Related papers: Electron drag force in EUV induced pulsed hydrogen…
We measured for the first time the electron density in an Extreme Ultra-Violet induced plasma. This is achieved in a low-pressure argon plasma by using a method called microwave cavity resonance spectroscopy. The measured electron density…
The new generation of lithography tools use high energy EUV radiation which ionizes the present background gas due to photoionization. To predict and understand the long term impact on the highly delicate mirrors It is essential to…
We have used a combination of numerical modeling and experiments to study carbon etching in the presence of a hydrogen plasma. We model the evolution of a low density EUV-induced plasma during and after the EUV pulse to obtain the energy…
Electron plasmas confined by an external magnetic field exhibit variations in a two-dimensional plane orthogonal to the confining magnetic field. A nonlinear fluid simulation code to investigate the properties of 2-D electron plasma wave…
The Large Volume Plasma device(LVPD), a cylindrically shaped, linear plasma device of dimension( $\phi =2m $, $ L =3m $) have successfully demonstrated the excitation of Electron Temperature Gradient(ETG) turbulence[ Mattoo et al.,[1]]. The…
In the past years, EUV lithography scanner systems have entered High-Volume Manufacturing for state-of-the-art Integrated Circuits (IC), with critical dimensions down to 10 nm. This technology uses 13.5 nm EUV radiation, which is…
Expressions for the ion and electron thermal forces acting on a charged grain, suspended in a weakly ionized plasma subject to temperature gradients, are derived. The main emphasize is on the conditions pertinent to the investigations of…
An experimental setup that directly reproduces Extreme UV-lithography relevant conditions for detailed component exposure tests is described. The EUV setup includes a pulsed plasma radiation source, operating at 13.5 nm; a debris mitigation…
An extreme ultraviolet (EUV) single attosecond pulse passing through a laser-dressed dense gas is studied theoretically. The weak EUV pulse pumps the helium gas from the ground state to the 2s2p(1P) autoionizing state, which is coupled to…
Observational evidence in space and astrophysical plasmas with long collisional mean free path suggests that more massive charged particles may be preferentially heated. One possible mechanism for this is the turbulent cascade of energy…
Extreme ultraviolet (XUV) light sources allow for the probing of bound electron dynamics on attosecond scales, interrogation of high-energy-density matter, and access to novel regimes of strong-field quantum electrodynamics. Despite the…
EUV (Extreme-Ultraviolet) waves are globally propagating disturbances that have been observed since the era of the SoHO/EIT instrument. Although the kinematics of the wave front and secondary wave components have been widely studied, there…
The method of moments is used to calculate the dynamic conductivity of strongly coupled fully ionized hydrogen plasmas. The electron density $n_{e}$ and temperature $T$ vary in the domains $ 10^{21} < n_{e} < 10^{24} {\rm cm}^{-3}$, $10^{4}…
Pulses of extreme ultraviolet (XUV) light, with wavelengths between 10 and 100$\,$nm, can be used to image and excite ultra-fast phenomena such as the motion of atomic electrons. Here we show that the illumination of plasma with…
An Electromagnetic (EM) pulse falling on a plasma medium from vacuum can either reflect or propagate inside the plasma depending on whether it is overdense or underdense. In a magnetised plasma, however, there are usually several pass and…
An influence of a high-voltage (3-17 kV) 20 ns pulse on a weakly-ionized low-pressure (0.1-10 Pa) capacitively-coupled radiofrequency (RF) argon plasma is studied experimentally. The plasma evolution after pulse exhibits two characteristic…
We report on the generation of intense extreme ultraviolet (EUV) supercontinuum with photon energies spanning from 35 eV to 50 eV (i. e., supporting an isolated attosecond pulse with a duration of ~271 as) by loosely focusing 35 fs, 11 mJ…
Recent studies have shown direct ion heating (vashistha2020new,Juneja_2023) by lasers EM (Electromagnetic) wave interacting with a plasma threaded by an external uniform magnetic field. The EM wave frequency was near the lower hybrid (LH)…
The characteristics of atmospheric-pressure microdischarges excited by nanosecond high-voltage pulses are investigated in helium-nitrogen mixtures, as a function of the parameters of the excitation voltage pulses. In particular, cases of…
The electron residual energy originated from the stochastic heating in under-dense field-ionized plasma is here investigated. The optical response of plasma is initially modeled by using the concept of two counter-propagating…