-film removal is needed in many microfabrication processes such as 3-D patterning of optoelectronic devices and localized repairing of integrated circuits. Various wet or dry etching methods are available, but laser machining…
The growing use of wearable devices for activity tracking, healthcare, and haptics faces challenges due to the bulkiness and short lifespan of batteries. Integration of a textile-based wireless charging and readout system into everyday…
For smart clothing integration with the wireless system based on radio frequency (RF) backscattering, we demonstrate an ultra-high frequency (UHF) antenna constructed from embroidered conductive threads. Sewn into a fabric backing, the…
Future observatories utilizing reflection grating spectrometers for extreme ultraviolet (EUV) and soft X-ray (SXR) spectroscopy require high-fidelity gratings with both blazed groove facets and custom groove layouts that are often fanned or…
Conductive micro-patterned copper tracks were fabricated by UV direct-writing of a nanoparticle silver seed layer followed by selective electroless copper deposition. Silver ions were first incorporated into a hydrolyzed polyimide surface…
V-telluride superlattice thin films have shown promising performance for on-chip cooling devices. Recent experimental studies have indicated that device performance is limited by the metal/semiconductor electrical contacts. One challenge in…
In this work, we show the feasibility of extreme ultraviolet (EUV) patterning on an HF-treated Si(100) surface in the absence of a photoresist. EUV lithography is the leading lithography technique in semiconductor manufacturing due to its…
With the increasing complexity of the electromagnetic environment, electromagnetic interference has already been an important problem for optoelectronic systems to be reckoned with. The metal mesh film is a kind of widely used…
The fast growth of E-Commerce creates a global market worth USD 821 billion for online fashion shopping. What unique about fashion presentation is that, the same design can usually be offered with different cloths textures. However, only…
Millimeter-scale embedded sensing systems have unique advantages over larger devices as they are able to capture, analyze, store, and transmit data at the source while being unobtrusive and covert. However, area-constrained systems pose…
We describe a process route to fabricate arrays of Ultra-low-Noise MoAu Transition Edge Sensors (TESs). The low thermal conductance required for space applications is achieved using 200 nm-thick Silicon Nitride (SiNx ) patterned to form…
The electrical machinery core is formed with a ferromagnetic material that offers high magnetic properties. As ferromagnetic materials have high relative magnetic permeability, they are important in the formation of electromagnetic device…
As one of the most popular micro-mobility options, e-scooters are spreading in hundreds of big cities and college towns in the US and worldwide. In the meantime, e-scooters are also posing new challenges to traffic safety. In general,…
This chapter starts with a discussion of the main qualitative differences between UV and mid-IR filaments: from multiphoton ionization in the UV to tunnel ionization in the near- to mid-IR. A general qualitative analysis of the properties…
For the advancement of highly-integrated stretchable electronics, the development of scalable sub-micrometer conductor patterning is required. Eutectic gallium indium EGaIn is an attractive conductor for stretchable electronics, as its…
Simulations of metal nanopatterns embedded in a thin photovoltaic absorber show significantly enhanced absorbance within the semiconductor, with a more than 300% increase for {\lambda} = 800 nm. Integrating with AM1.5 solar irradiation,…
Extreme ultraviolet (EUV) lithography is the leading lithography technique in CMOS mass production, moving towards the sub-10 nm half-pitch (HP) regime with the ongoing development of the next generation high-numerical aperture (high-NA)…
In-line polarimeters perform non-destructive polarization measurements of optical signals, and play a critical role in monitoring and controlling the polarization environment in for example optical networks. While current in-line…
Electromagnetic (EM) sensing is a wide-spread contactless examination technique in science, engineering and military. However, conventional sensing systems are mostly lack of intelligence, which not only require expensive hardware and…
Electron diffraction through a thin patterned silicon membrane can be used to create complex spatial modulations in electron distributions by varying the intensity of different reflections using parameters such as crystallographic…