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The chips contained in any electronic device are manufactured over circular silicon wafers, which are monitored by inspection machines at different production stages. Inspection machines detect and locate any defect within the wafer and…

Computer Vision and Pattern Recognition · Computer Science 2022-08-31 Luca Frittoli , Diego Carrera , Beatrice Rossi , Pasqualina Fragneto , Giacomo Boracchi

Due to potential pitch reduction, the semiconductor industry is adopting High-NA EUVL technology. However, its low depth of focus presents challenges for High Volume Manufacturing. To address this, suppliers are exploring thinner…

Computer Vision and Pattern Recognition · Computer Science 2024-04-10 Ying-Lin Chen , Jacob Deforce , Vic De Ridder , Bappaditya Dey , Victor Blanco , Sandip Halder , Philippe Leray

As the integration density and design intricacy of semiconductor wafers increase, the magnitude and complexity of defects in them are also on the rise. Since the manual inspection of wafer defects is costly, an automated artificial…

Computer Vision and Pattern Recognition · Computer Science 2022-07-05 Subhrajit Nag , Dhruv Makwana , Sai Chandra Teja R , Sparsh Mittal , C Krishna Mohan

The development of X-Ray microscopy (XRM) technology has enabled non-destructive inspection of semiconductor structures for defect identification. Deep learning is widely used as the state-of-the-art approach to perform visual analysis…

Computer Vision and Pattern Recognition · Computer Science 2025-07-24 Lile Cai , Ramanpreet Singh Pahwa , Xun Xu , Jie Wang , Richard Chang , Lining Zhang , Chuan-Sheng Foo

The quality control of printed circuit boards (PCBs) is paramount in advancing electronic device technology. While numerous machine learning methodologies have been utilized to augment defect detection efficiency and accuracy, previous…

Machine Learning · Computer Science 2024-09-17 Ka Nam Canaan Law , Mingshuo Yu , Lianglei Zhang , Yiyi Zhang , Peng Xu , Jerry Gao , Jun Liu

Scanning Electron Microscopy (SEM) is a widely used tool for nanoparticle characterization, but long-term directional drift can compromise image quality. We present a novel algorithm for post-imaging drift correction in SEM nanoparticle…

Electron microscopy is widely used to explore defects in crystal structures, but human detecting of defects is often time-consuming, error-prone, and unreliable, and is not scalable to large numbers of images or real-time analysis. In this…

Automated visual inspection in medical-device manufacturing faces unique challenges, including extremely low defect rates, limited annotated data, hardware restrictions on production lines, and the need for validated, explainable…

Computer Vision and Pattern Recognition · Computer Science 2025-11-14 Julio Zanon Diaz , Georgios Siogkas , Peter Corcoran

In the realm of industrial quality inspection, defect detection stands as a critical component, particularly in high-precision, safety-critical sectors such as automotive components aerospace, and medical devices. Traditional methods,…

Computer Vision and Pattern Recognition · Computer Science 2025-07-09 Shuai Li , Shihan Chen , Wanru Geng , Zhaohua Xu , Xiaolu Liu , Can Dong , Zhen Tian , Changlin Chen

Scanning transmission electron microscopy (STEM) is a powerful tool to reveal the morphologies and structures of materials, thereby attracting intensive interests from the scientific and industrial communities. The outstanding spatial…

Image and Video Processing · Electrical Eng. & Systems 2024-09-26 Hanlei Zhang , Jincheng Bai , Xiabo Chen , Can Li , Chuanjian Zhong , Jiye Fang , Guangwen Zhou

In the Reverse Engineering and Hardware Assurance domain, a majority of the data acquisition is done through electron microscopy techniques such as Scanning Electron Microscopy (SEM). However, unlike its counterparts in optical imaging,…

Image and Video Processing · Electrical Eng. & Systems 2020-04-30 Ronald Wilson , Navid Asadizanjani , Domenic Forte , Damon L. Woodard

The nature of the atomic defects on the hydrogen passivated Si (100) surface is analyzed using deep learning and scanning tunneling microscopy (STM). A robust deep learning framework capable of identifying atomic species, defects, in the…

Materials Science · Physics 2020-02-19 Maxim Ziatdinov , Udi Fuchs , James H. G. Owen , John N. Randall , Sergei V. Kalinin

Nanoparticle superlattices consisting of ordered arrangements of nanoparticles exhibit unique optical, magnetic, and electronic properties arising from nanoparticle characteristics as well as their collective behaviors. Understanding how…

Materials Science · Physics 2025-01-09 Aanish Paruchuri , Carl Thrasher , A. J. Hart , Robert Macfarlane , Arthi Jayaraman

In industrial settings, surface defects on steel can significantly compromise its service life and elevate potential safety risks. Traditional defect detection methods predominantly rely on manual inspection, which suffers from low…

Machine Learning · Computer Science 2025-04-25 Cheng Shen , Yuewei Liu

Scanning transmission electron microscopy (STEM) is an indispensable tool for atomic-resolution structural analysis for a wide range of materials. The conventional analysis of STEM images is an extensive hands-on process, which limits…

In this study, we present a computational framework tailored for the precise detection and comprehensive analysis of nanoparticles within scanning electron microscopy (SEM) images. The primary objective of this framework revolves around the…

Image and Video Processing · Electrical Eng. & Systems 2023-08-21 Aidan S. Wright , Nathaniel P. Youmans , Enrique F. Valderrama Araya

Electroluminescence (EL) imaging is a useful modality for the inspection of photovoltaic (PV) modules. EL images provide high spatial resolution, which makes it possible to detect even finest defects on the surface of PV modules. However,…

Computer Vision and Pattern Recognition · Computer Science 2019-08-15 Sergiu Deitsch , Vincent Christlein , Stephan Berger , Claudia Buerhop-Lutz , Andreas Maier , Florian Gallwitz , Christian Riess

A method of the mid-IR-laser microscopy has been proposed for the investigation of the large-scale electrically and recombination active defects in semiconductors and non-destructive inspection of semiconductor materials and structures in…

Materials Science · Physics 2011-05-17 V. P. Kalinushkin , V. A. Yuryev , O. V. Astafiev

Single-beam scanning electron microscopes (SEM) are widely used to acquire massive data sets for biomedical study, material analysis, and fabrication inspection. Datasets are typically acquired with uniform acquisition: applying the…

Image and Video Processing · Electrical Eng. & Systems 2021-01-11 Lu Mi , Hao Wang , Yaron Meirovitch , Richard Schalek , Srinivas C. Turaga , Jeff W. Lichtman , Aravinthan D. T. Samuel , Nir Shavit

Defect detection plays a crucial role in infrared non-destructive testing systems, offering non-contact, safe, and efficient inspection capabilities. However, challenges such as low resolution, high noise, and uneven heating in infrared…

Computer Vision and Pattern Recognition · Computer Science 2023-11-20 Bozhen Hu , Bin Gao , Cheng Tan , Tongle Wu , Stan Z. Li