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Nanoscale manufacturing requires high-precision surface inspection to guarantee the quality of the produced nanostructures. For production environments, angle-resolved scatterometry offers a non- invasive and in-line compatible alternative…

Signal Processing · Electrical Eng. & Systems 2025-08-26 Mehdi Abdollahpour , Carsten Bockelmann , Tajim Md Hasibur Rahman , Armin Dekorsy , Andreas Fischer

Periodic structures are often found in various areas of nanoscience and nanotechnology with many of them being used for metrological purposes either to calibrate instruments, or forming the basis of measuring devices such as encoders.…

Data Analysis, Statistics and Probability · Physics 2023-02-13 David Nečas , Andrew Yacoot , Petr Klapetek

Resonant (elastic) soft x-ray scattering (RSXS) offers a unique element, site, and valence specific probe to study spatial modulations of charge, spin, and orbital degrees of freedom in solids on the nanoscopic length scale. It cannot only…

Materials Science · Physics 2013-04-12 J. Fink , E. Schierle , E. Weschke , J. Geck

Inverse scattering is the process of estimating the spatial distribution of the scattering potential of an object by measuring the scattered wavefields around it. In this paper, we consider reflection tomography of high contrast objects…

Signal Processing · Electrical Eng. & Systems 2020-12-17 Ajinkya Kadu , Hassan Mansour , Petros T. Boufounos

We propose a new compressive imaging method for reconstructing 2D or 3D objects from their scattered wave-field measurements. Our method relies on a novel, nonlinear measurement model that can account for the multiple scattering phenomenon,…

Computer Vision and Pattern Recognition · Computer Science 2016-10-07 Hsiou-Yuan Liu , Ulugbek S. Kamilov , Dehong Liu , Hassan Mansour , Petros T. Boufounos

Extreme ultraviolet (EUV) scatterometry is an increasingly important metrology that can measure critical parameters of periodic nanostructured materials in a fast, accurate, and repeatable manner and with high sensitivity to nanoscale…

We demonstrate a technique that allows highly surface sensitive imaging of nanostructures on planar surfaces over large areas, providing a new avenue for research in materials science, especially for \textit{in situ} applications. The…

Obtaining conductance spectra for a concentration of disordered impurities distributed over a nanoscale device with sensing capabilities is a well-defined problem. However, to do this inversely, i.e., extracting information about the…

Mesoscale and Nanoscale Physics · Physics 2021-12-01 S. Mukim , J. O'Brien , M. Abarashi , M. S. Ferreira , C. G. Rocha

This paper is concerned with the inverse scattering problem for the three-dimensional Maxwell's equations in bi-anisotropic periodic structures. The inverse scattering problem aims to determine the shape of bi-anisotropic periodic…

Numerical Analysis · Mathematics 2020-08-25 Dinh-Liem Nguyen , Trung Truong

Recently, split ring-resonators (SRR's) have been realized experimentally in the near infrared (NIR) and optical regime. In this contribution we numerically investigate light propagation through an array of metallic SRR's in the NIR and…

Materials Science · Physics 2009-05-28 S. Burger , L. Zschiedrich , R. Klose , A. Schädle , F. Schmidt , C. Enkrich , S. Linden , M. Wegener , C. M. Soukoulis

Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF) based characterization of the 3D atomic distribution of different elements and dimensional parameters of periodic nanoscale structures, this work presents a…

The development of small-angle scattering tensor tomography has enabled the study of anisotropic nanostructures in a volume-resolved manner. It is of great value to have reconstruction methods that can handle many different nanostructural…

Materials Science · Physics 2024-03-22 Leonard C. Nielsen , Paul Erhart , Manuel Guizar-Sicairos , Marianne Liebi

The multiple scattering method T-matrix (MSTMM) can be used to solve the electromagnetic response of systems consisting of many compact scatterers, retaining a good level of accuracy while using relatively few degrees of freedom, largely…

Optics · Physics 2021-06-16 Marek Nečada , Päivi Törmä

In an ultrasonic array system, increasing the aperture size to achieve a high resolution requires more transmit and receive channels, thus making it essential to have an analysis technique that can reconstruct the shape and physical…

Optics · Physics 2025-08-21 Kai Yabumoto , Takayoshi Yumii , Kenjiro Kimura

Hybrid nanophotonics based on metal-dielectric nanostructures unifies the advantages of plasmonics and all-dielectric nanophotonics providing strong localization of light, magnetic optical response and specifically designed scattering…

Interferometric scattering microscopy is a powerful technique that enables various applications, such as mass photometry and particle tracking. Here we present a numerical toolbox to simulate images obtained in interferometric scattering,…

Magnetic nanoparticles offer unique potential for various technological, biomedical, or environmental applications thanks to the size-, shape- and material-dependent tunability of their magnetic properties. To optimize particles for a…

We lay the foundations for a new fast method to reconstruct the electron density in x-ray scanning applications using measurements in the dark field. This approach is applied to a type of machine configuration with fixed energy sensitive…

Numerical Analysis · Mathematics 2015-05-08 James Webber

Coherent imaging techniques such as ptychography offer powerful capabilities for 3D resolution of nanoscale structures. By application in grazing incidence, such techniques may achieve exceptional surface sensitivity as demonstrated by…

We experimentally test a recently proposed holographic method for imaging coherent light scatterers which are distributed over a 2-dimensional grid. In our setup the scatterers consist of a back-illuminated, opaque mask with submicron-sized…