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The monitoring of accelerations is essential for a variety of applications ranging from inertial navigation to consumer electronics. The basic operation principle of an accelerometer is to measure the displacement of a flexibly mounted test…

Phonons traveling in solid-state devices are emerging as a universal excitation that can couple to different physical systems through mechanical interaction. At microwave frequencies and in solid-state materials, phonons have a similar…

Operation of nanomechanical devices in water environment has been challenging due to the strong viscous damping that greatly impedes the mechanical motion. Here we demonstrate an optomechanical micro-wheel resonator integrated in…

Optics · Physics 2015-08-12 King Yan Fong , Menno Poot , Hong X. Tang

We demonstrate ultrasound detection with 500-$\mu\mathrm{{m}}$-diameter photonic-crystal slab (PCS) sensors fabricated from CMOS-compatible technology. An ultrasound signal impinging a PCS sensor causes a local modulation of the refractive…

Applied Physics · Physics 2019-06-11 Eric Y. Zhu , Cory Rewcastle , Raanan Gad , Li Qian , Ofer Levi

Because of their low energy content, microwave signals at the single-photon level are extremely challenging to measure. Guided by recent progress in single-photon optomechanics and hybrid optomechanical systems, we propose a multimode…

Quantum Physics · Physics 2015-03-18 Keye Zhang , Francesco Bariani , Ying Dong , Weiping Zhang , Pierre Meystre

Optomechanical accelerometers promise quantum-limited readout, high detection bandwidth, self-calibration, and radiation pressure stabilization. We present a simple, scalable platform that enables these benefits with nano-$g$ sensitivity at…

Mesoscale and Nanoscale Physics · Physics 2022-09-01 Mitul Dey Chowdhury , Aman R. Agrawal , Dalziel J. Wilson

This chapter describes the basic design, simulation, and fabrication for fully Si integrated, waveguide coupled, optomechanical force and displacement sensors. The approach of full Si integration of all stationary nanophotonic components…

Mesoscale and Nanoscale Physics · Physics 2014-05-15 Jie Zou , Marcelo Davanco , Yuxiang Liu , Thomas Michels , Kartik Srinivasan , Vladimir Aksyuk

We present an optomechanical device platform for characterization of optical, thermal, and rheological properties of fluids on the micron scale. A suspended silicon microdisk resonator with a vibrating mass of 100 fg and an effective…

Nowadays, ultrasound sensors are playing an irreplaceable role in the fields of biomedical imaging and industrial nondestructive inspection. Currently, piezoelectric transducers are the most widely used ultrasound sensors, but their…

Optics · Physics 2023-03-23 Xuening Cao , Hao Yang , Bei-Bei Li

Visuotactile sensors provide high-resolution tactile information but are incapable of perceiving the material features of objects. We present UltraTac, an integrated sensor that combines visuotactile imaging with ultrasound sensing through…

Robotics · Computer Science 2025-09-01 Junhao Gong , Kit-Wa Sou , Shoujie Li , Changqing Guo , Yan Huang , Chuqiao Lyu , Ziwu Song , Wenbo Ding

Photonic integration offers the potential to bring complex high-performance optical systems to the form factor of a compact semiconductor chip. However, the range of system functions accessible critically depends on the extent to which…

Miniaturized, low-cost wavelength detectors are gaining enormous interest as we step into the new age of photonics. Incompatibility with integrated circuits or complex fabrication requirement in most of the conventionally used filters…

Visible and infrared photons can be detected with a broadband response via the internal photoeffect. By using plasmonic nanostructures, i.e. nanoantennas, wavelength selectivity can be introduced to such detectors through geometry-dependent…

Over the past decade, artificial intelligence (AI) has led to disruptive advancements in fundamental sciences and everyday technologies. Among various machine learning algorithms, deep neural networks have become instrumental in revealing…

Sub-femtogram resolution of an in-liquid cavity optomechanical mass sensor based on the twin-microbottle glass resonator is demonstrated. An evaluation of the frequency stability using an optomechanical phase-locked loop reveals that this…

Optics · Physics 2023-03-15 Motoki Asano , Hiroshi Yamaguchi , Hajime Okamoto

We present an approach to fabrication and packaging of integrated photonic devices that utilizes waveguide and detector layers deposited at near-ambient temperature. All lithography is performed with a 365 nm i-line stepper, facilitating…

Owing to their dual-resonance enhanced sensitivity, cavity optomechanical systems provide an ideal platform for ultrasound sensing. In this work, we realize high sensitivity air-coupled ultrasound sensing from kilohertz (kHz) to megahertz…

We present an ultrasensitive technique for probing transient optical changes in atomically thin molybdenum disulfide (MoS$_2$) layers integrated onto silicon nitride (Si$_3$N$_4$) ring resonators. The MoS$_2$ is illuminated by a femtosecond…

Magnetic field sensors with high sensitivity and spatial resolution have profoundly impacted diverse applications ranging from geo-positioning and navigation to medical imaging, materials science, and space exploration. However, the use of…

Optomechanical magnetometers enable highly sensitive magnetic field sensing. However, all such magnetometers to date have been optically excited and read-out either via free space or a tapered optical fiber. This limits their scalability…