Related papers: 2-16 GHz Multifrequency X-Cut Lithium Niobate NEMS…

This letter presents miniature millimeter wave (mmWave, above 30 GHz) acoustic resonators based on a single-layer thin-film lithium niobate (LN) platform. More specifically, we present high performance third-order antisymmetric (A3) mode…

As 5G connectivity proliferates, signal processing applications at 6G centimeter bands have gained attention for urban wireless capacity expansion. At sub-5 GHz, acoustic resonators operating in the fundamental symmetric (S0) Lamb mode hold…

In this work, we have successfully engineered and examined suspended laterally vibrating resonators (LVRs) on a lithium niobate thin film on lithium niobate carrier wafer (LN-on-LN) platform, powered by aluminum interdigital transducers…

This work presents a new class of micro-electro-mechanical system (MEMS) resonators toward Ka band (26.5-40GHz) for fifth-generation (5G) wireless communication. Resonant frequencies of 21.4 and 29.9 GHz have been achieved using the fifth…

We report on fabrication of high Q lithium niobate (LN) whispering-gallery-mode (WGM) microresonators suspended on silica pedestals by femtosecond laser microfabrication. The micrometer-scale (diameter ~82 {\mu}m) LN resonator possesses a Q…

Monolithic integration of multiband (1.4~ 6.0 GHz) RF acoustic devices were successfully demonstrated within the same process flow by using the lithium niobate (LN) thin film on silicon carbide (LNOSiC) substrate. A novel surface mode with…

In this work, we demonstrate a C-band shear-horizontal surface acoustic wave (SH-SAW) resonator with high electromechanical coupling (kt2) of 22% and a quality factor (Q) of 565 based on a thin-film lithium niobate (LN) on silicon carbide…

This paper presents a new class of micro-electro-mechanical system (MEMS) C-band filters for 5G front-ends. The filter is comprised of resonators based on the first-order asymmetric Lamb wave (A1) mode in thin film lithium niobate. Two…

This paper is the first report of the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO$_{3}$) MEMS resonator array up to 500{\deg}C in air. After a high-temperature burn-in treatment, device…

Lithium Niobate (LN or just niobate) thin-film micro-photonic resonators have promising prospects in many applications including high efficiency electro-optic modulators, optomechanics and nonlinear optics. This paper presents free-standing…

Lithium niobate is a promising material for developing quantum acoustic technologies due to its strong piezoelectric effect and availability in the form of crystalline thin films of high quality. However, at radio frequencies and cryogenic…

We present a compact, resonant-based coherent modulator on a thin-film lithium niobate (TFLN) platform, addressing the growing demand for high-speed, energy-efficient modulators in modern telecommunications. The design incorporates…

We report on the design of loop-gap resonators (LGR) operating in the frequency range 34-36 GHz with the goal to achieve single electron spin resonance (ESR) in quantum dot nanostructures. We present a comprehensive study of the magnetic…

The need for high-temperature piezoelectric microelectromechanical systems (MEMS) requires pushing piezoelectric platforms to their thermal limits. In harsh thermal environments, piezoelectric MEMS devices are expected to sustain severe…

We demonstrate a three-dimensional fin lithium niobate (FinLN) acoustic resonator fabricated from thick lithium niobate on insulator using deep ion etching and sidewall electrode patterning. The FinLN geometry enables strong…

This work reports on a technology-agnostic and frequency-independent methodology combining a-priori modeling, Finite Element Analysis (FEA), and experimental results for the characterization of acoustic losses in interdigitated…

Lithium Niobate (LN) is an important nonlinear optical material. Here we demonstrate LN microdisk resonators that feature optical quality factor ~ 100,000, realized using robust and scalable fabrication techniques, that operate over a wide…

Quantum sensing and computation can be realized with superconducting microwave circuits. Qubits are engineered quantum systems of capacitors and inductors with non-linear Josephson junctions. They operate in the single-excitation quantum…

Phononic nanodevices offer a promising route toward quantum technologies, as phonons combine strong confinement within matter with broad coupling capabilities to various quantum systems. In particular, the piezoelectric response of…

We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the…