Related papers: Squeeze film absolute pressure sensors with sub-mi…
We realize squeeze film pressure sensors using suspended, high mechanical quality silicon nitride membranes forming few-micron gap sandwiches. The effects of air pressure on the mechanical vibrations of the membranes are investigated in the…
Squeeze film pressure sensors, exploiting the dynamical modification of the mechanical properties of oscillating elements due to the compression of a fluid in a small gap region, allow for direct and absolute pressure measurements. This…
The operating principle of squeeze-film pressure sensors is based on the pressure dependence of a membrane's resonance frequency, caused by the compression of the surrounding gas which changes the resonator stiffness. To realize such…
The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high frequency motion. This effect is…
Membrane-based sensors are an important market for microelectromechanical systems (MEMS). Two-dimensional (2D) materials, with their low mass, are excellent candidates for suspended membranes to provide high sensitivity, small footprint…
The effects of pressure on micromechanical air-filled cavities made by a pair of suspended, parallel silicon nitride membranes are investigated in the free molecular and quasi-molecular regimes. Variations of the fundamental drummode…
We report on the realization of silicon nitride membranes with enhanced and electrically tunable reflectivity. A subwavelength one-dimensional grating is directly patterned on a suspended 200 nm-thick, high stress commercial film using…
Graphene has good mechanical properties including large Young's modulus, making it ideal for many resonant sensing applications. Nonetheless, the development of graphene based sensors has been limited due to difficulties in fabrication,…
Mechanical properties of a nanomechanical resonator have a significant impact on the performance of a resonant Nano-electromechanical system (NEMS) device. Here we study the mechanical properties of suspended membranes fabricated out of…
Graphene-based 2D heterostructures exhibit excellent mechanical and electrical properties, which are expected to exhibit better performances than graphene for nanoelectromechanical pressure sensors. Here, we built the pressure sensor models…
Atomically thin two-dimensional materials such as graphene exhibit extremely high-pressure sensitivity compared to the commercially used pressure sensors due to their high surface-to-volume ratio and excellent mechanical properties. The…
052<p type="texpara" tag="Body Text" et="abstract" >The superconducting proximity effect is measured in sandwiches of thin Pb films and the alkali metals Cs, Rb, K and Na. The $T_{c}$-dependence provides information about the interface…
The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors the sensitivity offered by a single suspended…
Lattice compression has emerged as a fundamental tuning parameter for nickelate superconductivity. Pressure acts as a trigger to induce superconductivity in bulk Ruddlesden-Popper nickelates. For infinite-layer nickelate thin films,…
Two-dimensional (2D) layered materials are ideal for micro- and nanoelectromechanical systems (MEMS/NEMS) due to their ultimate thinness. Platinum diselenide (PtSe$_{2}$), an exciting and unexplored 2D transition metal dichalcogenides (TMD)…
A high-sensitivity wireless pressure sensor with active processing structure designed on the dielectric substrate has been present and evaluated in this paper. The sensor configuration has been optimized by computer-aided design to achieve…
We show that optomechanical pressure sensors with characterized density and thickness can achieve uncertainty as low as 1.1 % via comparison with a secondary pressure standard. The agreement between the secondary standard and our…
We present fabrication of 570-um-thick, millimeter-sized soda-lime-silicate float glass blocks with a 1-um-thick AlN-thin-film piezoelectric transducer sandwiched between thin metallic electrodes and deposited on the top surface. The…
Semiconducting piezoelectric materials have attracted considerable interest due to their central role in the emerging field of piezotronics, where the development of a piezo-potential in response to stress or strain can be used to tune the…
The discovery of superconductivity in the bulk nickelates under high pressure is a major advance in physics. The recent observation of superconductivity at ambient pressure in compressively strained bilayer nickelate thin films has now…