Related papers: Accurate, precise pressure sensing with tethered o…
Precisely measuring pressure in microfluidic flows is essential for flow control, fluid characterization, and monitoring, but faces specific challenges such as \RE{achieving} sufficient resolution, non-invasiveness, or ease of use. Here, we…
For traditional capacitive pressure sensors, high nonlinearity and poor sensitivity greatly limited their sensing applications. Hence, an innovative design of capacitors based on spiral comb electrodes is proposed for high-sensitivity…
We propose a realistic system with separated optical and mechanical degrees of freedom, in which a high-mechanical-quality silicon nitride membrane is placed upon a high-optical-quality whispering gallery microcavity. The strongly enhanced…
Pursuing ultrasensitivity of pressure sensors has been a long-standing goal. Here, we report a piezoelectric sensor that exhibits supreme pressure-sensing performance, including a peak sensitivity up to 3.5*10^6 kPa^-1 in the pressure range…
The monitoring of accelerations is essential for a variety of applications ranging from inertial navigation to consumer electronics. The basic operation principle of an accelerometer is to measure the displacement of a flexibly mounted test…
We consider mid-infrared (5 to 25 micrometers), optically cooled detectors based on a microcantilever sensor of the radiation pressure. A significant enhancement of sensitivity is achieved due the combination of low effective temperature…
Ultrathin lightsails propelled by laser radiation pressure to relativistic speeds are currently the most promising route for flyby-based exoplanet exploration. However, there has been a notable lack of experimental characterization of key…
We realize squeeze film pressure sensors using suspended, high mechanical quality silicon nitride membranes forming few-micron gap sandwiches. The effects of air pressure on the mechanical vibrations of the membranes are investigated in the…
The reliable operation of micro and nanomechanical devices necessitates a thorough knowledge of the water film thickness present on the surfaces of these devices with an accuracy in the nm range. In this work, the thickness of an ultra-thin…
We present an optomechanical device platform for characterization of optical, thermal, and rheological properties of fluids on the micron scale. A suspended silicon microdisk resonator with a vibrating mass of 100 fg and an effective…
Luminescence-based sensors for measuring oxygen concentration are widely used both in industry and research due to the practical advantages and sensitivity of this type of sensing. The measuring principle is the luminescence quenching by…
Atomic sensors have shown great promise for density and pressure metrology in the high, ultra-high, and extremely-high vacuum regimes. Specifically, the density of background gas particles in vacuum can be determined by measuring the…
Directional couplers are a fundamental building block in integrated photonics, particularly in quantum applications and optimization-based design where precision is critical. Accurate functionality is crucial to ensure reliable operation…
In recent years, pressure sensors have been widely used as crucial technology components in industrial, healthcare, consumer electronics, and automotive safety applications. With the development of intelligent technologies, there is a…
Accurate measurements of the nanoscale electromechanical coupling in materials, including piezo and ferroelectrics, twisted 2D layers, and biological systems is of both fundamental scientific and applied importance. Piezoresponse Force…
Fast identification methods of pressure sensors are investigated. With regard to a complete accurate sensor parameter identification two different measurement methods are combined. The approach consists on one hand in performing static…
An aircraft's airspeed, angle of attack, and angle of side slip are crucial to its safety, especially when flying close to the stall regime. Various solutions exist, including pitot tubes, angular vanes, and multihole pressure probes.…
The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of…
High-precision inertial sensing and gravity sensing are key in navigation, oil exploration, and earthquake prediction. In contrast to prior accelerometers using piezoelectric or electronic capacitance readout techniques, optical readout…
Atomic force microscopy (AFM) has been constantly supporting nanosciences and nanotechnologies for over 30 years, being present in many fields from condensed matter physics to biology. It enables measuring very weak forces at the nanoscale,…