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Combinatorial sputtering is a physical vapor deposition method that enables the high-throughput synthesis of compositionally varied thin films. Using this technique, the effects of stoichiometry on specific properties of alloy thin films…

Materials Science · Physics 2026-02-20 Shelby Sutton Fields , Christopher David White , Keith Knipling , Steven Bennett

A magnetron sputtering method for the production of thin-film libraries with a spatially varying composition, x, in Bi2Sr2Ca1-xYxCu2Oy (0<=x<=0.5) has been developed. Two targets with a composition of Bi2Sr2YCu2O_{8.5 + \delta} and…

Superconductivity · Physics 2009-11-11 R. J. Sanderson , K. C. Hewitt

Compositionally graded Fe-Pt thin films were prepared on stationary 100 mm Si substrates by magnetron sputtering a base target of Fe on which a piece of Pt is asymmetrically positioned. Energy Dispersive X-Ray analysis was used to map the…

Autonomous experimentation has emerged as an efficient approach to accelerate the pace of materials discovery. Although instruments for autonomous synthesis have become popular in molecular and polymer science, solution processing of hybrid…

This paper presents the development of scientific instrumentation for the fabrication of ferromagnetic thin films, by sputtering technique, for the use of 2-inch-diameter targets. Thin films were deposited using Permalloy alloy (Ni80Fe20)…

This paper reports on the deposition and photoluminescence of amorphous and crystalline thin films of zinc gallium oxide with Ga:Zn atomic ratio varied between 0.3 and 5.7. The films are prepared by reactive direct current magnetron…

Ternary transition-metal nitrides with layered crystal structures host anisotropic bonding and reduced dimensionality that may enable unconventional electronic and magnetic behavior. Yet, synthesis of such nitride thin films remains…

This study demonstrates the direct correlation between the presence of the L2$_1$ ordered phase and the large enhancement in the thermoelectric performance of Fe$_2$VAl thin films deposited on MgO and Al$_2$O$_3$ substrates at temperatures…

Recently, magnetic 2-dimensional (2D) van der Waals (vdW) materials have garnered tremendous attention. The vdW ferromagnet Fe5Ge1Te2 has a Curie temperature Tc of ~ 270 K, which is tailorable by tuning the stoichiometry and the Fe…

Thin highly textured Fe$_{\mathrm{1+x}}$Co$_{\mathrm{2-x}}$Si ($0 \leq$ x $\leq 1$) films were prepared on MgO (001) substrates by magnetron co-sputtering. The magneto-optic Kerr effect (MOKE) and ferromagnetic resonance (FMR) measurements…

We grow epitaxial Sm-Co thin films by sputter deposition from an alloy target with a nominal SmCo5 composition on Cr(100)-buffered MgO(100) single-crystal substrates. By varying the Ar gas pressure, we can change the composition of the film…

Materials Science · Physics 2015-04-23 T. G. A. Verhagen , D. B. Boltje , J. M. van Ruitenbeek , J. Aarts

Ga2O3 thin films were deposited by reactive magnetron sputtering from a liquid gallium target. The influence of deposition temperature, substrate type, and discharge parameters on the structural and electrical properties was systematically…

Materials Science · Physics 2026-05-01 Petr Novak , Jan Koloros , Stanislav Haviar , Jiri Rezek , Pavel Baroch

Self-driving labs (SDLs), employing automation and machine learning (ML) to accelerate experimental procedures, have enormous potential in the discovery of new materials. However, in thin film science, SDLs are mainly restricted to…

Machine Learning · Computer Science 2026-01-12 Sanna Jarl , Jens Sjölund , Robert J. W. Frost , Anders Holst , Jonathan J. S. Scragg

We investigate sputtering of a Ti3SiC2 compound target at temperatures ranging from RT (no applied external heating) to 970 oC as well as the influence of the sputtering power at 850 oC for the deposition of Ti3SiC2 films on Al2O3(0001)…

A current approach to depositing highly plasmonic titanium nitride films using the magnetron sputtering technique assumes that the process is performed at temperatures high enough to ensure the atoms have sufficient diffusivities to form…

We develop a high-throughput method for measuring the composition dependence of magnetoresistance (MR) and spin-transfer-torque (STT) effects in current-perpendicular-to-plane giant magnetoresistance (CPP-GMR) devices and report its…

Materials Science · Physics 2024-06-12 Vineet Barwal , Hirofumi Suto , Tomohiro Taniguchi , Yuya Sakuraba

The PTFE (Teflon) has been selected as the self-template structural material in preparation of VO2 films using reactive magnetron sputtering systems and post annealing progress. Spontaneous random nano-porous structures of VO2 films growing…

Applied Physics · Physics 2019-02-12 Shiwei Long , Xun Cao , Rong Huang , Fang Xu , Ning Li , Aibin Huang , Guangyao Sun , Shanhu Bao , Hongjie Luo , Ping Jin

We fabricated NiFe2O thin films on MgAl2O4 (001) substrates by reactive dc magnetron co-sputtering in a pure oxygen atmosphere at different substrate temperatures. The film properties were investigated by various techniques with a focus on…

This study presents a novel method for fabricating stoichiometric SnS thin films with large grain sizes via reactive sputtering using a metallic Sn target and sulfur plasma (S-plasma). Unlike conventional approaches that rely on toxic H2S…

Materials Science · Physics 2025-03-24 Daiki Motai , Issei Suzuki , Taichi Nogami , Takahisa Omata

FeTe is a prototypical parent compound of iron-based superconductors. While bulk FeTe is non-superconducting with a long-range bicollinear antiferromagnetic order, superconductivity has been achieved in thin films. However, the approaches…

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