Squeeze film pressure sensors based on SiN membrane sandwiches

Sepideh Naserbakht; Aurélien Dantan

doi:10.1016/j.sna.2019.111588

Squeeze film pressure sensors based on SiN membrane sandwiches

Applied Physics 2019-09-20 v2 Mesoscale and Nanoscale Physics

Authors: Sepideh Naserbakht , Aurélien Dantan

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Abstract

We realize squeeze film pressure sensors using suspended, high mechanical quality silicon nitride membranes forming few-micron gap sandwiches. The effects of air pressure on the mechanical vibrations of the membranes are investigated in the range 10^-3-50 mbar and the intermembrane coupling induced by the gas is discussed in light of a squeeze film coupled-oscillator model. The high responsivity (several kHz/mbar) and the sub-pascal sensitivity of such simple pressure sensors are attractive for absolute and direct pressure measurements in rarefied air or high vacuum environments.

Keywords

squeeze film pressure sensor silicon nitride membrane coupled oscillator rarefied gas high vacuum mechanical vibration

Cite

@article{arxiv.1906.07980,
  title  = {Squeeze film pressure sensors based on SiN membrane sandwiches},
  author = {Sepideh Naserbakht and Aurélien Dantan},
  journal= {arXiv preprint arXiv:1906.07980},
  year   = {2019}
}

Comments

9 pages, 10 figures

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