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In this article, we present a technology development of a superconducting qubit device 3D-integrated by flip-chip-bonding and processed following CMOS fabrication standards and contamination rules on 200 mm wafers. We present the utilized…

Complex integrated circuits require multiple wiring layers. In complementary metal-oxide-semiconductor (CMOS) processing, these layers are robustly separated by amorphous dielectrics. These dielectrics would dominate energy loss in…

To reach large-scale quantum computing, three-dimensional integration of scalable qubit arrays and their control electronics in multi-chip assemblies is promising. Within these assemblies, the use of superconducting interconnections, as…

Resonators and qubits with a niobium (Nb) base metal layer achieve some of the highest coherence times in superconducting quantum devices. The performance of such devices is often limited by loss associated with two-level systems, which are…

We have developed a low temperature, high-resolution microwave surface impedance probe that is able to operate in high static magnetic fields. Surface impedance is measured by cavity perturbation of dielectric resonators, with sufficient…

Superconductivity · Physics 2009-11-11 W. A. Huttema , B. Morgan , P. J. Turner , W. N. Hardy , Xiaoqing Zhou , D. A. Bonn , Ruixing Liang , D. M. Broun

Connecting nanoscale mechanical resonators to microwave quantum circuits opens new avenues for storing, processing, and transmitting quantum information. In this work, we couple a phononic crystal cavity to a tunable superconducting quantum…

We demonstrate that a high kinetic inductance disordered superconductor can realize a low microwave loss, non-dissipative circuit element with an impedance greater than the quantum resistance ($R_Q = h/4e^2 \simeq 6.5k\Omega$). This…

Mesoscale and Nanoscale Physics · Physics 2019-04-10 David Niepce , Jonathan Burnett , Jonas Bylander

Tantalum (Ta) has recently received considerable attention in manufacturing robust superconducting quantum circuits. Ta offers low microwave loss, high kinetic inductance compared to aluminium (Al) and niobium (Nb), and good compatibility…

We have grown superconducting TiN films by atomic layer deposition with thicknesses ranging from 6 to 89 nm. This deposition method allows us to tune the resistivity and critical temperature by controlling the film thickness. The microwave…

Precise phase control of microwaves and millimeter waves is critical for today's wireless communication and signal processing electronics. For decades, achieving even modest phase-shifting resolution has demanded a complex mix of transistor…

Signal Processing · Electrical Eng. & Systems 2024-07-24 Bala Govind , Andreia Cathelin , Alyssa Apsel

Here we present the microwave characterization of microstrip resonators made from aluminum and niobium inside a 3D microwave waveguide. In the low temperature, low power limit internal quality factors of up to one million were reached. We…

Superconductivity · Physics 2023-04-06 D. Zoepfl , P. R. Muppalla , C. M. F. Schneider , S. Kasemann , S. Partel , G. Kirchmair

We study the slowing, storing and releasing of microwave pulses in a superconducting circuits composed of two coplanar waveguide resonators and a superconducting transmon-type qubit. The quantum interference analogy to electromagnetically…

Quantum Physics · Physics 2014-02-19 Keyu Xia

Superconducting circuits and microwave signals are good candidates to realize quantum networks, which are the backbone of quantum computers. We have realized a quantum node based on a 3D microwave superconducting cavity parametrically…

Quantum Physics · Physics 2015-03-06 Emmanuel Flurin , Nicolas Roch , Jean-Damien Pillet , François Mallet , Benjamin Huard

We present a cavity-electromechanical system comprising a superconducting quantum interference device which is embedded in a microwave resonator and coupled via a pick-up loop to a 6 $\mu$g magnetically-levitated superconducting sphere. The…

The large physical size of superconducting qubits and their associated on-chip control structures presents a practical challenge towards building a large-scale quantum computer. In particular, transmons require a high-quality-factor…

A normal metal - superconductor hybrid single-electron trap with tunable barrier is utilized as a tool for spectrum analysis at the extremely low signal levels, using only well filtered cryogenic microwave background as a photon source in…

Superconductivity · Physics 2017-04-26 J. S. Lehtinen , E. Mykkänen , A. Kemppinen , D. Golubev , S. V. Lotkhov , A. J. Manninen

We demonstrate a pogo pin package for a superconducting quantum processor specifically designed with a nontrivial layout topology (e.g., a center qubit that cannot be accessed from the sides of the chip). Two experiments on two nominally…

We propose and test a cryogenic setup comprising dielectric waveguides for mm-wave frequencies in the range of 75-110 GHz and temperatures down to 10 mK. The targeted applications are quantum technologies at millimeter-wave frequencies,…

While relatively easy to engineer, static transverse coupling between a qubit and a cavity mode satisfies the criteria for a quantum non-demolition (QND) measurement only if the coupling between the qubit and cavity is much less than their…

Quantum Physics · Physics 2019-06-06 Bryan T. Gard , Kurt Jacobs , José Aumentado , Raymond W. Simmonds

Coupling microwave cavity modes with spin qubit transitions is crucial for enabling efficient qubit readout and control, long-distance qubit coupling, quantum memory implementation, and entanglement generation. We experimentally observe the…