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We report an actuation/detection scheme with a top-down nano-electromechanical system for frequency shift-based sensing applications with outstanding performance. It relies on electrostatic actuation and piezoresistive nanowire gauges for…

The field of optical metrology with its high precision position, rotation and wavefront sensors represents the basis for lithography and high resolution microscopy. However, the on-chip integration - a task highly relevant for future…

Applied Physics · Physics 2020-06-11 Ankan Bag , Martin Neugebauer , Uwe Mick , Silke Christiansen , Sebastian A Schulz , Peter Banzer

We present measurements on nanomechanical resonators operating in the radio frequency range. We apply a setup which allows the comparison of two schemes of displacement detection for mechanical resonators, namely conventional power…

Condensed Matter · Physics 2007-05-23 Florian W. Beil , Laura Pescini , Eva Höhberger , Andreas Kraus , Artur Erbe , Robert H. Blick

As the fields of optical microscopy, semiconductor technology and fundamental science increasingly aim for precision at or below the nanoscale, there is a burgeoning demand for sub-nanometric displacement and position sensing. We show that…

Optics · Physics 2021-11-01 Morgan Facchin , Graham David Bruce , Kishan Dholakia

We present a quantitative framework for on-axis optical transduction of vertical InP nanowire resonators, correlating laser position to signal amplitude, calibration, and frequency stability. Photothermal resonance detuning is used to…

Visible and infrared photons can be detected with a broadband response via the internal photoeffect. By using plasmonic nanostructures, i.e. nanoantennas, wavelength selectivity can be introduced to such detectors through geometry-dependent…

We demonstrate sub-femtometer displacement-sensing results achieved with a compact optical resonator-based laser interferometry technique called heterodyne cavity-tracking, intended for local displacement or inertial sensing with ultra-high…

Instrumentation and Detectors · Physics 2026-05-06 Shreevathsa Chalathadka Subrahmanya , Jonathan Joseph Carter , Oliver Gerberding

We study a novel configuration for displacement detection consisting of a nanomechanical resonator coupled to both, a radio frequency superconducting interference device (RF SQUID) and to a superconducting stripline resonator. We employ an…

Mesoscale and Nanoscale Physics · Physics 2009-11-13 Eyal Buks , Stav Zaitsev , Eran Segev , Baleegh Abdo , M. P. Blencowe

The characterization of individual nanoparticles in a liquid constitutes a critical challenge for environmental, material, and biological sciences. To detect nanoparticles, electronic approaches are especially desirable owing to their…

Silicon sensors are the most diffuse position sensitive device in particle physics 8 experiments and in countless applications in science and technology. They had a spectacular progress in performance over almost 40 years since their first…

Instrumentation and Detectors · Physics 2022-05-04 Gianluigi Casse , Nicola Massari , Matthew Franksa , Luca Parmesana

We achieve high detectivity terahertz sensing using a silicon nitride nanomechanical resonator functionalized with a metasurface absorber. High performances are achieved by striking a fine balance between the frequency stability of the…

Placing a nanomechanical object in the evanescent near-field of a high-$Q$ optical microcavity gives access to strong gradient forces and quantum-noise-limited displacement readout, offering an attractive platform for precision sensing…

We propose and experimentally demonstrate a novel detection method that significantly improves the precision of real-time measurement of the three-dimensional displacement of a levitated dipolar scatterer. Our technique relies on spatial…

We report on the realization of a displacement sensor based on an optical nanofiber. A single gold nano-sphere is deposited on top of a nanofiber and the system is placed within a standing wave which serves as a position ruler. Scattered…

We demonstrate a sensor scheme for nanoscale target displacement that relies on a single Quantum Cascade Laser (QCL) subject to optical feedback. The system combines the inherent sensitivity of QCLs to optical re-injection and their…

Recent advances in the fabrication of microelectromechanical systems (MEMS) and their evolution into nanoelectromechanical systems (NEMS) have allowed researchers to measure extremely small forces, masses, and displacements. In particular,…

Mesoscale and Nanoscale Physics · Physics 2008-08-02 M. Poggio , M. P. Jura , C. L. Degen , M. A. Topinka , H. J. Mamin , D. Goldhaber-Gordon , D. Rugar

Controlling quantum light-matter interactions at scales smaller than the diffraction limit at the single quantum emitter level is a critical challenge to the goal of advancing quantum technologies. We introduce a novel material platform…

All-dielectric optical nano-resonators, exhibiting exotic near-field distributions upon excitations, have emerged as low-loss, versatile and highly adaptable components in nanophotonic structures for manipulating electromagnetic waves and…

We present a method for 3D sub-nanometer displacement measurement using a set of differential optical shadow sensor. It is based on using pairs of collimated beams on opposite sides of an object that are partially blocked by it. Applied to…

Instrumentation and Detectors · Physics 2018-02-07 Andreas Zoellner , Si Tan , Shailendhar Saraf , Abdul Alfauwaz , Dan DeBra , Sasha Buchman , John Lipa

Integration is currently the only feasible route towards scalable photonic quantum processing devices that are sufficiently complex to be genuinely useful in computing, metrology, and simulation. Embedded on-chip detection will be critical…

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