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In spectroscopic ellipsometry, the optical properties of materials are obtained indirectly by generally assuming dielectric function and optical models. This ellipsometry analysis, which typically requires numerous model parameters, has…

Advanced microscopy and/or spectroscopy tools play indispensable role in nanoscience and nanotechnology research, as it provides rich information about the growth mechanism, chemical compositions, crystallography, and other important…

Spectroscopic ellipsometry is a potent method that is widely adopted for the measurement of thin film thickness and refractive index. However, a conventional ellipsometer, which utilizes a mechanically rotating polarizer and grating-based…

Optics · Physics 2023-07-14 Shun Wen , Xinyuan Xue , Liqun Sun , Yuanmu Yang

We demonstrate that a deep neural network can significantly improve optical microscopy, enhancing its spatial resolution over a large field-of-view and depth-of-field. After its training, the only input to this network is an image acquired…

Machine Learning · Computer Science 2017-11-21 Yair Rivenson , Zoltan Gorocs , Harun Gunaydin , Yibo Zhang , Hongda Wang , Aydogan Ozcan

Determining the dimensions of nanostructures is critical to ensuring the maximum performance of many geometry-sensitive nanoscale functional devices. However, accurate metrology at the nanoscale is difficult using optics-based methods due…

Applied Physics · Physics 2019-08-21 Jinlong Zhu , Yanan Liu , Sanyogita Purandare , Jian-Ming Jin , Shiyuan Liu , Lynford L. Goddard

Optical materials with special optical properties are widely used in a broad span of technologies, from computer displays to solar energy utilization leading to large dataset accumulated from years of extensive materials synthesis and…

Materials Science · Physics 2020-11-26 Rongzhi Dong , Yabo Dan , Xiang Li , Jianjun Hu

Spectroscopic ellipsometry is a powerful method with high surface sensitivity that can be used to monitor the growth of even sub-monolayer film. However, the analysis of ultrathin films is complicated by the correlation of the dielectric…

Deep-learning algorithms enable precise image recognition based on high-dimensional hierarchical image features. Here, we report the development and implementation of a deep-learning-based image segmentation algorithm in an autonomous…

Image and Video Processing · Electrical Eng. & Systems 2020-03-26 Satoru Masubuchi , Eisuke Watanabe , Yuta Seo , Shota Okazaki , Takao Sasagawa , Kenji Watanabe , Takashi Taniguchi , Tomoki Machida

Inverse ellipsometry, i.e., reconstructing optical constants and film thickness from the measured phase difference $\Delta$ and amplitude ratio $\Psi$, is a fundamentally ill-posed problem. Traditional solutions rely on slow, expert-driven…

Machine Learning · Computer Science 2026-03-20 Yiming Ma , Jianzhi Teng , Xinjie Li , Xin Sun , Zhiyong Wang , Yuzhou Song , Lionel Z. Wang , Bin Chen

Light scattering and aberrations limit optical microscopy in biological tissue, which motivates the development of adaptive optics techniques. Here, we develop a method for adaptive optics with reflected light and deep neural networks…

Optics · Physics 2020-07-28 Ivan Vishniakou , Johannes D. Seelig

We report an interpretation method for deep learning models that allows us to handle high-dimensional spectral data in materials science. The proposed method uses feature extraction and clustering analysis to categorize materials into…

Materials Science · Physics 2025-10-21 Akira Takahashi , Yu Kumagai , Arata Takamatsu , Fumiyasu Oba

Pupil reflex to variations in illumination and associated dynamics are of importance in neurology and ophthalmology. This is typically measured using a near Infrared (IR) pupillometer to avoid Purkinje reflections that appear when strong…

Image and Video Processing · Electrical Eng. & Systems 2023-08-21 Abhijeet Phatak , Aditya Chandra Mandal , Janarthanam Jothi Balaji , Vasudevan Lakshminarayanan

Deep optical optimization has recently emerged as a new paradigm for designing computational imaging systems using only the output image as the objective. However, it has been limited to either simple optical systems consisting of a single…

Computer Vision and Pattern Recognition · Computer Science 2024-08-08 Xinge Yang , Qiang Fu , Wolfgang Heidrich

We present the use of a commercially available fixed-angle multi-wavelength ellipsometer for quickly measuring the thickness of NbN thin films for the fabrication and performance improvement of superconducting nanowire single photon…

Applied Physics · Physics 2019-04-24 Owen Medeiros , Marco Colangelo , Ilya Charaev , Karl K Berggren

Optical approaches have made great strides towards the goal of high-speed, energy-efficient computing necessary for modern deep learning and AI applications. Read-in and read-out of data, however, limit the overall performance of existing…

Emerging Technologies · Computer Science 2024-02-06 Alexander Song , Sai Nikhilesh Murty Kottapalli , Rahul Goyal , Bernhard Schölkopf , Peer Fischer

We discuss recently emerging applications of the state-of-art deep learning methods on optical microscopy and microscopic image reconstruction, which enable new transformations among different modes and modalities of microscopic imaging,…

Machine Learning · Computer Science 2018-07-23 Yair Rivenson , Aydogan Ozcan

Convolutional neural network (CNN) based architectures, such as Mask R-CNN, constitute the state of the art in object detection and segmentation. Recently, these methods have been extended for model-based segmentation where the network…

Computer Vision and Pattern Recognition · Computer Science 2021-01-14 Wenbo Dong , Volkan Isler

As deep learning applications continue to deploy increasingly large artificial neural networks, the associated high energy demands are creating a need for alternative neuromorphic approaches. Optics and photonics are particularly compelling…

Optics · Physics 2025-08-19 Nicola Dal Cin , Florian Marquardt , Clara C. Wanjura

Our visual perception of our surroundings is ultimately limited by the diffraction limit, which stipulates that optical information smaller than roughly half the illumination wavelength is not retrievable. Over the past decades, many…

Artificial nanostructures with ultrafine and deep-subwavelength feature sizes have emerged as a paradigm-shifting platform to advanced light field management, becoming a key building block for high-performance integrated optoelectronics and…

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