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Ac electrokinetic flows are commonly used for manipulating micron-scale particles in a biosensor system. At the solid-liquid state there are two kinds of processes in the reaction between analytes and ligands: the mass transport process and…
Efficient thermal management in high-power electronics cooling can be achieved using phase-change heat transfer devices, such as vapor chambers. Traditional vapor chambers use wicks to transport condensate for efficient thermal exchange and…
We measure the mechanical thermal noise of soft silicon atomic force microscopy cantilevers. Using an interferometric setup, we have a resolution down to 1E-14 m/rtHz on a wide spectral range (3 Hz to 1E5 Hz). The low frequency behavior…
Magnetoelastic sensors for the detection of low-frequency and low-amplitude magnetic fields are in the focus of research since more than 30 years. In order to minimize the limit of detection (LOD) of such sensor systems, it is of high…
The self-powered sensing system could harness ambient energy to power the sensor without the need for external electrical energy. Recently, the concept of photovoltaic (PV) self-powered gas sensing has aroused wider attentions due to…
Flow sensing is fundamental to both biological survival and technological innovation. Inspired by biological mechanoreceptors, artificial flow sensors detect subtle fluid motion using slender, viscous-driven structures. Among these,…
We present the design, fabrication and response of humidity sensor based on electrical tunneling through temperature-stabilized nanometer gaps. The sensor consists of two stacked metal electrodes separated by 2.5 nm of vertical air gap.…
This paper presents a fully-integrated CMOS temperature sensor for densely-distributed thermal monitoring in systems on chip supporting dynamic voltage and frequency scaling. The sensor front-end exploits a sub-threshold PMOS-based circuit…
In this paper we present a simple and efficient built-in temperature sensor for thermal monitoring of standard-cell based VLSI circuits. The proposed smart temperature sensor uses a ring-oscillator composed of complex gates instead of…
Accurate monitoring of the hydrogen concentration is critical for optimizing fuel cell performance, minimizing purge losses, and reducing long-term degradation. Conventional hydrogen sensors often rely on catalytic materials and face…
We use a quantum point contact (QPC) as a displacement transducer to measure and control the low-temperature thermal motion of a nearby micromechanical cantilever. The QPC is included in an active feedback loop designed to cool the…
Active microelectromechanical systems can couple the nanomechanical domain with the electronic domain by integrating electronic sensing and actuation mechanisms into the micromechanical device. This enables very fast and sensitive…
Fluxgate sensors are widely used in the field of low frequency and weak vector magnetic field measurement because of their good performance, such as high resolution and low power consumption. However, during the long-term continuous…
Single-chip CMOS-based biosensors that feature microcantilevers as transducer elements are presented. The cantilevers are functionalized for the capturing of specific analytes, e.g., proteins or DNA. The binding of the analyte changes the…
Microfabricated alkali vapor cells enable the miniaturization of atomic sensors, but require collective wafer-level integration of complex features. In many applications, including magnetometers, gyroscopes, magneto-optical traps, and…
-This paper presents an inkjet printing capacitive microwave sensor for toxic vapor detection. The designed sensors were presented and fabricated with success. The experiments show sensitivity to ethanol vapor according to the S parameters.…
This paper presents a fully-integrated CMOS voltage reference designed in a 90 nm process node using low voltage threshold (LVT) transistor models. The voltage reference leverages subthreshold operation and near-weak inversion…
WO3-x thinfilms featuring petal-like and lamella-like nanostructures are grown under controlled oxygen partial pressures using hot filament chemical vapor deposition. These synthesized WO3-x nanostructures exhibit monoclinic structure and…
We describe micro-fabricated rubidium vapor cells with integrated temperature-control functionality and demonstrate their suitability for use in miniaturized ultra-sensitive magnetometers. These functionalized vapor cells (FVCs) embody a…
We report recent progress towards the realization of a sub-mK, low-vibration environment at the bottom stage of a dry dilution refrigerator for use in mechanical tests of quantum mechanics. Using adiabatic nuclear demagnetization, we have…