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Germanium and silicon-germanium alloys have found entry into Si technology thanks to their compatibility with Si processing and their ability to tailor electronic properties by strain and band-gap engineering. Germanium's potential to…
Semiconductor manufacturing is on the cusp of a revolution: the Internet of Things (IoT). With IoT we can connect all the equipment and feed information back to the factory so that quality issues can be detected. In this situation, more and…
In computer chip manufacturing, the study of etch patterns on silicon wafers, or metrology, occurs on the nano-scale and is therefore subject to large variation from small, yet significant, perturbations in the manufacturing environment. An…
We propose a new modeling approach for scatter estimation and descattering in polyenergetic X-ray computed tomography (CT) based on fitting models to local neighborhoods of a training set. X-ray CT is widely used in medical and industrial…
We propose a novel method for the efficient and accurate iterative solution of frequency domain integral equations (IEs) that are used for large/multi-scale electromagnetic scattering problems. The proposed method uses a novel…
A digital etching method was proposed to achieve excellent control of etching depth. The digital etching characteristics of p+ Si and Si0.7Ge0.3 using the combinations of HNO3 oxidation and BOE oxide removal processes were studied.…
Text-guided inpainting has made image forgery increasingly realistic, challenging both SID and IFL. However, existing methods often struggle to point out suspicious signals across domains. To address this problem, we propose EDGER, a…
A detailed understanding of the material properties that affect the splitting between the two low-lying valley states in Si/SiGe heterostructures will be increasingly important as the number of spin qubits is increased. Scanning gate…
We develop a novel wave imaging scheme for reconstructing the shape of an inhomogeneous scatterer and we consider the inverse acoustic obstacle scattering problem as a prototype model for our study. There exists a wealth of reconstruction…
Indentation has been widely used for investigating the mechanical behavior of glasses. However, how the various microscopic properties (such as atomic structure and mechanics) of glass evolve from the immediate contact with the indenter to…
Electromagnetic (EM) side-channel analysis (SCA) is a prominent tool to break mathematically-secure cryptographic engines, especially on resource-constrained IoT devices. Presently, to perform EM SCA on an embedded IoT device, the entire…
In the first two papers of this series (Rhea et al. 2020; Rhea et al. 2021), we demonstrated the dynamism of machine learning applied to optical spectral analysis by using neural networks to extract kinematic parameters and emission-line…
Nanoparticle superlattices consisting of ordered arrangements of nanoparticles exhibit unique optical, magnetic, and electronic properties arising from nanoparticle characteristics as well as their collective behaviors. Understanding how…
In electromagnetic inverse scattering, the goal is to reconstruct object permittivity using scattered waves. While deep learning has shown promise as an alternative to iterative solvers, it is primarily used in supervised frameworks which…
We present a computational imaging technique for imaging thin films at grazing-incidence (GI) angles by incorporating structured illumination into existing GI X-ray scattering setups. This method involves scanning a micro-coded aperture…
The dynamics of an optically trapped particle are often determined by measuring intensity shifts of the back-scattered light from the particle using position sensitive detectors. We present a technique which measures the phase of the…
Small angle X-ray scattering (SAXS) is extensively used in materials science as a way of examining nanostructures. The analysis of experimental SAXS data involves mapping a rather simple data format to a vast amount of structural models.…
Microwave imaging is commonly based on the solution of linearized inverse scattering problems by matched filtering algorithms, i.e., by applying the adjoint of the forward scattering operator to the observation data. A more rigorous…
Shallow nanoindentation enables mechanical characterization of thin films, individual phases and other volume-constrained materials, but measured hardness is often inflated by the indentation size effect (ISE), contact-area errors and…
To study nanostructures on substrates, surface-sensitive reflection-geometry scattering techniques such as grazing incident small angle x-ray scattering are commonly used to yield an averaged statistical structural information of the…