Related papers: EUV Debris Mitigation using Magnetic Nulls
The dissociative photoionization of \textit{tert}-butyl methyl methacrylate, a monomer unit found in many ESCAP resists, was investigated in a gas phase photoelectron photoion coincidence experiment employing extreme ultraviolet (EUV)…
Mo-Si multilayer mirrors are central to extreme ultraviolet lithography, where nanoscale optical interference and heat accumulation together constrain reflectivity and operational stability. Here we develop an analytical…
Ptychographic extreme ultraviolet (EUV) diffractive imaging has emerged as a promising candidate for the next-generation metrology solutions in the semiconductor industry, as it can image wafer samples in reflection geometry at the…
Photoevaporation driven by hydrogen-ionizing radiation, also known as extreme-ultraviolet (EUV), profoundly shapes the lives of diverse astrophysical objects. Focusing here mainly on the dispersal of protoplanetary disks, we construct an…
Extreme ultraviolet (EUV) lithography has revolutionized high-volume manufacturing of nanoscale components, enabling the production of smaller, denser, and more energy efficient integrated circuit devices. Yet, the use of EUV light results…
We experimentally re-evaluate the fine structure of Sn$^{11+...14+}$ ions. These ions are essential in bright extreme-ultraviolet (EUV) plasma-light sources for next-generation nanolithography, but their complex electronic structure is an…
A new magnetic mirror-cusp concept is described - the Novatron - with the potential to confine compact and stable fusion plasmas. Traditionally, the major challenges for open field line designs include MHD interchange modes, drift cyclotron…
We measured for the first time the electron density in an Extreme Ultra-Violet induced plasma. This is achieved in a low-pressure argon plasma by using a method called microwave cavity resonance spectroscopy. The measured electron density…
We demonstrate a simple, lossless method for monitoring photon flux in short-wavelength metrology systems, with a particular focus on applications using high harmonic generation (HHG) light sources. In HHG-based metrology, where photon…
We present the results of spectroscopic measurements in the extreme ultraviolet (EUV) regime (7-17 nm) of molten tin microdroplets illuminated by a high-intensity 3-J, 60-ns Nd:YAG laser pulse. The strong 13.5 nm emission from this…
The electron beam ion trap (EBIT) at the National Institute of Standards and Technology was used to produce highly-charged ions of hafnium, tantalum and gold with an open 3d shell. The extreme-ultraviolet (EUV) spectra from these ions were…
The emission properties of tin plasmas, produced by the irradiation of preformed liquid tin targets by several-ns-long 2-$\mu$m-wavelength laser pulses, are studied in the extreme ultraviolet (EUV) regime. In a two-pulse scheme, a pre-pulse…
The production of energetic (multi-GeV) heavy ion beams by acceleration of ultra-thin foils through the application of radiation pressure to a self-generated, imperfect plasma mirror (photon absorption probability {\eta} finite) is studied.…
A neutron optical transport system is proposed which comprises nested short elliptical mirrors located halfway between two common focal points M and M'. It images cold neutrons from a diverging beam or a source with finite size at M by…
Extreme ultraviolet (EUV) coherent sources below 120nm are of paramount significance for promoting next-generation nano-scale lithography,precision spectroscopy, and exploring the emerging physical phenomena in quantum materials. Nonlinear…
The amount of high-energy stellar radiation reaching the surface of protoplanetary disks is essential to determine their chemistry and physical evolution. Here, we use millimetric and centimetric radio data to constrain the EUV luminosity…
We present a detailed study of the electric and magnetic fields, which are created on plasma vacuum interfaces as a result of highly intense laser-matter-interactions. For the field generation ultra-thin polymer foils were irradiated with…
Image saturation has been an issue for several instruments in solar astronomy, mainly at EUV wavelengths. However, with the launch of the Atmospheric Imaging Assembly (AIA) as part of the payload of the Solar Dynamic Observatory (SDO) image…
In laser-produced plasma (LPP) extreme ultraviolet (EUV) sources, deformation of a tin droplet into an optimal target shape is governed by its interaction with a pre-pulse laser-generated plasma. This interaction is mediated by a transient…
Why the tenuous solar outer atmosphere, or corona, is much hotter than the underlying layers remains one of the greatest challenge for solar modeling. Detailed diagnostics of the coronal thermal structure come from extreme ultraviolet (EUV)…