Related papers: Improved Coherence in Optically-Defined Niobium Tr…
We present a method for fabricating Josephson junctions and superconducting quantum interference devices (SQUIDs) which is based on the local anodization of niobium strip lines 3 to 6.5 nm-thick under the voltage-biased tip of an Atomic…
To increase integration scale of superconductor electronics, we are developing a new, SFQ7ee, node of the fabrication process at MIT Lincoln Laboratory. In comparison to the existing SFQ5ee node, we increased the number of fully planarized…
Aluminum-based Josephson junctions are currently the main sources of nonlinearity for control and manipulation of superconducting qubits. A phase-slip junction, the dual of a Josephson junction, provides an alternative source of…
We present the results of an industry-grade fabrication of superconducting qubits on 200 mm wafers utilizing CMOS-established processing methods. By automated waferprober resistance measurements at room temperature, we demonstrate a…
We have successfully fabricated micron-scale Cu-AlO$_{x} $-Al-NbN normal metal-insulator-superconductor (NIS) tunnel junction devices, using pulsed laser deposition (PLD) for NbN film growth, and electron-beam lithography and shadow…
We have developed a combined photolithography and electron-beam lithography fabrication process for sub-\mum to \mum-size Nb/Al-AlOx/Nb Josephson junctions. In order to define the junction size and protect its top electrode during anodic…
Nonlinear microwave circuits are key elements for many groundbreaking research directions and technologies, such as quantum computation and quantum sensing. The majority of microwave circuits with Josephson nonlinearities to date is based…
The Josephson junction is the fundamental nonlinear building block of superconducting quantum technologies. Its macroscopic quantum tunneling physics underpins superconducting quantum computing, sensing, and communication, but scaling these…
Josephson tunnel junctions are the centerpiece of almost any superconducting electronic circuit, including qubits. Typically, the junctions for qubits are fabricated using shadow evaporation techniques to reduce dielectric loss…
Superconducting qubits are solid state electrical circuits fabricated using techniques borrowed from conventional integrated circuits. They are based on the Josephson tunnel junction, the only non-dissipative, strongly non-linear circuit…
The use of tantalum films for superconducting qubits has recently extended qubit coherence times significantly, primarily due to reduced dielectric losses at the metal-air interface. However, the choice of base material also influences the…
We study decoherence in superconducting qubits due to quasiparticle tunneling which is enhanced by two known deviations from the equilibrium BCS theory. The first process corresponds to tunneling of an already existing quasiparticle across…
Josephson junctions form the essential non-linearity for almost all superconducting qubits. The junction is formed when two superconducting electrodes come within $\sim$1 nm of each other. Although the capacitance of these electrodes is a…
Niobium is one of the most studied superconductors, both theoretically and experimentally. It is tremendously important for applications, and it has the highest superconducting transition temperature, $T_{c}=9.33$ K, of all pure metals. In…
Niobium thin films on silicon substrate used in the fabrication of superconducting qubits have been characterized using scanning and transmission electron microscopy, electrical transport, magnetization, quasiparticle spectroscopy, and…
We report superconducting fluxonium qubits with coherence times largely limited by energy relaxation and reproducibly satisfying T2 > 100 microseconds (T2 > 300 microseconds in one device). Moreover, given the state of the art values of the…
Despite mounting evidence that materials imperfections are a major obstacle to practical applications of superconducting qubits, connections between microscopic material properties and qubit coherence are poorly understood. Here, we perform…
We present ferromagnetic Nb/Al2O3/Ni60Cu40/Nb Josephson junctions (SIFS) with an ultrathin Al2O3 tunnel barrier. The junction fabrication was optimized regarding junction insulation and homogeneity of current transport. Using…
Ferromagnetic Josephson junctions exhibit fascinating physics and the potential for applications in superconducting logic and memory. The junctions in a demonstrated superconducting memory prototype contain a magnetic spin-valve structure…
We report on the development of highly sensitive SQUIDs featuring sub-micrometer loop dimensions. The integration of high quality and low capacitance SIS Nb/AlOx/Nb cross-type Josephson tunnel junctions results in white flux noise levels as…