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High-quality factor microwave resonators operating in a magnetic field are a necessity for some quantum sensing applications and hybrid platforms. Losses in microwave superconducting resonators can have several origins, including…

Quantum Physics · Physics 2024-05-24 Arne Bahr , Matteo Boselli , Benjamin Huard , Audrey Bienfait

Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for…

Optics · Physics 2023-03-22 Roghayeh Nikbakht , Xitong Xie , Arnaud Weck , Raphael St-Gelais

We report on a systematic study of nanomechanical dissipation in high-frequency (approximatively 300 MHz) gallium arsenide optomechanical disk resonators, in conditions where clamping and fluidic losses are negligible. Phonon-phonon…

Micro- and nano-resonators have important applications including sensing, navigation, and biochemical detection. Their performance is quantified using the quality factor $Q$, which gives the ratio of the energy stored to the energy…

Materials Science · Physics 2020-01-08 Meng Fan , Aya Nawano , Jan Schroers , Mark D. Shattuck , Corey S. O'Hern

Complex oxide thin films and heterostructures exhibit a profusion of exotic phenomena, often resulting from the intricate interplay between film and substrate. Recently it has become possible to isolate epitaxially grown single-crystalline…

An efficient modulation of backscattered energy is one of the key requirements for enabling efficient wireless communication channels. Typical architectures, being based on either electronically or mechanically modulated reflectors, cannot…

We report on fabrication of a microtoroid resonator of high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3D)…

We describe a method with which to fabricate sub-micron mechanical structures from silicon-on-insulator substrates. We believe this is the first reported method for such fabrication, and our technique allows for complex, multilayer electron…

Mesoscale and Nanoscale Physics · Physics 2025-05-08 Andrew N. Cleland , Michael L. Roukes

We report on the fabrication and characterization of superconducting coplanar waveguide (CPW) resonators based on titanium nitride (TiN) thin films deposited on 200\,mm diameter high-resistivity Si(100) substrates. We systematically…

Scalable architectures characterized by quantum bits (qubits) with low error rates are essential to the development of a practical quantum computer. In the superconducting quantum computing implementation, understanding and minimizing…

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size,…

Other Computer Science · Computer Science 2013-01-15 Joydeep Basu , Tarun Kanti Bhattacharyya

Thermally-tuning silicon micro-cavities are versatile and beneficial elements in low-cost large-scale photonic integrated circuits (PICs). Traditional metal heaters used for thermal tuning in silicon micro-cavities usually need a thick SiO2…

Optics · Physics 2015-06-23 Longhai Yu , Yaocheng Shi , Daoxin Dai , Sailing He

The damping rates of high quality factor nanomechanical resonators are well beyond intrinsic limits. Here, we explore the underlying microscopic loss mechanisms by investigating the temperature-dependent damping of the fundamental and third…

Mesoscale and Nanoscale Physics · Physics 2014-03-13 Thomas Faust , Johannes Rieger , Maximilian J. Seitner , Jörg P. Kotthaus , Eva M. Weig

We describe the design and fabrication of a scalable atom-light photonic interface based on a silicon nitride microring resonator on a transparent silicon dioxide-nitride multi-layer membrane. This new photonic platform is fully compatible…

Quantum Physics · Physics 2021-04-27 Tzu-Han Chang , Brian Fields , May E. Kim , Chen-Lung Hung

Applications in quantum information processing and photon detectors are stimulating a race to produce the highest possible quality factor on-chip superconducting microwave resonators. We have tested the surface-dominated loss hypothesis by…

Superconductivity · Physics 2012-06-06 K. Geerlings , S. Shankar , E. Edwards , L. Frunzio , R. J. Schoelkopf , M. H. Devoret

Suspended monolayer transition metal-dichalcogenides (TMD) are membranes that combine ultra-low mass and exceptional optical properties, making them intriguing materials for opto-mechanical applications. However, the low measured quality…

We show that torsion resonators can experience massive dissipation dilution due to nanoscale strain, and draw a connection to a century-old theory from the torsion balance community which suggests that a simple torsion ribbon is naturally…

Mesoscale and Nanoscale Physics · Physics 2021-12-16 Jon R. Pratt , Aman R. Agrawal , Charles A. Condos , Christian M. Pluchar , Stephan Schlamminger , Dalziel J. Wilson

Aluminium based platforms have allowed to reach major milestones for superconducting quantum circuits. For the next generation of devices, materials that are able to maintain low microwave losses while providing new functionalities, such as…

Other Condensed Matter · Physics 2022-05-03 Kazi Rafsanjani Amin , Carine Ladner , Guillaume Jourdan , Sebastien Hentz , Nicolas Roch , Julien Renard

In this Letter we present resonance properties in terahertz metamaterials consisting of a split-ring resonator array made from high temperature superconducting films. By varying the temperature, we observed efficient metamaterial resonance…

Nanocrystalline materials exhibit properties that can differ substantially from those of their single crystal counterparts. As such, they provide ways to enhance and optimise their functionality for devices and applications. Here we report…