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Mask-based pattern generation is a crucial step in microchip production. The next-generation extreme-ultraviolet- (EUV) lithography instruments with a wavelength of \SI{13.5}{\nano\meter} is currently under development. In principle, this…

Applied Physics · Physics 2019-02-13 Torstein Nesse , Ingve Simonsen , Bodil Holst

Three-dimensional segmentation in magnetic resonance images (MRI), which reflects the true shape of the objects, is challenging since high-resolution isotropic MRIs are rare and typical MRIs are anisotropic, with the out-of-plane dimension…

Image and Video Processing · Electrical Eng. & Systems 2023-03-15 Hanxue Gu , Hongyu He , Roy Colglazier , Jordan Axelrod , Robert French , Maciej A Mazurowski

The classical method of determining the atomic structure of complex molecules by analyzing diffraction patterns is currently undergoing drastic developments. Modern techniques for producing extremely bright and coherent X-ray lasers allow a…

Biomolecules · Quantitative Biology 2015-10-12 Tomas Ekeberg , Stefan Engblom , Jing Liu

Data-driven machine learning methods have the potential to dramatically accelerate the rate of materials design over conventional human-guided approaches. These methods would help identify or, in the case of generative models, even create…

Materials Science · Physics 2022-07-28 Victor Fung , Shuyi Jia , Jiaxin Zhang , Sirui Bi , Junqi Yin , P. Ganesh

The synthesis of a metasurface exhibiting a specific set of desired scattering properties is a time-consuming and resource-demanding process, which conventionally relies on many cycles of full-wave simulations. It requires an experienced…

Signal Processing · Electrical Eng. & Systems 2021-09-15 Parinaz Naseri , Sean V. Hum

In classical binary holography, a target pattern located at infinity is generated by the diffraction of a plane wave passing through a binary mask with holes of the same size, placed at specific positions of a rectangular grid. Fresnel…

Optics · Physics 2022-10-17 Veronica P. Simonsen , Bodil Holst , Ingve Simonsen

Metasurfaces have shown promising potentials in shaping optical wavefronts while remaining compact compared to bulky geometric optics devices. Design of meta-atoms, the fundamental building blocks of metasurfaces, relies on trial-and-error…

The research of metamaterials has achieved enormous success in the manipulation of light in an artificially prescribed manner using delicately designed sub-wavelength structures, so-called meta-atoms. Even though modern numerical methods…

Optics · Physics 2019-01-31 Wei Ma , Feng Cheng , Yihao Xu , Qinlong Wen , Yongmin Liu

While deep learning-based image reconstruction methods have shown significant success in removing objects from pictures, they have yet to achieve acceptable results for attributing consistency to gender, ethnicity, expression, and other…

Computer Vision and Pattern Recognition · Computer Science 2022-04-04 Gourango Modak , Shuvra Smaran Das , Md. Ajharul Islam Miraj , Md. Kishor Morol

Ultrafast diffraction imaging is a powerful tool to retrieve the geometric structure of gas-phase molecules with combined picometre spatial and attosecond temporal resolution. However, structural retrieval becomes progressively difficult…

Chemical Physics · Physics 2021-10-13 Xinyao Liu , Kasra Amini , Aurelien Sanchez , Blanca Belsa , Tobias Steinle , Jens Biegert

Inverse lithography (ILT) is critical for modern semiconductor manufacturing but suffers from highly non-convex objectives that often trap optimization in poor local minima. Generative AI has been explored to warm-start ILT, yet most…

Machine Learning · Computer Science 2026-02-24 Haoyu Yang , Haoxing Ren

Training of semantic segmentation models for material analysis requires micrographs and their corresponding masks. It is quite unlikely that perfect masks will be drawn, especially at the edges of objects, and sometimes the amount of data…

Computer Vision and Pattern Recognition · Computer Science 2024-08-02 Matias Oscar Volman Stern , Dominic Hohs , Andreas Jansche , Timo Bernthaler , Gerhard Schneider

Metasurfaces have become a promising means for manipulating optical wavefronts in flat and high-performance optical devices. Conventional metasurface device design relies on trial-and-error methods to obtain target electromagnetic (EM)…

We present a new analysis method for atomic resolution four-dimensional scanning transmission electron microscopy (4D-STEM, in which a diffraction pattern is collected at each point of a raster scan of a focused electron beam across the…

Instrumentation and Detectors · Physics 2025-08-11 Yining Xie , Eoin Moynihan , Marin Alexe , Louis Piper , Ana Sanchez , Richard Beanland

As feature sizes shrink to the nanometer scale, accurately transferring circuit patterns from photomasks to silicon wafers becomes increasingly challenging. Optical proximity correction (OPC) is widely used to ensure pattern fidelity and…

Computer Vision and Pattern Recognition · Computer Science 2026-05-14 Yuting Hu , Lei Zhuang , Chen Wang , Ruiyang Qin , Hua Xiang , Gi-joon Nam , Jinjun Xiong

Compared to the conventional metasurface design, machine learning-based methods have recently created an inspiring platform for an inverse realization of the metasurfaces. Here, we have used the Deep Neural Network (DNN) for the generation…

Machine Learning · Computer Science 2021-11-10 Fardin Ghorbani , Javad Shabanpour , Sina Beyraghi , Hossein Soleimani , Homayoon Oraizi , Mohammad Soleimani

With a two-dimensional (2D) optical mask, nanoscale patterns are created for the first time in an atom lithography process using metastable helium atoms. The internal energy of the atoms is used to locally damage a hydrofobic resist layer,…

Atomic Physics · Physics 2007-05-23 S. J. H. Petra , K. A. H. van Leeuwen , L. Feenstra , W. Hogervorst , W. Vassen

In recent years, image blending has gained popularity for its ability to create visually stunning content. However, the current image blending algorithms mainly have the following problems: manually creating image blending masks requires a…

Computer Vision and Pattern Recognition · Computer Science 2023-11-30 Haochen Xue , Mingyu Jin , Chong Zhang , Yuxuan Huang , Qian Weng , Xiaobo Jin

The performance of pre-trained masked diffusion models is often constrained by their sampling procedure, which makes decisions irreversible and struggles in low-step generation regimes. We introduce a novel sampling algorithm that works…

Metasurfaces is an emerging field that enables the manipulation of light by an ultra-thin structure composed of sub-wavelength antennae and fulfills an important requirement for miniaturized optical elements. Finding a new design for a…

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