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This paper presents surface acoustic wave (SAW) acoustic delay lines (ADL) for studying propagation loss mechanisms in Lithium Niobate (LN). Devices were fabricated by depositing 50 nm aluminum patterns on 600 nm X-Cut LN on amorphous…

This letter presents a numerical investigation of acoustic modes propagating in an LiNbO$_3$/sapphire substrate under a periodic Al grating, demonstrating the occurrence of longitudinal leaky SAWs (LLSAWs) with a unique combination of very…

Applied Physics · Physics 2020-08-11 Natalya F. Naumenko

Wireless surface acoustic wave (SAW) sensors constitute a promising solution to some unsolved industrial sensing issues taking place at high temperatures. Currently, this technology enables wireless measurements up to 600-700$^\circ$C at…

Lithium niobate (LNO) is a well established material for surface acoustic wave (SAW) devices including resonators, delay lines and filters. Recently, multi-layer substrates based on LNO thin films have become commercially available. Here,…

In this work, we have successfully engineered and examined suspended laterally vibrating resonators (LVRs) on a lithium niobate thin film on lithium niobate carrier wafer (LN-on-LN) platform, powered by aluminum interdigital transducers…

Applied Physics · Physics 2023-07-10 Yiyang Feng , Sen Dai , Sunil A. Bhave

We present the first group of acoustic delay lines (ADLs) at 5 GHz, using the first-order antisymmetric (A1) mode in Z-cut lithium niobate thin films. The demonstrated ADLs significantly surpass the operation frequency of the previous works…

Signal Processing · Electrical Eng. & Systems 2019-11-18 Ruochen Lu , Yansong Yang , Ming-Huang Li , Michael Breen , Songbin Gong

This work proposes a double-layer thin-film lithium niobate (LiNbO3) longitudinally excited shear wave resonator with a theoretical electromechanical coupling coefficient exceeding 60%, RaR close to 28%, and no spurious modes. This…

Applied Physics · Physics 2025-10-14 Zhen-Hui Qin , Shu-Mao Wu , Chen-Bei Hao , Hua-Yang Chen , Sheng-Nan Liang , Si-Yuan Yu , Yan-Feng Chen

This paper reports a suspended thin-film lithium niobate (LN) piezoelectric resonator platform surviving high annealing temperatures of 550 {\deg}C, among the highest temperature at which the thermal resilience of suspended LN resonators is…

Surface acoustic waves (SAWs), with their five orders-of-magnitude slower propagation velocity, allow for considerably shorter wavelengths at the same frequency compared to electromagnetic waves. The short wavelengths allow for device…

Superconducting qubits have arisen as a leading technology platform for quantum computing which is on the verge of revolutionizing the world's calculation capacities. Nonetheless, the fabrication of computationally reliable qubit circuits…

Niobium nitride (NbN) is a useful material for fabricating detectors because of its high critical temperature and relatively high kinetic inductance. In particular, NbN can be used to fabricate nanowire detectors and mm-wave transmission…

Instrumentation and Detectors · Physics 2020-02-03 Calder Sheagren , Peter Barry , Erik Shirokoff , Qing Yang Tang

Surface acoustic wave (SAW) devices based on thin films of ZnO are a well established technology. However, SAW devices on bulk ZnO crystals are not practical at room temperature due to the significant damping caused by finite electrical…

The mid-infrared (MIR) spectral regime is central to applications including remote sensing, precision spectroscopy, higher harmonic generation, and free-space optical communication. However, coherent and broadband MIR modulation remains…

We demonstrate a suspended thin-film aluminum nitride (AlN) microbolometer for narrowband very long-wave infrared detection. The device uses a 100-nm-thick AlN membrane suspended above a Pt back reflector by a 1-um air gap. Resonant…

Segmented, or slow-wave electrodes have emerged as an index-matching solution to improve bandwidth of traveling-wave Mach Zehnder and phase modulators on the thin-film lithium niobate on insulator platform. However, these devices require…

Lithium niobate (LiNbO$_3$, LN) is a nonlinear optical material of high interest for integrated photonics with applications ranging from optical communications to quantum information processing. The performance of on-chip devices based on…

Lithium niobate (LN) is a promising material for future complex photonic-electronic circuits, with wide applications in fields like data communications, sensing, optical computation, and quantum optics. There was a great step toward LN…

In this paper, fundamental shear-horizontal SH0 mode Leaky Surface Acoustic Wave (LSAW) resonators on X-cut lithium niobate leveraging dense and robust electrodes such as gold and tungsten are demonstrated for extreme temperature operation…

In this work, we investigate the frequency scaling of shear-horizontal (S.H.) surface acoustic wave (SAW) resonators based on a lithium niobate on insulator (LNOI) substrate into the centimeter bands for 6G wireless systems. Prototyped…

Signal Processing · Electrical Eng. & Systems 2024-06-28 Tzu-Hsuan Hsu , Joshua Campbell , Jack Kramer , Sinwoo Cho , Zhi-Qiang Lee , Ming-Huang Li , Ruochen Lu

In this work, we demonstrate a high-performance surface acoustic wave (SAW) delay line based on a Scandium alloyed aluminum nitride (AlScN)-on-sapphire platform operating at 5.9 GHz with an exceptionally high acoustic propagation Q-factor.…

Applied Physics · Physics 2025-09-23 Chin-Yu Chang , Xiaolei Tong , Pedram Yousefian , Ella Klein , Xingyu Du , Roy H. Olsson
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