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Nonlinear micro-electro-mechanical systems (MEMS) resonators open new opportunities in sensing and signal manipulation compared to their linear counterparts by enabling frequency tuning and increased bandwidth. Here, we design, fabricate…
Microelectromechanical systems (MEMS) technologies are developing rapidly with increasing study of the design, fabrication and commercialization of microscale systems and devices. Accurate mechanical properties are important for successful…
Accelerometers offer motion sensing capabilities across a wide range of areas, enabling navigational awareness in consumer goods and defense applications, and playing a key role in monitoring and control systems. To date, on-chip…
Advances in artificial intelligence are driven by technologies inspired by the brain, but these technologies are orders of magnitude less powerful and energy efficient than biological systems. Inspired by the nonlinear dynamics of neural…
This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded…
Amorphous insulators have localized wave functions that decay with the distance $r$ following exp($-r/\zeta$). Since nanoscale conduction is not excluded at $r<\zeta$, one may use amorphous insulators and take advantage of their size effect…
The demands of modern electronic components require advanced computing platforms for efficient information processing to realize in-memory operations with a high density of data storage capabilities towards developing alternatives to von…
We show that a magnetically levitated microsphere in high vacuum can be used as an accelerometer by comparing its response to that of a commercially available geophone. This system shows great promise for ultrahigh acceleration…
Recording reliably extracellular neural activities isan essential prerequisite for the development of bioelectronicsand neuroprosthetic applications. Recently, a fully differential,2-stage, integrating pre-amplifier was proposed for…
Understanding microstructural evolution under extreme thermal conditions is essential for advancing metal additive manufacturing (AM). This work demonstrates the feasibility of employing micro-electro-mechanical system (MEMS) heating…
Emerging non-volatile memory (NVM), or memristive, devices promise energy-efficient realization of deep learning, when efficiently integrated with mixed-signal integrated circuits on a CMOS substrate. Even though several algorithmic…
The exponential growth of artificial intelligence (AI) applications has exposed the inefficiency of conventional von Neumann architectures, where frequent data transfers between compute units and memory create significant energy and latency…
Thermal convection based micro-electromechanical accelerometer is a relatively new kind of acceleration sensor that does not require a solid proof mass, yielding unique benefits like high shock survival rating, low production cost, and…
A sensor-fused wearable assistance prototype for upper-limb function (triceps brachii and extensor pollicis brevis) is presented. The device integrates surface electromyography (sEMG), an inertial measurement unit (IMU), and flex/force…
This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena…
Inertial sensors based on cold atom interferometry exhibit many interesting features for applications related to inertial navigation, particularly in terms of sensitivity and long-term stability. However, at present the typical atom…
In this paper, a differential MOEMS accelerometer based on the Fabry-Perot (FP) micro-cavities is presented. The optical system of the device consists of two FP cavities and the mechanical system is composed of a proof mass that is…
Recent advancements in reservoir computing research have created a demand for analog devices with dynamics that can facilitate the physical implementation of reservoirs, promising faster information processing while consuming less energy…
Efficient operation of intelligent machines in the real world requires methods that allow them to understand and predict the uncertainties presented by the unstructured environments with good accuracy, scalability and generalization,…
Intelligent biological systems are characterized by their embodiment in a complex environment and the intimate interplay between their nervous systems and the nonlinear mechanical properties of their bodies. This coordination, in which the…