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Ptychographic extreme ultraviolet (EUV) diffractive imaging has emerged as a promising candidate for the next-generation metrology solutions in the semiconductor industry, as it can image wafer samples in reflection geometry at the…

Image and Video Processing · Electrical Eng. & Systems 2023-11-28 Yifeng Shao , Sven Weerdenburg , Jacob Seifert , H. Paul Urbach , Allard P. Mosk , Wim Coene

Deep ultraviolet (DUV) laser pulses with tuneable wavelength and very short duration are a key enabling technology for next-generation technology and ultrafast science. Their generation has been the subject of extensive experimental effort,…

Optics · Physics 2023-01-10 Christian Brahms , John C. Travers

We investigate the shape of a tin sheet formed from a droplet struck by a nanosecond laser pulse. Specifically, we examine the dynamics of the process as a function of laser beam properties, focusing on the outstanding riddle of curvature…

Fluid Dynamics · Physics 2025-02-11 Hugo França , Hermann Karl Schubert , Oscar Versolato , Maziyar Jalaal

The employment of ultrashort laser sources at the mid-IR spectral region for transparent materials is designed to open new routes for laser patterning and a wealth of exciting applications in optics and photonics. To elucidate the material…

Optics · Physics 2023-02-08 George D Tsibidis , Emmanuel Stratakis

Mo-Si multilayer mirrors are central to extreme ultraviolet lithography, where nanoscale optical interference and heat accumulation together constrain reflectivity and operational stability. Here we develop an analytical…

Applied Physics · Physics 2026-01-16 Hongyu He , Li Ma , Zhiyi Xie , Yufan Liu , Chao Wu , Qiye Zheng , Yi Tao , Yunfei Chen , Chenhan Liu

In this work, we show the feasibility of extreme ultraviolet (EUV) patterning on an HF-treated Si(100) surface in the absence of a photoresist. EUV lithography is the leading lithography technique in semiconductor manufacturing due to its…

Pulsed plasmas in liquids exhibit complex interaction between three phases of matter (liquids, gas, plasmas) and are currently used in a wide range of applications across several fields, however significant knowledge gaps in our…

Plasma Physics · Physics 2021-06-16 Christopher Campbell , Xin Tang , Yancey Sechrest , Kamel Fezzaa , Zhehui Wang , David Staack

Experimental spectroscopic studies are presented, in a 5.5--25.5nm extreme-ultraviolet (EUV) wavelength range, of the light emitted from plasma produced by the irradiation of tin microdroplets by 5-ns-pulsed, 2-$\mu$m-wavelength laser…

Plasma Physics · Physics 2021-04-07 R. Schupp , L. Behnke , J. Sheil , Z. Bouza , M. Bayraktar , W. Ubachs , R. Hoekstra , O. O. Versolato

EUV (Extreme-Ultraviolet) waves are globally propagating disturbances that have been observed since the era of the SoHO/EIT instrument. Although the kinematics of the wave front and secondary wave components have been widely studied, there…

Solar and Stellar Astrophysics · Physics 2015-10-28 K. Vanninathan , A. M. Veronig , K. Dissauer , M. S. Madjarska , I. G. Hannah , E. P. Kontar

We discuss an experimental scheme to create a low-dimensional gas of ultracold atoms, based on inelastic bouncing on an evanescent-wave mirror. Close to the turning point of the mirror, the atoms are transferred into an optical dipole trap.…

Quantum Physics · Physics 2009-10-31 R. J. C. Spreeuw , D. Voigt , B. T. Wolschrijn , H. B. van Linden van den Heuvell

This paper describes the construction and performance of a VUV-simulator that has been designed to study degradation of materials under space conditions. It is part of the Complex Irradiation Facility at DLR in Bremen, Germany, that has…

Instrumentation and Detectors · Physics 2014-06-09 Maciej Sznajder , Thomas Renger , Andreas Witzke , Ulrich Geppert , Reiner Thornagel

In the past two decades, tremendous efforts have been exerted to understand and control the delivery of ultrashort laser pulses into various types of transparent materials ranging from glass and crystal to polymer and even bio-materials.…

Optics · Physics 2020-04-09 Haisu Zhang , Peng Wang , Wei Chu , Jianping Yu , Wenbo Li , Jia Qi , Zhanshan Wang , Ya Cheng

The present paper describes the current baseline optical design of POLLUX, a high-resolution spectropolarimeter for the future LUVOIR mission. The instrument will operate in the ultraviolet (UV) domain from 90 to 390 nm in both…

The extreme ultraviolet (XUV) emission from dense plasmas generated with sub-10-fs laser pulses with varying peak intensities up to 3*10^16 W/cm^2 is investigated for different target materials. K shell spectra are obtained from low Z…

Plasma Physics · Physics 2009-11-13 J. Osterholz , F. Brandl , M. Cerchez , T. Fischer , D. Hemmers , B. Hidding , A. Pipahl , G. Pretzler , S. J. Rose , O. Willi

This paper presents a simplified theoretical model for the study of emission from laser produced plasma to better understand the processes and the factors involved in the onset of saturation in plasma emission as well as in increasing…

Plasma Physics · Physics 2015-06-22 V. N. Rai

Spectral measurements play a vital role in understanding laser-plasma interactions. The ability to accurately measure the spectrum of radiation sources is crucial for unraveling the underlying physics. In this article, we introduce a novel…

Optics · Physics 2023-08-30 N. Kliss , J. Wengrowicz , J. Papeer , E. Porat , A. Zigler , Y. Frank

Controlling fluxes of vacuum ultraviolet (VUV) radiation is important in a number of industrial and biomedical applications of low pressure plasma sources because, depending on the process, VUV radiation may be desired, required to a…

Pulses of extreme ultraviolet (XUV) light, with wavelengths between 10 and 100$\,$nm, can be used to image and excite ultra-fast phenomena such as the motion of atomic electrons. Here we show that the illumination of plasma with…

Plasma Physics · Physics 2018-08-24 T. G. Blackburn , A. A. Gonoskov , M. Marklund

An emission tomography of laser-induced plasmas employed in the laser induced breakdown spectroscopy (LIBS) requires long signal integration times during which the plasma cannot be considered stationary. To reduce the integration time, it…

Plasma Physics · Physics 2010-08-04 Sergei V. Shabanov , Igor B. Gornushkin

The advent of Petawatt-class laser systems allows generating electro-magnetic fields of unprecedented strength in a controlled environment, driving increasingly more efforts to probe yet unobserved processes through their interaction with…