Related papers: Hybrid approach to reconstruct nanoscale grating d…
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a…
We present an optical metrology system for characterization of topography of micro/nano-structures on a surface or embedded in a semi-transparent material. Based on the principles of scatterometry, where the intensity of scattered light is…
It has been seen recently that when probing a nanoscale object to determine, for example, size or position via light scattering, significant advantage in measurement precision can be gained from exploiting phase singularities in a…
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next generation integrated electronic circuits. Modern transistor architectures for e.g. FinFETs…
For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Using the grazing incidence X-ray fluoresence technique, which…
Modelling the scattering of focused, coherent light by nano-scale structures is oftentimes used to reconstruct or infer geometrical or material properties of structures under investigation in optical scatterometry. This comprises both…
This paper introduces a novel boundary integral approach of shape uncertainty quantification for the Helmholtz scattering problem in the framework of the so-called parametric method. The key idea is to construct an integration grid whose…
Increasing miniaturization and complexity of nanostructures require innovative metrology solutions with high throughput that can assess complex 3D structures in a non-destructive manner. EUV scatterometry is investigated for the…
Multi-MeV flash radiography is often used as the primary diagnostic technique for high energy and density (HED) physics experiments. Primary X-ray which is attenuated by the object offers density information of the object. For a thick metal…
Single-shot X-ray imaging of short-lived nanostructures such as clusters and nanoparticles near a phase transition or non-crystalizing objects such as large proteins and viruses is currently the most elegant method for characterizing their…
This study explores the use of synchrotron measurements as a nanometrology tool for blazed gratings. In grazing incidence geometry, one can measure both the conical diffraction and the diffuse scattering on the grating simultaneously in a…
Scanning transmission X-ray microscopy and ptychography have become mature tools for high-resolution, element-specific imaging of nanoscale structures. However, transmission geometries impose stringent constraints on sample thickness and…
We propose a scheme for detecting and differentiating deeply subwavelength particles based on their spatial features. Our approach combines scattering from an ultrasonically modulated nanopatterend grating with heterodyne techniques to…
We present an efficient machine learning framework for detection and classification of nanoparticles on surfaces that are detected in the far-field with Coherent Fourier Scatterometry (CFS). We study silicon wafers contaminated with…
We present a hybrid imaging method for a challenging travel time tomography problem which includes both unknown medium and unknown scatterers in a bounded domain. The goal is to recover both the medium and the boundary of the scatterers…
We outline a strategy for quantitatively evaluating the conformational characteristics of self-assembled structures using the techniques of contrast variation small angle neutron scattering. By means of basis function expansion, a case…
Many nano and quantum devices, with their sizes often spanning from millimeters down to sub-nanometer, have intricate low-dimensional, non-uniform, or hierarchical structures on surfaces and interfaces. Since their functionalities are…
Wide bandgap semiconductor heterostructures based on nanowires have attracted great interest as one of the nanoscale building blocks for the development of novel optoelectronic devices. Owing to the critical role of heterogeneities and…
A variety of problems in device and materials design require the rapid forward modeling of Maxwell's equations in complex micro-structured materials. By combining high-order accurate integral equation methods with classical multiple…
Light scattering in disordered media has been studied extensively due to its prevalence in natural and artificial systems [1]. In the field of photonics most of the research has focused on understanding and mitigating the effects of…