Related papers: Surface Optimization of Aluminum Resonators for Ro…
Manipulating the propagation of electromagnetic waves through sub-wavelength sized artificial structures is the core function of metamaterials. Resonant structures, such as split ring resonators, play the role of artificial "atoms" and…
Ultrawide-bandgap AlN is a promising material for next-generation power electronics; however, its practical implementation is hindered by unstable surface chemistry and the high activation energy of p-type dopants. In particular,…
Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the…
Plasmonic nanoresonators consisting of a gold nanorod and a spherical silica-core and gold-shell, both coated by a gain layer, were optimized to maximize the near-field enhancement (NF-type) and far-field outcoupling (FF-type), and to enter…
Aluminum, as a metallic material for plasmonics, is of great interest because it extends the applications of surface plasmon resonance into the ultraviolet (UV) region and excels noble metals in the natural abundance, cost and compatibility…
Optical metasurfaces supporting resonances with high quality factors offer an outstanding platform for applications such as non-linear optics, light guiding, lasing, sensing, light-matter coupling, and quantum optics. However, their…
Elastic dissipation through radiation towards the substrate is a major loss channel in micro- and nanomechanical resonators. Engineering the coupling of these resonators with optical cavities further complicates and constrains the design of…
In multi-qubit superconducting systems utilizing flip-chip technology, achieving high accuracy in resonator frequencies is of paramount importance, particularly when multiple resonators share a common Purcell filter with restricted…
Early results on the plasma deposition of dielectric thin films on acoustic wave (AW) activated substrates revealed a densification pattern arisen from the focusing of plasma ions and their impact on specific areas of the piezoelectric…
As a two-dimensional planar material with low depth profile, a metasurface can generate non-classical phase distributions for the transmitted and reflected electromagnetic waves at its interface. Thus, it offers more flexibility to control…
Plasma medicine is an emerging and innovative interdisciplinary research field combining biology, chemistry, physics, engineering, and medicine. However, the safe clinical application of cold atmospheric plasma (CAP) technology is still a…
Deep Ultraviolet (DUV) Photolithography is currently used to fabricate mass-scale integrated circuits (ICs). Its high throughput and resolution could benefit large-scale RF MEMS production for the telecommunication market. We present a…
Phonons at gigahertz frequencies interact with electrons, photons, and atomic systems in solids, and therefore have extensive applications in signal processing, sensing, and quantum technologies. Surface acoustic wave (SAW) resonators that…
Novel materials with large electro-optic (EO) coefficients are essential for developing ultra-compact broadband modulators and enabling effective quantum transduction. Compared to lithium niobate, the most widely used nonlinear optical…
We present a systematic study of the effects of shielding on the internal quality factors (Qi) of Al and TiN microwave resonators designed for use in quantum coherent circuits. Measurements were performed in an adiabatic demagnetization…
Noise and decoherence due to spurious two-level systems (TLS) located at material interfaces is a long-standing issue in solid state quantum technologies. Efforts to mitigate the effects of TLS have been hampered by a lack of surface…
Aluminum gallium arsenide (AlGaAs) and related III-V semiconductors have excellent optoelectronic properties. They also possess strong material nonlinearity as well as high refractive indices. In view of these properties, AlGaAs is a…
Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…
This work reports back-end-of-line (BEOL) compatible, thin-film transistors (TFTs) with sub-10 nm tungsten-doped tin oxide (TWO) channels deposited by atomic layer deposition (ALD) at 150 $^\circ$C. TFTs with undoped SnO$_{\mathrm{x}}$,…
Phononic resonators are becoming increasingly important in quantum information science, both for applications in quantum computing, communication and sensing, as well as in experiments investigating fundamental physics. Here, we study the…