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On-chip optical waveguides with low propagation losses and precisely engineered group velocity dispersion (GVD) are important to nonlinear photonic devices such as soliton microcombs. Yet, despite intensive research efforts, nonlinear…

Integrated quantum photonics requires compact, efficient, and low-power phase modulators. While silicon nitride (SiN) is a promising platform, existing modulators suffer from high power consumption, thermal crosstalk, or high driving…

Amorphous silicon carbide (a-SiC) has emerged as a compelling candidate for applications in integrated photonics, known for its high refractive index, high optical quality, high thermo-optic coefficient, and strong third-order…

The integrated photonics CMOS-compatible silicon nitride (SiN) platform is praised for its low propagation loss, but is limited by its lack of active functionalities such as a strong Pockels coefficient and intrinsic \c{hi}(2) nonlinearity.…

Co-Packaged Optics applications require scalable and high-yield optical interfacing solutions to silicon photonic chiplets, offering low-loss, broadband, and polarization-independent optical coupling while maintaining compatibility with…

We present an open-source multimode nonlinear Schr\"odinger equation-based simulation to investigate spatiotemporal nonlinear pulse propagation in thin-film silicon nitride (SiN) waveguides. Using this framework, we analyze femtosecond…

Optics · Physics 2025-08-27 Azka Maula Iskandar Muda , Uğur Teğin

The recent discovery of room temperature intrinsic single-photon emitters in silicon nitride (SiN) provides the unique opportunity for seamless monolithic integration of quantum light sources with the well-established SiN photonic platform.…

This study presents a comprehensive investigation into the exceptional superconducting attributes of titanium nitride (TiN) achieved through plasma-enhanced atomic layer deposition (PEALD) on both planar and intricate three-dimensional (3D)…

Superconductivity · Physics 2023-12-18 John Femi-Oyetoro , Sasha Sypkens , Henry LeDuc , Matthew Dickie , Andrew Beyer , Peter Day , Frank Greer

Silicon nitride (Si3N4) ring resonators are critical for a variety of photonic devices. However the intrinsically high film stress of silicon nitride has limited both the optical confinement and quality factor (Q) of ring resonators. We…

Optics · Physics 2013-09-27 Kevin Luke , Avik Dutt , Carl B. Poitras , Michal Lipson

Silicon nitride (SiN) photonics platform has attributes of ultra-low linear and nonlinear propagation losses and CMOS-compatible fabrication process, promising large-scale multifunctional photonic circuits. However, the centrosymmetric…

Optics · Physics 2022-06-08 Binbin Wang , Yafei Ji , Linpeng Gu , Liang Fang , Xuetao Gan , Jianlin Zhao

The microstructure of SiNx is strongly affected by its stoichiometry, x. The stoichiometry of SiNx thin films can be modified by adjusting the gas flow rates during LPCVD deposition. The deficiency or excess of Si atoms enhance the…

Materials Science · Physics 2025-12-11 A. E. Mavropoulis , G. Pissanos , N. Vasileiadis , P. Normand , G. Ch. Sirakoulis , P. Dimitrakis

Microwave-frequency acoustic waves in solids have emerged as a versatile platform for both classical and quantum applications. While phononic integrated devices and circuits are being developed on various material platforms, an ideal…

Applied Physics · Physics 2026-03-31 Jun Ji , Joseph G Thomas , Zichen Xi , Ruxuan Liu , Kinson Fang , Yuan Qin , Andreas Beling , Xu Yi , Yizheng Zhu , Linbo Shao

Supercontinuum generation (SCG) is an important nonlinear optical process enabling broadband light sources for many applications, for which silicon nitride(Si3N4) has emerged as a leading on-chip platform.To achieve suitable group velocity…

Integrated photonics has profoundly impacted a wide range of technologies underpinning modern society. The ability to fabricate a complete optical system on a chip offers unrivalled scalability, weight, cost and power efficiency. Over the…

Nonlinear nanophotonic waveguides have opened a route to compact frequency combs for precision metrology, spectroscopy and astronomy, yet broadband comb access to the visible remains challenging on CMOS-compatible platforms. Silicon nitride…

The integration of active light-emitting elements into planar photonic circuits on a silicon nitride platform remains challenging due to material incompatibilities and high-temperature processing. Proposed hybrid method embeds monodisperse…

We report on the realization of silicon nitride membranes with enhanced and electrically tunable reflectivity. A subwavelength one-dimensional grating is directly patterned on a suspended 200 nm-thick, high stress commercial film using…

Mesoscale and Nanoscale Physics · Physics 2020-01-08 Bhagya Nair , Andreas Naesby , Bjarke R. Jeppesen , Aurélien Dantan

At vertical edges, thin films of silicon oxide (SiO_{2-x}) contain semiconductive c-Si layered nanocrystals (Si NC) embedded in and supported by an insulating g-SiO2 matrix. Tour et al. have shown that a trenched thin film geometry enables…

Materials Science · Physics 2015-05-20 J. C. Phillips

Low-loss photonic integrated circuits (PIC) and microresonators have enabled novel applications ranging from narrow-linewidth lasers, microwave photonics, to chip-scale optical frequency combs and quantum frequency conversion. To translate…

Supercontinuum generation using chip-integrated photonic waveguides is a powerful approach for spectrally broadening pulsed laser sources with very low pulse energies and compact form factors. When pumped with a mode-locked laser frequency…