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We present two compact ultrafast electron injector designs with integrated focusing that provide high peak brightness of up to $1.9*10^{12} A/m^2Sr^2$ with 10s of electrons per laser pulse using silicon carbide electrodes and silicon…

In the past decade, the fourth-generation light source based on the combination of Energy Recovery Linac (ERL) and Free-Electron Laser (FEL) using superconducting linear accelerators has garnered significant attention. It holds immense…

Accelerator Physics · Physics 2024-10-24 Xiuji Chen , Zipeng Liu , Si Chen , Duan Gu , Xuan Huang , Houjun Qian , Dong Wang , Haixiao Deng

High harmonics generation (HHG) of coherent extreme ultraviolet (EUV) radiation enables ultrafast pump-probe spectroscopy with attosecond-scale timing resolutions. Yet beam control of generated EUV radiation remains a major challenge for…

Recent progress in laser-driven plasma acceleration now enables the acceleration of electrons to several gigaelectronvolts. Taking advantage of these novel accelerators, ultra-short, compact and spatially coherent X-ray sources called…

An experimental setup that directly reproduces Extreme UV-lithography relevant conditions for detailed component exposure tests is described. The EUV setup includes a pulsed plasma radiation source, operating at 13.5 nm; a debris mitigation…

Plasma Physics · Physics 2015-06-18 A Dolgov , O Yakushev , A Abrikosov , E Snegirev , V M Krivtsun , C J Lee , F Bijkerk

I discuss a proposal for a high intensity $e^+e^-$ linear collider operated at low center of mass energies $\sqrt{s}<5$ GeV with high intensity beams. Such a facility would provide high statistics samples of (charmed) vector mesons and…

High Energy Physics - Experiment · Physics 2007-05-23 A. Schoning

Laser-plasma acceleration is an emerging technique for accelerating electrons to high energies over very short distances. The accelerated electron bunches have femtosecond duration, making them particularly relevant for applications such as…

Vacuum ultraviolet (VUV) light is critical for the study of molecules and materials, but the generation of femtosecond pulses in the VUV region at high repetition rates has proven difficult. Here, we demonstrate the efficient generation of…

Using the illuminator for high numerical aperture (NA) extreme ultraviolet (EUV) exposure tool in EUV lithography can lead to support volume production of sub-2 nm logic nodes and leading-edge DRAM nodes. However, the typical design method…

Optics · Physics 2025-06-19 Tong Li , Yuqing Chen , Yanqiu Li , Lihui Liu

Extreme ultraviolet (XUV) light sources allow for the probing of bound electron dynamics on attosecond scales, interrogation of high-energy-density matter, and access to novel regimes of strong-field quantum electrodynamics. Despite the…

We present the physical design and systematic optimization of a high-performance storage ring tailored for the generation of high-power coherent radiation, with particular emphasis on the extreme ultraviolet (EUV) regime. The proposed ring…

Laser-plasma accelerators produce electric fields of the order of 100 GV/m, more than 1000 times larger than radio-frequency accelerators. Thanks to this unique field strength, they appear as a promising path to generate electron beams…

The absence of efficient light modulators for extreme ultraviolet (EUV) and X-ray photons significantly limits their real-life application, particularly when even slight complexity of the beam patterns is required. Here we report on a novel…

Linac-based free-electron lasers (FELs) feature high brightness, narrow bandwidth, controllable polarization, and wide wavelength tunability. With the rapid development of superconducting radio-frequency technology, linacs can now operate…

Accelerator Physics · Physics 2026-03-24 Hanxiang Yang , Zhangfeng Gao , Bingyang Yan , Wencai Cheng , Nanshun Huang , Haixiao Deng

We report on the generation of intense extreme ultraviolet (EUV) supercontinuum with photon energies spanning from 35 eV to 50 eV (i. e., supporting an isolated attosecond pulse with a duration of ~271 as) by loosely focusing 35 fs, 11 mJ…

Optics · Physics 2015-05-30 Bin Zeng , Wei Chu , Guihua Li , Jinping Yao , Jielei Ni , Haisu Zhang , Ya Cheng , Zhizhan Xu

We show the laser-driven acceleration of unprecedented, collimated ($ 2 \ \mathrm{mrad} $ divergence), and quasi-monoenergetic ($ 25 \ \% $ energy spread) electron beams with energy up to $ 50 \ \mathrm{MeV} $ at $ 1 \ \mathrm{kHz} $…

The design of the Linac Coherent Light Source assumes that a low-emittance, 1-nC, 10-ps beam will be available for injection into the 15-GeV linac. The proposed rf photocathode injector that will provide a 150-MeV beam with rms normalized…

Microscopy with extreme ultraviolet (EUV) radiation holds promise for high-resolution imaging with excellent material contrast, due to the short wavelength and numerous element-specific absorption edges available in this spectral range. At…

High harmonic generation (HHG) enables extreme ultraviolet radiation with table-top setups. Its exceptional properties, such as coherence and (sub)-femtosecond pulse durations, have led to a diversity of applications. Some of these require…

One of the major goals of research for laser-plasma accelerators is the realization of compact sources of femtosecond X-rays. In particular, using the modest electron energies obtained with existing laser systems, Compton scattering a…

Plasma Physics · Physics 2013-01-18 K. Ta Phuoc , S. Corde , C. Thaury , V. Malka , A. Tafzi , J. P. Goddet , R. C. Shah , S. Sebban , A. Rousse