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We have grown superconducting TiN films by atomic layer deposition with thicknesses ranging from 6 to 89 nm. This deposition method allows us to tune the resistivity and critical temperature by controlling the film thickness. The microwave…

3D printing of plastics, ceramics, and metals has existed for several decades and has revolutionized many areas of manufacturing and science. Printing of metals in particular has found a number of applications in fields as diverse as…

Instrumentation and Detectors · Physics 2016-08-03 Daniel L. Creedon , Maxim Goryachev , Nikita Kostylev , Tim Sercombe , Michael E. Tobar

We demonstrate the operation of superconducting coplanar microwave resonators in a very large frequency range up to 50 GHz. The resonators are fabricated from niobium thin films on sapphire substrates and optimized for these high…

Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…

Quantum Physics · Physics 2016-01-18 Paul B. Dieterle , Mahmoud Kalaee , Johannes Fink , Oskar Painter

In the context of engineered quantum systems, there is a demand for superconducting tunable devices able to operate with high Q-factors at power levels equivalent to only a few photons. In this work, we developed a 3D microwave reentrant…

Instrumentation and Detectors · Physics 2017-02-15 N. C. Carvalho , Y. Fan , M. E. Tobar

We present an experimental characterisation of the electrical properties of 3D-printed Niobium. The study was performed by inserting a 3D-printed Nb post inside an Aluminium cylindrical cavity, forming a 3D lumped element re-entrant…

We report on the microwave properties of a resonant cylindrical cavity made of bulk MgB2 superconductor, produced by the reactive liquid Mg infiltration process. The frequency response of the cavity has been measured in the range 5-13GHz.…

Superconductivity · Physics 2008-09-18 A. Agliolo Gallitto , G. Bonsignore , M. Li Vigni , G. Giunchi , Yu. A. Nefyodov

Investigations into the microwave surface impedance of superconducting resonators have led to the development of single photon counters that rely on kinetic inductance for their operation. While concurrent progress in additive…

We show that electroplated Re films in multilayers with noble metals such as Cu, Au, and Pd have an enhanced superconducting critical temperature relative to previous methods of preparing Re. The dc resistance and magnetic susceptibility…

We cooled ultrathin tapered fibers to cryogenic temperatures and controllably coupled them with high-Q microsphere resonators at a wavelength close to the optical transition of diamond nitrogen vacancy centers. The 310-nm-diameter tapered…

We present the design, fabrication and characterization of cubic (3C) silicon carbide microdisk resonators with high quality factor modes at visible and near infrared wavelengths (600 - 950 nm). Whispering gallery modes with quality factors…

We report on the fabrication and characterization of superconducting coplanar waveguide (CPW) resonators based on titanium nitride (TiN) thin films deposited on 200\,mm diameter high-resistivity Si(100) substrates. We systematically…

We report the successful manufacture and characterization of a microwave resonant cylindrical cavity made of bulk MgB2 superconductor (Tc = 38.5 K), which has been produced by the Reactive Liquid Mg Infiltration technique. The quality…

Superconductivity · Physics 2007-05-23 G. Giunchi , A. Agliolo Gallitto , G. Bonsignore , M. Bonura , M. Li Vigni

We designed and successfully fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a Niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is…

Mesoscale and Nanoscale Physics · Physics 2013-10-08 Haijie Li , Yiwen Wang , Lianfu Wei , Pinjia Zhou , Qiang Wei , Chunhai Cao , Yurong Fang , Yang Yu , Peiheng Wu

Superconducting thin-film metamaterial resonators can provide a dense microwave mode spectrum with potential applications in quantum information science. We report on the fabrication and low-temperature measurement of metamaterial…

Superconductivity · Physics 2015-05-06 B. L. T. Plourde , Haozhi Wang , Francisco Rouxinol , M. D. LaHaye

We report on highly tunable radio frequency (rf) characteristics of a low-loss and compact three dimensional (3D) metamaterial made of superconducting thin film spiral resonators. The rf transmission spectrum of a single element of the…

Superconductivity · Physics 2015-06-01 C. Kurter , T. Lan , L. Sarytchev , Steven M. Anlage

Metal mixed polymers are a cheap and effective way to produce flexible metals and superconductors. As part of an on-going effort to learn how to tune the properties of these systems with ion implantation, we present a study of the…

Materials Science · Physics 2009-06-15 Andrew P. Stephenson , Ujjual Divakar , Adam P. Micolich , Paul Meredith , Ben J. Powell

Superconducting microwave cavities have found applications in many areas including quantum computing, particle accelerators, and dark matter searches. Their extremely high quality factors translate to very narrow bandwidth, which makes them…

Superconductivity · Physics 2025-05-01 J. C. Esmenda , E. A. Laird , I. Bailey , N. Du , S. Durham , G. Carosi , T. Gamble , P. Smith , E. Daw , Y. A. Pashkin

Superconducting thin films with high intrinsic kinetic inductance $L_{k}$ are important for high-sensitivity detectors, enabling strong coupling in hybrid quantum systems, and enhancing nonlinearities in quantum devices. We report the…

A wide variety of applications of microwave cavities, such as measurement and control of superconducting qubits, magnonic resonators, and phase noise filters, would be well served by having a highly tunable microwave resonance. Often this…

Instrumentation and Detectors · Physics 2020-07-07 T. J. Clark , V. Vadakkumbatt , F. Souris , H. Ramp , J. P Davis
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