Related papers: Machine learning techniques applied for detection …
It has been a widely growing interest in using silicon carbide (SiC)in high-power electronic devices. Yet, SiC wafers may contain killer defects that could reduce fabrication yield and make the device fall into unexpected failures. To…
Nanoscale manufacturing requires high-precision surface inspection to guarantee the quality of the produced nanostructures. For production environments, angle-resolved scatterometry offers a non- invasive and in-line compatible alternative…
Accurate modeling of light scattering from nanometer scale defects on Silicon wafers is critical for enabling increasingly shrinking semiconductor technology nodes of the future. Yet, such modeling of defect scattering remains unsolved…
We propose a scheme for detecting and differentiating deeply subwavelength particles based on their spatial features. Our approach combines scattering from an ultrasonically modulated nanopatterend grating with heterodyne techniques to…
High-energy (1-100 keV) electrons can coherently couple to plasmonic and dielectric nanostructures creating cathodoluminescence (CL) of which the spectral features reveal details of the material's resonant modes at deep-subwavelength…
The study explores machine learning methods for revealing chemical sensitivity in Helium spin-echo spectroscopy, in order to obtain ultra-sensitive surface analytic technique. We model bi-species co-adsorbed systems and demonstrate that by…
We demonstrate a smart laser-diffraction analysis technique for particle mixture identification. We retrieve information about the size, geometry, and ratio concentration of two-component heterogeneous particle mixtures with an efficiency…
In absence of a lens to form an image, incoherent or partially coherent light scattering off an obstructive or reflective object forms a broad intensity distribution in the far field with only feeble spatial features. We show here that…
A multilayered particle is illuminated by plane acoustic or electromagnetic waves of one or several frequencies. We consider the inverse scattering problem for the identification of the layers and of the refraction coefficients of the…
Holograms of colloidal particles can be analyzed with the Lorenz-Mie theory of light scattering to measure individual particles' three-dimensional positions with nanometer precision while simultaneously estimating their sizes and refractive…
Reliable connectivity in millimeter-wave (mmWave) and sub-terahertz (sub-THz) networks depends on reflections from surrounding surfaces, as high-frequency signals are highly vulnerable to blockage. The scattering behavior of a surface is…
There is a high demand for fully automated methods for the analysis of primary particle size distributions of agglomerated, sintered or occluded primary particles, due to their impact on material properties. Therefore, a novel, deep…
Scatterometry is a tested method for measuring periodic semiconductor structures. Since the sizes of modern semiconductor structures have reached the nanoscale regime, the challenge is to determine the shape of periodic nanostructures with…
Electron backscatter diffraction is a widely used technique for nano- to micro-scale analysis of crystal structure and orientation. Backscatter patterns produced by an alloy solid solution matrix and its ordered superlattice exhibit only…
High-dimensional clustering analysis is a challenging problem in statistics and machine learning, with broad applications such as the analysis of microarray data and RNA-seq data. In this paper, we propose a new clustering procedure called…
Machine learning techniques can reveal hidden structure in large data amounts and can potentially extent or even replace analytical scientific methods. In nanophotonics, modes can increase the light yield from emitters located inside the…
Selective Laser Melting (SLM) is a powder-bed additive manufacturing technique whose part quality depends critically on feedstock morphology. However, conventional powder characterization methods are low-throughput and qualitative, failing…
Non-invasive detection of objects embedded inside an optically scattering medium is essential for numerous applications in engineering and sciences. However, in most applications light at visible or near-infrared wavebands is scattered by…
The increasing scientific and technological interest in nanoparticles has raised the need for fast, efficient and precise characterization techniques. Powder diffraction is a very efficient experimental method, as it is straightforward and…
The classical method of determining the atomic structure of complex molecules by analyzing diffraction patterns is currently undergoing drastic developments. Modern techniques for producing extremely bright and coherent X-ray lasers allow a…