Related papers: Compact superconducting microwave resonators based…

Vacuum-gap capacitors have recently attracted significant interest in superconducting circuit platforms due to their compact design and exceptionally low dielectric losses in the microwave regime. Their intrinsic ability to support…

Atomic layer deposition (ALD), a layer-by-layer controlled method to synthesize ultrathin materials, provides various merits over other techniques such as precise thickness control, large area scalability and excellent conformality. Here we…

Micro-channels of nanosized columnar tracks were planted by heavy-ion irradiation into superconducting microwave microstrip resonators that were patterned from YBa2Cu3O7-x thin films on LaAlO3 substrates. Three different ion fluences were…

Superconducting coplanar waveguide resonators are essential components in quantum processors, where their internal quality factor (Qi) constrains qubit coherence and readout fidelity. In niobium devices, microwave losses at millikelvin…

We describe the design and fabrication of a scalable atom-light photonic interface based on a silicon nitride microring resonator on a transparent silicon dioxide-nitride multi-layer membrane. This new photonic platform is fully compatible…

We present a flip-chip architecture for an array of coupled superconducting qubits, in which circuit components reside inside individual microwave enclosures. In contrast to other flip-chip approaches, the qubit chips in our architecture…

We have grown superconducting TiN films by atomic layer deposition with thicknesses ranging from 6 to 89 nm. This deposition method allows us to tune the resistivity and critical temperature by controlling the film thickness. The microwave…

Granular aluminum is a promising material for high kinetic inductance devices such as qubit circuits. It has the advantage over atomically disordered materials such as NbN_x, to maintain a high kinetic inductance concomitantly with a high…

We present a systematic analysis of the internal losses of superconducting coplanar waveguide microwave resonators based on niobium thin films on silicon substrates. In particular, we investigate losses introduced by Nb/Al interfaces in the…

Microwave resonators with high quality factors have enabled many recent breakthroughs with superconducting qubits and photon detectors, typically operated in shielded environments to reduce the ambient magnetic field. Insufficient shielding…

We report on the design, fabrication and characterization of superconducting coplanar waveguide resonators with nanoscopic constrictions. By reducing the size of the center line down to 50 nm, the radio frequency currents are concentrated…

Using a shared microwave resonator, we propose a transduction scheme between superconducting qubits and qubit states encoded in the low-lying internal levels of trapped atomic systems. The approach employs atomic Rydberg levels together…

We present the driven response at T=30mK of 6 GHz superconducting resonators constructed from capacitively-shunted three dimensional (3D) aluminum nanobridge superconducting quantum interference devices (nanoSQUIDs). We observe flux…

We have reproducibly grown near-single-domain superconducting aluminum (Al) films on GaAs(111)A wafers using molecular beam epitaxy. Synchrotron X-ray diffraction revealed twin-domain ratios of 0.00005 and 0.0003 for 19.4-nm- and…

Tight confinement of light in photonic cavities provides an efficient template for the realization of high optical intensity with strong field gradients. Here we present such a nanoscale resonator device based on a one-dimensional photonic…

We report on the fabrication and metrology of superconducting caps for qubit circuits. As part of a 3D quantum integrated circuit architecture, a cap chip forms the upper half of an enclosure that provides isolation, increases vacuum…

In superconducting quantum processors, the predictability of device parameters is of increasing importance as many labs scale up their systems to larger sizes in a 3D-integrated architecture. In particular, the properties of superconducting…

Superconducting circuit quantum electrodynamics experiments with propagating microwaves require devices acting as beam splitters. Using niobium thin films on silicon and sapphire substrates, we fabricated superconducting 180{\deg}…

Microwave circuit electrodynamics of disordered superconductors is a very active research topic spawning a wide range of experiments and applications. For compact superconducting circuit elements, the transition to an insulating state poses…

We have designed, fabricated and measured high-Q $\lambda/2$ coplanar waveguide microwave resonators whose resonance frequency is made tunable with magnetic field by inserting a DC-SQUID array (including 1 or 7 SQUIDs) inside. Their…