Related papers: Fabrication of Ultra-High Q Silica Microdisk Using…
The development of ultrahigh quality factor (Q) microresonators has been driving such technologies as cavity quantum electrodynamics (QED), high-precision sensing, optomechanics, and optical frequency comb generation. Here we report…
Ultrahigh quality factor (Q) microcavities have been emerging as an appealing compact photonic platform for various applications. The Q factor plays a critical role in determining the nonlinear optical performance of a microcavity. However,…
We present a 1.16-\mum-radius disk cavity with ultrahigh quality (Q) factor by embedding the disk into a sunflower-type circular photonic crystal (CPC). The band gap of the CPC reduces the bending loss of the whispering-gallery mode of the…
We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q)-factors of the…
The demonstration that Nanocrystalline Diamond (NCD) can retain the superior Young's modulus (1,100 GPa) of single crystal diamond twinned with its ability to be grown at low temperatures (<450 {\deg}C) has driven a revival into the growth…
We describe a micro-fabrication method to create concave features with ultra-low surface roughness in silica, either on the end facets of optical fibers or on flat substrates. The machining uses a single focused CO2 laser pulse. Parameters…
3D printing of high-quality silica photonic structures is particularly challenging, as surface roughness at the nanoscale can severely degrade optical performance through scattering losses. Here, we develop a technique to fold ultrasmooth…
We demonstrate ultra-high Q factor microring resonators close to the intrinsic material absorption limit on lithium niobate on insulator. The microrings are fabricated on pristine lithium niobate (LN) thin film wafer thinned from LN bulk…
High refractive index contrast optical microdisk resonators fabricated from silicon-on-insulator wafers are studied using an external silica fiber taper waveguide as a wafer-scale optical probe. Measurements performed in the 1500 nm…
We report on the development of a chemical mechanical planarization (CMP) process for thick damascene Ta structures with pattern feature sizes down to 100 nm. This CMP process is the core of the fabrication sequence for scalable…
Nanophotonic structures in single--crystal diamond (SCD) that simultaneously confine and co-localize photons and phonons are highly desirable for applications in quantum information science and optomechanics. Here we describe an optimized…
Whispering gallery mode (WGM) microdisk resonators are promising optical devices that confine light efficiently and enable enhanced nonlinear optical effects. This work presents a novel approach to reduce sidewall roughness in…
We demonstrate integrated optomechanical circuits with high mechanical quality factors prepared from nanocrystalline diamond thin films. Using chemomechanical polishing, the RMS surface roughness of as grown polycrystalline diamond films is…
Thin-film lithium niobate (TFLN) has been considered as one of the most important platforms for constructing high-performance photonic integrated devices such as electro-optic modulators, frequency combs, classical/quantum light sources,…
Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for…
We report on fabrication of crystalline lithium niobate microresonators with quality factors above 10^7 as measured around 770 nm wavelength. Our technique relies on femtosecond laser micromachining for patterning a mask coated on the…
We demonstrate photonic crystal L3 cavities with resonant wavelength around 1.078 \textmu m on undoped silicon-on-insulator, designed to enhance spontaneous emission from phosphorus donor-bound excitons.\enspace We have optimised a…
Optical properties and sensing capabilities of fused silica microbubbles were studied numerically using a finite element method. Mode characteristics, such as quality factor (Q) and effective refractive index, were determined for different…
Optical microresonators with high quality ($Q$) factors are essential to a wide range of integrated photonic devices. Steady efforts have been directed towards increasing microresonator $Q$ factors across a variety of platforms. With…
On-chip optical waveguides with low propagation losses and precisely engineered group velocity dispersion (GVD) are important to nonlinear photonic devices such as soliton microcombs. Yet, despite intensive research efforts, nonlinear…