Related papers: Fabrication and characterization of high-Q silicon…
On-chip actuation and readout of mechanical motion is key to characterize mechanical resonators and exploit them for new applications. We capacitively couple a silicon nitride membrane to an off resonant radio-frequency cavity formed by a…
Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for…
We study mechanical dissipation of the fundamental mode of millimeter-sized, high quality-factor ($Q$) metalized silicon nitride membranes at temperatures down to 14 mK using a three-dimensional optomechanical cavity. Below 200 mK, high-$Q$…
We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm-thick, 1 mm^2 membranes have mechanical Q > 10^6 at 293 K, and Q > 10^7 at 300 mK, well above what has been observed in devices…
We propose and design a stoichiometric silicon-nitride membrane resonator featuring highly reflective at multi-wavelengths and high mechanical quality factor. The membrane resonator has a thickness of 100 nm and 2D-photonic and phononic…
We study the mechanical quality factors of bilayer aluminum/silicon-nitride membranes. By coating ultrahigh-Q Si3N4 membranes with a more lossy metal, we can precisely measure the effect of material loss on Q's of tensioned resonator modes…
Most existing implementations of silicon nitride photonic crystal cavities rely on suspended membranes due to the low refractive index of silicon nitride. Such floating membranes are not mechanically robust, making them suboptimal for…
On-chip optical resonators have the promise of revolutionizing numerous fields including metrology and sensing; however, their optical losses have always lagged behind their larger discrete resonator counterparts based on crystalline…
Si3N4 is an excellent material for applications of nanophotonics at visible wavelengths due to its wide bandgap and moderately large refractive index (n $\approx$ 2.0). We present the fabrication and characterization of Si3N4 photonic…
Thin membranes are highly sought-after for nanopore-based single-molecule sensing and fabrication of such membranes becomes challenging in the \lesssim10 nm thickness regime where a plethora of useful molecule information can be acquired by…
Networks of nonlinear resonators offer a promising platform for analog computing and the emulation of complex systems. However, realizing such networks remains challenging, as it requires resonators with high quality factors, individual…
Mechanical properties of a nanomechanical resonator have a significant impact on the performance of a resonant Nano-electromechanical system (NEMS) device. Here we study the mechanical properties of suspended membranes fabricated out of…
In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN$_x$ membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress…
We have fabricated and tested mechanical resonators consisting of a single-atomic-layer of graphene deposited on suspended silicon nitride membranes. With the addition of the graphene layer we retain the desirable mechanical properties of…
Observation of quantum phenomena in cryogenic, optically cooled mechanical resonators has been recently achieved by a few experiments based on cavity optomechanics. A well-established experimental platform is based on a thin film…
Silicon nitride (SiN) mechanical resonators with high quality mechanical properties are attractive for fundamental research and applications. However, it is challenging to maintain these mechanical properties while achieving strong coupling…
The new generation of strained silicon nitride resonators harbors great promise for scanning force microscopy, especially when combined with the extensive toolbox of cavity optomechanics. However, accessing a mechanical resonator inside an…
We describe the measurement and modeling of amplitude noise and phase noise in ultra-high Q nanomechanical resonators made from stoichiometric silicon nitride. With quality factors exceeding 2 million, the resonators' noise performance is…
We image and characterize the mechanical modes of a 2D drum resonator made of hBN suspended over a high-stress Si$_3$N$_4$ membrane. Our measurements demonstrate hybridization between various modes of the hBN resonator and those of the…
Silicon carbide (SiC) exhibits excellent material properties attractive for broad applications. We demonstrate the first SiC optomechanical microresonators that integrate high mechanical frequency, high mechanical quality, and high optical…