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A lot of work on clamped circular, square and rectangular shaped capacitive pressure sensor has been carried out. However, to the best of our knowledge, no elaborate work has been performed on mathematical formulation and simulation of…

Applied Physics · Physics 2019-10-02 Rishabh Bhooshan Mishra , S. Santosh Kumar

A high-sensitivity wireless pressure sensor with active processing structure designed on the dielectric substrate has been present and evaluated in this paper. The sensor configuration has been optimized by computer-aided design to achieve…

Instrumentation and Detectors · Physics 2024-11-27 Baiyun Wang , Yijia Cheng , Yujie Hua , Wenxuan Tang , Wei E. I. Sha , Hao Xu , Kang Wang , Jundi Hu , Huaqing Fan , Huanran Peng , Gang Shao

The flexible capacitive pressure sensors are one of the most essential and famous devices with vast applications in automobile, aerospace, marine, healthcare, wearables, consumer, and portable electronics. The fabrication of pressure…

Systems and Control · Electrical Eng. & Systems 2021-06-22 Rishabh Bhooshan Mishra

The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors the sensitivity offered by a single suspended…

This paper presents the mathematical modeling-based design and simulation of normal mode MEMS capacitive pressure sensor for blood pressure sensing application. The normal blood pressure of human being is 120/80 mmHg. But this range varies…

Medical Physics · Physics 2023-01-31 Rishabh Bhooshan Mishra , S. Santosh Kumar , Ravindra Mukhiya

In this paper, a capacitive flexible tactile sensor was designed to measure the pressure of objects based on MEMS technology. This sensor is a structure of a 4x4 array, with metal Ag as the capacitive electrode, which forms the tactile…

Materials Science · Physics 2021-11-02 Dandan Yuan , Haoxin Shu , Yulong Bao , Bin Xu , Huan Wang

In Micro-electro-mechanical Systems (MEMS) based pressure sensors and acoustic devices, deflection of a membrane is utilized for pressure or sound measurements. Due to advantages of capacitive pressure sensor over piezoresistive pressure…

Applied Physics · Physics 2019-08-29 Rishabh Bhooshan Mishra , S Santosh Kumar , Ravindra Mukhiya

This paper presents a comprehensive analytical and simulation-based study of curved electrode geometries for enhancing the sensitivity of MEMS capacitive accelerometers. Expressions for the capacitance between a planar movable electrode and…

Systems and Control · Electrical Eng. & Systems 2025-08-19 Adhinarayan Naembin Ashok , Adarsh Ganesan

Flexible pressure sensors are an attractive area of research due to their potential applications in biomedical sensing and wearable devices. Among flexible and wearable pressure sensors, capacitive pressure sensors show significant…

Applied Physics · Physics 2021-11-12 Lekshmi A. Kurup , Cameron M. Cole , Joshua N. Arthur , Soniya D. Yambem

In this paper, an electromagnetic sensor which can operate simultaneously in capacitive and inductive modalities with sensitivities to permittivity, conductivity, and permeability is developed, and a novel measurement strategy is proposed…

Signal Processing · Electrical Eng. & Systems 2019-05-30 Jorge R. Salas Avila , Kin Yau How , Mingyang Lu , Wuliang Yin

As robotics advances toward integrating soft structures, anthropomorphic shapes, and complex tasks, soft and highly stretchable mechanotransducers are becoming essential. To reliably measure tactile and proprioceptive data while ensuring…

Robotics · Computer Science 2025-02-26 Lukas Cha , Sonja Groß , Shuai Mao , Tim Braun , Sami Haddadin , Liang He

A micro-pressure sensor with an isosceles trapezoidal beam-membrane (ITBM) is proposed in this paper, consisting of a square silicon membrane, four isosceles trapezoidal beams and four piezoresistors.To investigate how the elastic silicon…

Applied Physics · Physics 2020-12-02 Jing Wu , Xiaofeng Zhao , Yibo Liu , Dianzhong Wen

In this work, a large area, low cost and flexible polymer/paper-based double touch mode capacitive pressure sensor is demonstrated. Garage fabrication processes are used which only require cutting, taping and assembly of aluminum (Al)…

Signal Processing · Electrical Eng. & Systems 2024-12-25 Rishabh B. Mishra , Wedyan Babatain , Nazek El-Atab , Aftab M. Hussain , Muhammad M. Hussain

Capacitive technology allows building sensors that are small, compact and have high sensitivity. For this reason it has been widely adopted in robotics. In a previous work we presented a compliant skin system based on capacitive technology…

Robotics · Computer Science 2021-06-30 Perla Maiolino , Marco Maggiali , Giorgio Cannata , Giorgio Metta , Lorenzo Natale

CMOS pixel sensors with a small collection electrode combine the advantages of a small sensor capacitance with the advantages of a fully monolithic design. The small sensor capacitance results in a large ratio of signal-to-noise and a low…

High-precision sensors are of fundamental importance in modern society and technology.Although numerous sensors have been developed, obtaining sensors with higher levels of sensitivity and stronger robustness has always been expected. Here,…

Quantum Physics · Physics 2025-02-12 Wenyuan Deng , Wei Zhu , Tian Chen , Houjun Sun , Xiangdong Zhang

This paper presents a novel six-axis force/torque (F/T) sensor based on inductive sensing technology. Unlike conventional strain gauge-based sensors that require direct contact and external amplification, the proposed sensor utilizes…

Robotics · Computer Science 2025-05-15 Hyun-Bin Kim , Kyung-Soo Kim

A monolithic integrated tactile sensor array is presented, which is used to perform non-invasive blood pressure monitoring of a patient. The advantage of this device compared to a hand cuff based approach is the capability of recording…

Other Computer Science · Computer Science 2011-11-09 K. -U. Kirstein , J. Sedivy , T. Salo , C. Hagleitner , T. Vancura , A. Hierlemann

Flexible strain sensors are critical to several potential intelligent applications, such as human-machine interfaces, soft robotics, human motion detection, and safety monitoring of components. Stretchable functional materials are important…

A highly sensitive refractive index sensor based on grating-assisted strip waveguide directional coupler is proposed. The sensor is designed using two coupled asymmetric strip waveguides with a top-loaded grating structure in one of the…

Applied Physics · Physics 2017-09-27 Parvinder Kaur , M. R. Shenoy
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