Integrated silicon optomechanical transducers and their application in atomic force microscopy
Mesoscale and Nanoscale Physics
2014-05-15 v1 Materials Science
Abstract
This chapter describes the basic design, simulation, and fabrication for fully Si integrated, waveguide coupled, optomechanical force and displacement sensors. The approach of full Si integration of all stationary nanophotonic components with mechanically separated movable components creates the opportunity to independently engineer these two parts for a variety of MEMS and NEMS sensing applications that require high precision, high bandwidth, and small footprint. Further integration of actuators for static and dynamic actuation is also possible.
Cite
@article{arxiv.1405.3343,
title = {Integrated silicon optomechanical transducers and their application in atomic force microscopy},
author = {Jie Zou and Marcelo Davanco and Yuxiang Liu and Thomas Michels and Kartik Srinivasan and Vladimir Aksyuk},
journal= {arXiv preprint arXiv:1405.3343},
year = {2014}
}
Comments
17 pages, 6 figures. This manuscript will appear as a chapter in the book "Nanocantilever Beams: Modeling, Fabrication and Applications."