Related papers: A centimeter-sized gas pressure sensor for high-va…
Recent years have seen a rapid reduction in the intrinsic loss of nanomechanical resonators (i.e., chip-scale mechanical oscillators). As a result, these devices become increasingly sensitive to the friction exerted by smallest amounts of…
To realize nanomechanical graphene-based pressure and gas sensors, it is beneficial to have a method to electrically readout the static displacement of a suspended graphene membrane. Capacitive readout, typical in micro-electro-mechanical…
A micro-pressure sensor with an isosceles trapezoidal beam-membrane (ITBM) is proposed in this paper, consisting of a square silicon membrane, four isosceles trapezoidal beams and four piezoresistors.To investigate how the elastic silicon…
Optomechanical accelerometers promise quantum-limited readout, high detection bandwidth, self-calibration, and radiation pressure stabilization. We present a simple, scalable platform that enables these benefits with nano-$g$ sensitivity at…
A high-sensitivity wireless pressure sensor with active processing structure designed on the dielectric substrate has been present and evaluated in this paper. The sensor configuration has been optimized by computer-aided design to achieve…
The microfabrication of cesium vapor cells for optically pumped magnetometry relies on optimization of buffer gas pressure in order to maximize atomic coherence time and sensitivity to external magnetic signals. We demonstrate post-bond…
The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors the sensitivity offered by a single suspended…
Heat and pressure are ultimately transmitted via quantized degrees of freedom, like gas particles and phonons. While a continuous Brownian description of these noise sources is adequate to model measurements with relatively long integration…
We realize squeeze film pressure sensors using suspended, high mechanical quality silicon nitride membranes forming few-micron gap sandwiches. The effects of air pressure on the mechanical vibrations of the membranes are investigated in the…
Prototypes of MICROMEGAS chambers, using bulk technology and analog readout, with 1x1cm2 readout segmentation have been built and tested. Measurements in Ar/iC4H10 (95/5) and Ar/CO2 (80/20) are reported. The dependency of the prototypes gas…
We report on a non-interacting technique for thermal characterization of fluids based on surface plasmon resonance interrogation. Using liquid volumes less than 20 micro liters we have determined the materials' thermo-optic coefficients…
Atomically thin two-dimensional materials such as graphene exhibit extremely high-pressure sensitivity compared to the commercially used pressure sensors due to their high surface-to-volume ratio and excellent mechanical properties. The…
The operating principle of squeeze-film pressure sensors is based on the pressure dependence of a membrane's resonance frequency, caused by the compression of the surrounding gas which changes the resonator stiffness. To realize such…
Heat capacity measurements under high pressure places high demands on the calorimeter. Here we describe the development of a miniaturized nanocalorimeter for high-pressure heat capacity measurements at low temperature. The device,…
The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of…
Here it is shown that graphene membranes that separate 2 gases at identical pressure are deflected by osmotic pressure. The osmotic pressure is a consequence of differences in gas permeation rates into a graphene enclosed cavity. The…
We measured the electronic properties and gas sensing responses of template-grown poly(3,4-ethylenedioxythiophene)/poly(styrenesulfonate) (PEDOT/PSS)-based nanowires. The nanowires have a "striped" structure (gold-PEDOT/PSS-gold), typically…
A high sensitivity force sensor based on dielectric microspheres in vacuum, optically trapped by a single, upward-propagating laser beam, is described. Off-axis parabolic mirrors are used both to focus the 1064~nm trapping beam and to…
Chemical gas sensors based on nanowires can find a wide range of applications in clinical assaying, environmental emission control, explosive detection, agricultural storage and shipping, and workplace hazard monitoring. Sensors in the…
Graphene has good mechanical properties including large Young's modulus, making it ideal for many resonant sensing applications. Nonetheless, the development of graphene based sensors has been limited due to difficulties in fabrication,…