Related papers: Membrane sandwich squeeze film pressure sensors
We realize squeeze film pressure sensors using suspended, high mechanical quality silicon nitride membranes forming few-micron gap sandwiches. The effects of air pressure on the mechanical vibrations of the membranes are investigated in the…
We report on the realization of ultrasensitive absolute pressure sensors based on silicon nitride membrane sandwiches. These sandwiches consist in a pair of highly-pretensioned, ultrathin (50 nm), large area (0.25 mm2) films, suspended…
The operating principle of squeeze-film pressure sensors is based on the pressure dependence of a membrane's resonance frequency, caused by the compression of the surrounding gas which changes the resonator stiffness. To realize such…
The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high frequency motion. This effect is…
The effects of pressure on micromechanical air-filled cavities made by a pair of suspended, parallel silicon nitride membranes are investigated in the free molecular and quasi-molecular regimes. Variations of the fundamental drummode…
Most microphones operate by detecting the sound-pressure induced motion of a membrane. In contrast, here we introduce a microphone that operates by monitoring the sound-pressure-induced modulation of the compressibility of air. By driving a…
Membrane-based sensors are an important market for microelectromechanical systems (MEMS). Two-dimensional (2D) materials, with their low mass, are excellent candidates for suspended membranes to provide high sensitivity, small footprint…
The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of…
Mechanical properties of a nanomechanical resonator have a significant impact on the performance of a resonant Nano-electromechanical system (NEMS) device. Here we study the mechanical properties of suspended membranes fabricated out of…
In recent years, pressure sensors have been widely used as crucial technology components in industrial, healthcare, consumer electronics, and automotive safety applications. With the development of intelligent technologies, there is a…
A micro-pressure sensor with an isosceles trapezoidal beam-membrane (ITBM) is proposed in this paper, consisting of a square silicon membrane, four isosceles trapezoidal beams and four piezoresistors.To investigate how the elastic silicon…
The resonance frequency of ultra-thin layered two-dimensional (2D) materials changes nonlinearly with the tension induced by the pressure from the surrounding gas. Although the dynamics of pressurized 2D material membranes have been…
The dynamics of suspended two-dimensional (2D) materials has received increasing attention during the last decade, yielding new techniques to study and interpret the physics that governs the motion of atomically thin layers. This has led to…
Straining graphene results in the appearance of a pseudo-magnetic field which alters its local electronic properties. Applying a pressure difference between the two sides of the membrane causes it to bend/bulge resulting in a resistance…
In Micro-electro-mechanical Systems (MEMS) based pressure sensors and acoustic devices, deflection of a membrane is utilized for pressure or sound measurements. Due to advantages of capacitive pressure sensor over piezoresistive pressure…
The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors the sensitivity offered by a single suspended…
A multichannel thin-film sensor is implemented from a set of microstrip-coupled split-ring resonators (SRR's) with different dimensions. Each SRR exhibits a unique high-Q resonance that is sensitive to the presence of a sample in a…
This paper reports the application of zinc oxide (ZnO) in the pressure sensors that can be integrated with a microelectromechanical system (MEMS). ZnO is one of the materials that has received a great deal of attention due to its unique…
Investigations of free-standing liquid films enjoy an increasing popularity due to their relevance for many fundamental and applied scientific problems. They constitute soap bubbles and foams, serve as membranes for gas transport or as…
A custom-developed magneto-mechanical resonator (MMR) for wireless pressure measurement is investigated for potential applications in process engineering. The MMR sensor utilises changes in the resonance frequency caused by pressure on a…