Related papers: Ultrahigh-$Q$ on-chip silicon-germanium microreson…
The realization of ultrahigh quality (Q) resonators regardless of the underpinning material platforms has been a ceaseless pursuit, because the high Q resonators provide an extreme environment of storage of light to enable observations of…
We report disk-shaped silicon optomechanical resonators with frequency up to 1.75 GHz in the ultrahigh frequency band. Optical transduction of the thermal motion of the disks' in-plane vibrational modes yields a displacement sensitivity of…
Ultra-high-Q optical resonators are being studied across a wide range of research subjects including quantum information, nonlinear optics, cavity optomechanics, and telecommunications. Here, we demonstrate a new, resonator on-a-chip with a…
The design and experimental demonstration of a large-area, ultra-high-Q-factor and single-mode operation silicon ring resonator based on a strip silicon photonic waveguide are presented, which is suitable for photon gyroscopic application.…
We have fabricated superconducting microwave resonators in a lumped element geometry using single crystal silicon dielectric parallel plate capacitors with C >2 pF. Aluminum devices with resonant frequencies between 4.0 and 6.5 GHz…
The need for semiconductor technology for crystalline silicon of the highest purity and homogeneity has provided samples exhibiting low optical absorption in the infrared range. Such silicon has become the basis for photonic elements in the…
Microresonator devices which posses ultra-high quality factors are essential for fundamental investigations and applications. Microsphere and microtoroid resonators support remarkably high Q's at optical frequencies, while planarity…
We demonstrate photonic devices based on standard 3C SiC epitaxially grown on silicon. We achieve high optical confinement by taking advantage of the high stiffness of SiC and undercutting the underlying silicon substrate. We demonstrate a…
Flexible control of photons and phonons in silicon nanophotonic waveguides is a key feature for emerging applications in communications, sensing and quantum technologies. Strong phonon leakage towards the silica under-cladding hampers…
Ultra-high-Q resonators are fundamentally important to optics and microwave photonics. Up to now, it is still very challenging to boost the Q factor while maintaining a compact size for a resonator. Herein, we proposed and demonstrated an…
Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…
On-chip optical resonators have the promise of revolutionizing numerous fields including metrology and sensing; however, their optical losses have always lagged behind their larger discrete resonator counterparts based on crystalline…
We report ring resonators on a silicon germanium on silicon platform operating in the mid-infrared wavelength range around 3.5 - 4.6 {\mu}m with quality factors reaching up to one million. Advances in fabrication technology enable us to…
Wavelength-sized microdisk resonators were fabricated on a single crystalline 4H-silicon-carbide-oninsulator platform (4H-SiCOI). By carrying out microphotoluminescence measurements at room temperature, we show that the microdisk resonators…
We report on the first experimental demonstration of terahertz (THz) whispering-gallery modes (WGMs) with an ultra high quality (Q) factor of $1.5 \times {10}^{4}$ at 0.62THz. The WGMs are observed in a high resistivity float zone silicon…
Microresonator frequency combs (microcombs) are enabling new applications in frequency synthesis and metrology from high-speed laser ranging to coherent optical communications. One critical parameter that dictates the performance of the…
Integrated photonic circuits are foundational for versatile applications, where high-performance traveling-wave optical resonators are critical. Conventional whispering-gallery mode microresonators (WGMRs) confine light in closed-loop…
Optical microresonators are of paramount importance in photonic circuits requiring fine spectral filtering or resonant light recirculation. Key performance metrics improve with increasing resonance quality factor (Q) across all…
A High-Q microwave (K band) MEMS resonator is presented, which empolys substrate integrated waveguide (SIW) and micromachined via-hole arrays by ICP process. Nonradiation dielectric waveguide (NRD) is formed by metal filled via-hole arrays…
A photodiode with 0.55$\pm$0.1 A/W responsivity at a wavelength of 1176.9 nm has been fabricated in a 45 nm microelectronics silicon-on-insulator foundry process. The resonant waveguide photodetector exploits carrier generation in…