Related papers: A transmon qubit realized by exploiting the superc…
A new technique is presented which enables the fabrication of highly transparent Josephson junctions in combination with mesoscopic devices. We utilize a modified AFM tip to plough grooves into superconducting material, thus defining a weak…
We are developing a superconductor electronics fabrication process with up to nine planarized superconducting layers, stackable stud vias, self-shunted Nb/AlOx-Al/Nb Josephson junctions, and one layer of MoNx kinetic inductors. The minimum…
Analytical formulas are presented for simplified but useful qubit geometries that predict surface dielectric loss when its thickness is much less than the metal thickness, the limiting case needed for real devices. These formulas can thus…
We characterize a niobium-based superconducting quantum interference proximity transistor (Nb-SQUIPT) built upon a Nb-Cu-Nb SNS weak link. The Nb-SQUIPT and SNS devices are fabricated simultaneously in two separate lithography and…
We describe a microfabrication process for superconducting through-silicon vias appropriate for use in superconducting qubit quantum processors. With a sloped-wall via geometry, we can use non-conformal metal deposition methods such as…
State-of-the-art superconducting qubits rely on a limited set of thin-film materials. Expanding their materials palette can improve performance, extend operating regimes, and introduce new functionalities, but conventional thin-film…
Quantum sensing is a rapidly growing field of research which is already improving sensitivity in fundamental physics experiments. The ability to control quantum devices to measure physical quantities received a major boost from…
Quantum hardware based on circuit quantum electrodynamics makes extensive use of airbridges to suppress unwanted modes of wave propagation in coplanar-waveguide transmission lines. Airbridges also provide an interconnect enabling…
We report the fabrication and characterization of an alternative design for a superconducting quantum interference proximity transistor (SQUIPT) based on a normal metal (N) probe. The absence of direct Josephson coupling between the…
We present a structure and a fabrication method for superconducting tunnel junctions down to the dimensions of 200 nm using i-line UV lithography. The key element is a side-wall-passivating spacer structure (SWAPS) which is shaped for…
Inductance of superconducting thin-film inductors and structures with linewidth down to 250 nm has been experimentally evaluated. The inductors include various striplines and microstrips, their 90-degree bends and meanders, interlayer vias,…
Recent progress in superconductor electronics fabrication has enabled single-flux-quantum (SFQ) digital circuits with close to one million Josephson junctions (JJs) on 1-cm$^2$ chips. Increasing the integration scale further is challenging…
Josephson junctions formed in semiconductor nanowires host Andreev bound states and serve as a physical platform to realize Andreev qubits tuned by electrostatic gating. With the Andreev bound state being confined to the nanoscale weak…
There is a wide recognition that Josephson-junction-like structures intrinsic to the layered cuprate high temperature superconductors offer an attractive stage for exploiting possible applications to new quantum technologies. On the other…
Superconducting quantum circuits are a key platform for advancing quantum information processing and simulation. Scaling efforts currently encounter challenges such as Josephson-junction fabrication yield, design frequency targeting, and…
As superconducting circuits emerge as a leading platform for scalable quantum information processing, building comprehensive bridges from the foundational principles of macroscopic quantum phenomena to the architecture of modern quantum…
To increase density of superconductor digital and neuromorphic circuits by 10x and reach integration scale of $10^8$ Josephson junctions (JJs) per chip, we developed a new fabrication process on 200-mm wafers, using self-shunted…
We review the prospects to build quantum processors based on superconducting transmons and radiofrequency cavities for testing applications in the NISQ era. We identify engineering opportunities and challenges for implementation of…
We present a method for relieving aluminum 3D transmon qubits from a silicon substrate using micromachining. Our technique is a high yield, one-step deep reactive ion etch that requires no additional fabrication processes, and results in…
A superconductor-normal metal-superconductor (SNS) transistor based on superconducting microcoolers is presented. The proposed 4-terminal device consists of a long SNS Josephson junction whose N region is in addition symmetrically connected…