Related papers: Bimorph Lithium Niobate Piezoelectric Micromachine…

This work demonstrates a prototype bi-layer piezoelectric micromachined ultrasonic transducer (PMUT) based on transferred periodically poled piezoelectric film (P3F) X-cut lithium niobate (LN). Opposite in-plane polarizations in the…

As the demand for compact and efficient power conversion systems increases, piezoelectric power converters have gained attention for their ability to replace bulky magnetic inductors with acoustic resonators, enabling higher power density…

This paper reports the first piezoelectric acoustic filter in periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) at 23.8 GHz with low insertion loss (IL) of 1.52 dB and 3-dB fractional bandwidth (FBW) of 19.4%. The filter…

This work reports the first study of periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) resonators at cryogenic temperatures. We experimentally investigate the temperature dependency of resonant frequencies and quality…

We present a piezoelectric transducer in thin-film lithium niobate that converts a 1.7 GHz microwave signal to a mechanical wave in a single mode of a 1 micron-wide waveguide. We measure a -12 dB conversion efficiency that is limited by…

Lithium Niobate (LN or just niobate) thin-film micro-photonic resonators have promising prospects in many applications including high efficiency electro-optic modulators, optomechanics and nonlinear optics. This paper presents free-standing…

The need for high-temperature piezoelectric microelectromechanical systems (MEMS) requires pushing piezoelectric platforms to their thermal limits. In harsh thermal environments, piezoelectric MEMS devices are expected to sustain severe…

This paper reports the first high-performance acoustic filters toward millimeter wave (mmWave) bands using transferred single-crystal thin film lithium niobate (LiNbO3). By transferring LiNbO3 on the top of silicon (Si) and sapphire (Al2O3)…

Optomechanical transduction harnesses the interaction between optical fields and mechanical motion to achieve sensitive measurement of weak mechanical quantities with inherently low noise. Lithium niobate combines low optical loss, strong…

While piezoelectric transduction enables designing acoustic resonators operating at multi-GHz frequencies, the deposition of piezoelectric materials typically requires high temperature processes and specific crystallographic orientation of…

Demonstrating a device that efficiently connects light, motion, and microwaves is an outstanding challenge in classical and quantum photonics. We make significant progress in this direction by demonstrating a photonic crystal resonator on…

With the advantages of large electro-optical coefficient, wide transparency window, and strong optical confinement, thin-film lithium niobate (TFLN) technique has enabled the development of various high-performance optoelectronics devices,…

In this work, we have successfully engineered and examined suspended laterally vibrating resonators (LVRs) on a lithium niobate thin film on lithium niobate carrier wafer (LN-on-LN) platform, powered by aluminum interdigital transducers…

Lithium niobate (LN) based devices are widely used in integrated and nonlinear optics. This material is robust and resistive to high temperatures, which makes the LN-based devices table, but challenging to fabricate. In this work we report…

This letter presents miniature millimeter wave (mmWave, above 30 GHz) acoustic resonators based on a single-layer thin-film lithium niobate (LN) platform. More specifically, we present high performance third-order antisymmetric (A3) mode…

Thin-film lithium niobate (TFLN) is superior for integrated nanophotonics due to its outstanding properties in nearly all aspects: strong second-order nonlinearity, fast and efficient electro-optic effects, wide transparency window, and…

Lithium niobate (LN) is an excellent nonlinear optical and electro-optic material that has found many applications in classical nonlinear optics, optical fiber communications and quantum photonics. Here we review the recent development of…

This work reports an acoustic filter at 23.5 GHz with a low insertion loss (IL) of 2.38 dB and a 3-dB fractional bandwidth (FBW) of 18.2%, significantly surpassing the state-of-the-art. The device leverages electrically coupled acoustic…

Piezoelectric resonators are a common building block for signal processing because of their miniature size, low insertion loss, and high quality factor. As consumer electronics push to millimeter waves frequencies, designers must increase…

Lithium niobate (LN) is a promising material for future complex photonic-electronic circuits, with wide applications in fields like data communications, sensing, optical computation, and quantum optics. There was a great step toward LN…