Related papers: Particle charging during pulsed EUV exposures with…
The transient population dynamics of charged (postive or negative) and neutral nanoparticles have been investigated in a pulsed Extreme Ultra-Violet (EUV) exposure environment with 3DPIC simulations. At the initial stage of the simulation,…
In the past years, EUV lithography scanner systems have entered High-Volume Manufacturing for state-of-the-art Integrated Circuits (IC), with critical dimensions down to 10 nm. This technology uses 13.5 nm EUV radiation, which is…
Coagulation growth kinetics of nanoparticles in plasma is affected by inter-particle electrostatic forces due to charging phenomenon. In stationary plasmas, unipolar charging of particles results in retardation of particles growth and may…
Extreme ultraviolet (EUV) induced pulsed plasma is unique due to its transient characteristics: the plasma switches between non-thermal state (when EUV power is ON at the beginning of the pulse) and thermal state (end of the pulse at ~ 20…
We investigate electron and ion surface states of a negatively charged dust particle in a gas discharge and identify the charge of the particle with the electron surface density bound in the polarization-induced short-range part of the…
The characteristics of atmospheric-pressure microdischarges excited by nanosecond high-voltage pulses are investigated in helium-nitrogen mixtures, as a function of the parameters of the excitation voltage pulses. In particular, cases of…
The new generation of lithography tools use high energy EUV radiation which ionizes the present background gas due to photoionization. To predict and understand the long term impact on the highly delicate mirrors It is essential to…
We consider the thermodynamic effects of an electrically charged impurity immersed in a two-dimensional two-component plasma, composed by particles with charges $\pm e$, at temperature $T$, at coupling $\Gamma=e^2/(k_B T)=2$, confined in a…
An influence of a high-voltage (3-17 kV) 20 ns pulse on a weakly-ionized low-pressure (0.1-10 Pa) capacitively-coupled radiofrequency (RF) argon plasma is studied experimentally. The plasma evolution after pulse exhibits two characteristic…
We measured for the first time the electron density in an Extreme Ultra-Violet induced plasma. This is achieved in a low-pressure argon plasma by using a method called microwave cavity resonance spectroscopy. The measured electron density…
We develop a projection imaging technique to study ultracold plasma dynamics. We image the charged particle spatial distributions by extraction with a high-voltage pulse onto a position-sensitive detector. Measuring the 2D width of the ion…
This study explores nanoparticle-assisted electron injection as a method for controlling beam charge in laser wakefield acceleration through particle-in-cell simulations. We systematically investigate how the material (Li through Au) and…
Nanoparticle formation by femtosecond laser ablation is investigated for different experimental conditions. Dynamics of the laser plume expansion is visualized based on numerical simulations and the possibility of primary nanoparticle…
An analytical study of the charged particle dynamics in the presence of an elliptically polarized electromagnetic wave and a uniform axial magnetic field, is presented. It is found that for $g\omega_{0}/ \omega' = \pm 1$, maximum energy…
Within the RoadMap project we investigated the microphysical aspects of particle collisions during saltation on the Martian surface in laboratory experiments. Following the size distribution of ejected particles, their aerodynamic…
Most theoretical investigations of dust charging processes in space have treated the current balance condition as independent of grain size. However, for small grains, as they are often observed in space environments, a dependence on grain…
The charge and potential distributions for insulating particles approaching a substrate with regular insulating structures are studied by particle-in-cell numerical simulations. An elongated particle and substrate with elongated structures…
Determining nanoparticle charge is more challenging than that for microparticles due to growth-induced size changes, substantial plasma property variations, and difficulties in visualizing individual particles, rendering conventional…
With an eye on dust particles immersed into an ionized gas, we study the effect of a negative charge on the scattering of light by a dielectric particle with a strong transverse optical phonon resonance in the dielectric constant. Surplus…
Dependencies of levitation position of positively charged fine-particles on plasma parameters are investigated. The charges on the particles become positive in a cross-field sheath between magnetized double plasmas with different potentials…