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As integrated circuit (IC) dimensions shrink below the lithographic wavelength, optical lithography faces growing challenges from diffraction and process variability. Model-based optical proximity correction (OPC) and inverse lithography…

Machine Learning · Computer Science 2025-12-25 Yuting Hu , Lei Zhuang , Hua Xiang , Jinjun Xiong , Gi-Joon Nam

Continual shrinking of pattern dimensions in the semiconductor domain is making it increasingly difficult to inspect defects due to factors such as the presence of stochastic noise and the dynamic behavior of defect patterns and types.…

Computer Vision and Pattern Recognition · Computer Science 2023-08-16 Vic De Ridder , Bappaditya Dey , Enrique Dehaerne , Sandip Halder , Stefan De Gendt , Bartel Van Waeyenberge

In modern electronic manufacturing, defect detection on Printed Circuit Boards (PCBs) plays a critical role in ensuring product yield and maintaining the reliability of downstream assembly processes. However, existing methods often suffer…

Computer Vision and Pattern Recognition · Computer Science 2025-07-08 Jiangzhong Cao , Huanqi Wu , Xu Zhang , Lianghong Tan , Huan Zhang

Industrial Anomaly Detection (IAD) is critical for ensuring product quality by identifying defects. Traditional methods such as feature embedding and reconstruction-based approaches require large datasets and struggle with scalability.…

Computer Vision and Pattern Recognition · Computer Science 2025-04-29 Peijian Zeng , Feiyan Pang , Zhanbo Wang , Aimin Yang

With continuous progression of Moore's Law, integrated circuit (IC) device complexity is also increasing. Scanning Electron Microscope (SEM) image based extensive defect inspection and accurate metrology extraction are two main challenges…

Computer Vision and Pattern Recognition · Computer Science 2023-08-17 Vic De Ridder , Bappaditya Dey , Sandip Halder , Bartel Van Waeyenberge

Defect inspection is paramount within the closed-loop manufacturing system. However, existing datasets for defect inspection often lack precision and semantic granularity required for practical applications. In this paper, we introduce the…

Computer Vision and Pattern Recognition · Computer Science 2024-07-22 Shuai Yang , Zhifei Chen , Pengguang Chen , Xi Fang , Yixun Liang , Shu Liu , Yingcong Chen

Anomaly detection is a crucial process in industrial manufacturing and has made significant advancements recently. However, there is a large variance between the data used in the development and the data collected by the production…

Computer Vision and Pattern Recognition · Computer Science 2024-09-11 Tianwu Lei , Bohan Wang , Silin Chen , Shurong Cao , Ningmu Zou

Controlling crystalline material defects is crucial, as they affect properties of the material that may be detrimental or beneficial for the final performance of a device. Defect analysis on the sub-nanometer scale is enabled by…

Materials Science · Physics 2021-06-03 Nik Dennler , Antonio Foncubierta-Rodriguez , Titus Neupert , Marilyne Sousa

Microfluidic devices offer numerous advantages in medical applications, including the capture of single cells in microwell-based platforms for genomic analysis. As the cost of sequencing decreases, the demand for high-throughput single-cell…

Computational Engineering, Finance, and Science · Computer Science 2024-09-13 Xueying Zhao , Yan Chen , Yuefu Jiang , Amie Radenbaugh , Jamie Moskwa , Devon Jensen

Most AI-for-Materials research to date has focused on ideal crystals, whereas real-world materials inevitably contain defects that play a critical role in modern functional technologies. The defects break geometric symmetry and increase…

Materials Science · Physics 2025-06-03 Ziduo Yang , Xiaoqing Liu , Xiuying Zhang , Pengru Huang , Kostya S. Novoselov , Lei Shen

In this work, we perform semantic segmentation of multiple defect types in electron microscopy images of irradiated FeCrAl alloys using a deep learning Mask Regional Convolutional Neural Network (Mask R-CNN) model. We conduct an in-depth…

Computer Vision and Pattern Recognition · Computer Science 2021-10-18 Ryan Jacobs , Mingren Shen , Yuhan Liu , Wei Hao , Xiaoshan Li , Ruoyu He , Jacob RC Greaves , Donglin Wang , Zeming Xie , Zitong Huang , Chao Wang , Kevin G. Field , Dane Morgan

The quality of industrial components is critical to the production of special equipment such as robots. Defect inspection of these components is an efficient way to ensure quality. In this paper, we propose a hybrid network, SSD-Faster Net,…

Computer Vision and Pattern Recognition · Computer Science 2022-07-05 Jingyao Wang , Naigong Yu

The performances of defect inspection have been severely hindered by insufficient defect images in industries, which can be alleviated by generating more samples as data augmentation. We propose the first defect image generation method in…

Computer Vision and Pattern Recognition · Computer Science 2023-03-07 Yuxuan Duan , Yan Hong , Li Niu , Liqing Zhang

In the realm of industrial quality inspection, defect detection stands as a critical component, particularly in high-precision, safety-critical sectors such as automotive components aerospace, and medical devices. Traditional methods,…

Computer Vision and Pattern Recognition · Computer Science 2025-07-09 Shuai Li , Shihan Chen , Wanru Geng , Zhaohua Xu , Xiaolu Liu , Can Dong , Zhen Tian , Changlin Chen

Automated defect inspection is critical for effective and efficient maintenance, repair, and operations in advanced manufacturing. On the other hand, automated defect inspection is often constrained by the lack of defect samples, especially…

Computer Vision and Pattern Recognition · Computer Science 2021-03-30 Gongjie Zhang , Kaiwen Cui , Tzu-Yi Hung , Shijian Lu

Automated defect detection in industrial manufacturing is essential for maintaining product quality and minimizing production errors. In air disc brake manufacturing, ensuring the precision of laser-engraved nameplates is crucial for…

Computer Vision and Pattern Recognition · Computer Science 2025-03-06 Adhish Anitha Vilasan , Stephan Jäger , Noah Klarmann

In this work, we introduce a method and present an improved neural work to perform product re-identification, which is an essential core function of a fully automated product defect detection system. Our method is based on feature distance.…

Computer Vision and Pattern Recognition · Computer Science 2021-12-22 Chenggui Sun , Li Bin Song

Extracting, harvesting and building large-scale annotated radiological image datasets is a greatly important yet challenging problem. It is also the bottleneck to designing more effective data-hungry computing paradigms (e.g., deep…

Computer Vision and Pattern Recognition · Computer Science 2017-10-11 Ke Yan , Xiaosong Wang , Le Lu , Ronald M. Summers

In-situ monitoring incorporating data from visual and other sensor technologies, allows the collection of extensive datasets during the Additive Manufacturing (AM) process. These datasets have potential for determining the quality of the…

Computer Vision and Pattern Recognition · Computer Science 2024-01-30 Xiao Liu , Alessandra Mileo , Alan F. Smeaton

Defect detection is one of the most important yet challenging tasks in the quality control stage in the manufacturing sector. In this work, we introduce a Tensor Convolutional Neural Network (T-CNN) and examine its performance on a real…

Computer Vision and Pattern Recognition · Computer Science 2024-04-29 Pablo Martin-Ramiro , Unai Sainz de la Maza , Sukhbinder Singh , Roman Orus , Samuel Mugel