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A large-area thermoelectric generator (TEG) utilizing a folded thin-film concept is implemented and the performance evaluated for near room temperature applications having modest temperature gradients (< 50 K). The TEGs with the area of…
Low-loss transmission and sensitive recovery of weak radio-frequency (rf) and microwave signals is an ubiquitous technological challenge, crucial in fields as diverse as radio astronomy, medical imaging, navigation and communication,…
Integrated photonics is a powerful platform that can improve the performance and stability of optical systems, while providing low-cost, small-footprint and scalable alternatives to implementations based on free-space optics. While great…
We report on the experimental study made on a successive prototype of High-Voltage CMOS (HV-CMOS) ATLASPix2 sensor for the tracking detector application, developed with 180 nm feature size. These sensors are to qualify mainly the peripheral…
This paper presents a miniature tension sensor using a photo-reflector, designed for compact tendon-driven grippers and robotic hands. The proposed sensor has a small form factor of 13~mm x 7~mm x 6.5~mm and is capable of measuring tensile…
Kinetic inductance in thin film superconductors has been used as the basis for low-temperature, low-noise photon detectors. In particular thin films such as NbTiN, TiN, NbN, the kinetic inductance effect is strongly non-linear in the…
Functional materials with high electrical conductivity and optical transmittance are vital for thermally tunable free-space photonic systems. Conventional transparent conductors such as graphene and indium tin oxide are limited by high…
We demonstrate a zero-bias ultraviolet (UV) detector using zinc oxide (ZnO) thin films as the active semiconductor layer, specifically for application in cryogenic conditions. The zero-bias device utilizes the piezoelectric potential…
Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors because: a) the critical temperature varies with composition (0 < Tc < 5 K); b) the normal-state resistivity is large, \rho_n ~ 100 $\mu$Ohm cm,…
Kapton HN films, adopted worldwide due to their superior thermal durability (up to 400 {\deg}C), allow the high temperature sintering of nanoparticle based metal inks. By carefully selecting inks and Kapton substrates, outstanding thermal…
Aluminum nitride (AlN) has been widely used in microeletromechanical resonators for its excellent electromechanical properties. Here we demonstrate the use of AlN as an optomechanical material that simultaneously offer low optical and…
This paper presents high-temperature ferroelectric characterization of 40~nm Al$_{1-x-y}$B$_x$Sc$_y$N (AlBScN) thin film capacitors grown by co-sputtering Al$_{0.89}$B$_{0.11}$ and Sc targets onto Pt(111)/Ti(002)/Si(100) substrates.…
Ultrathin microscale resistive thermometers are of key value to many applications. Here we have fabricated a laser machined 50 ${\mu}$m wide and 50 nm thick serpentine Pt thin film sensor capable of sensing temperatures up to 650 ${^\circ}$…
Microelectromechanical systems and integrated photonics provide the basis for many reliable and compact circuit elements in modern communication systems. Electro-opto-mechanical devices are currently one of the leading approaches to realize…
Resistance thermometry is a time-tested method for taking temperature measurements. In recent years fundamental limits to resistance-based approaches spurred considerable interest in developing photonic temperature sensors as a viable…
We demonstrate wideband integrated photonic circuits in sputter-deposited aluminum nitride (AlN) thin films. At both near-infrared and visible wavelengths, we achieve low propagation loss in integrated waveguides and realize high-quality…
Vertical optofluidic biosensors based on refractive index sensing promise highest sensitivities at smallest area foot-print. Nevertheless, when it comes to large scale fabrication and application of such sensors, cheap and robust platforms…
Plasma diagnostics have a shortage of fast and sensitive calorimetric sensors that can track substrate temperature during plasma-assisted microfabrication. In this work, energy fluxes from argon and oxygen radiofrequency (RF) glow…
Advancements in light modulator technology have been driving discoveries and progress across various fields. The problem of large-scale coherent optical control of atomic quantum systems-including cold atoms, ions, and solid-state color…
Thin-film lithium niobate is a promising photonic platform for on-chip optical sensing because both nonlinear and linear components can be fabricated within one integrated device. To date, waveguided sample interactions for thin-film…