English
Related papers

Related papers: Patterning Sn-based EUV resists with low-energy el…

200 papers

Lamellar gratings are widely used diffractive optical elements; gratings etched into Si can be used as structural elements or prototypes of structural elements in integrated electronic circuits. For the control of the lithographic…

Applied Physics · Physics 2018-10-19 Analía Fernández Herrero , Mika Pflüger , Frank Scholze , Victor Soltwisch

A new tool providing material contrast control in scanning electron microscopy (SEM) is demonstrated. The approach is based on deep-UV illumination during SEM imaging and delivers a novel material based contrast as well as higher resolution…

Instrumentation and Detectors · Physics 2016-04-07 Gediminas Seniutinas , Armandas Balcytis , Saulius Juodkazis

We use Raman spectroscopy to show that exposing few-layer graphene to extreme ultraviolet (EUV, 13.5 nm) radiation, i.e. relatively low photon energy, results in an increasing density of defects. Furthermore, exposure to EUV radiation in a…

Materials Science · Physics 2013-08-27 A. Gao , P. J. Rizo , E. Zoethout , L. Scaccabarozzi , C. J. Lee , V. Banine , F. Bijkerk

Electron diffraction through a thin patterned silicon membrane can be used to create complex spatial modulations in electron distributions by varying the intensity of different reflections using parameters such as crystallographic…

Accelerator Physics · Physics 2019-05-30 L. E. Malin , W. S. Graves , M. Holl , J. C. H. Spence , E. A. Nanni , R. K. Li , X. Shen , S. Weathersby

Electron microscopy (EM) has been instrumental in our understanding of biological systems ranging from subcellular structures to complex organisms. Although EM reveals cellular morphology with nanoscale resolution, it does not provide…

The technological advance of High Numerical Aperture Extreme Ultraviolet Lithography (High NA EUVL) has opened the gates to extensive researches on thinner photoresists (below 30nm), necessary for the industrial implementation of High NA…

Computer Vision and Pattern Recognition · Computer Science 2023-10-24 Sara Sacchi , Bappaditya Dey , Iacopo Mochi , Sandip Halder , Philippe Leray

Integrating patterned, low-loss magnetic materials into microwave devices and circuits presents many challenges due to the specific conditions that are required to grow ferrite materials, driving the need for flip-chip and other indirect…

A neutron spectrometer, the European Low-Energy Neutron Spectrometer (ELENS), has been constructed to study exotic nuclei in inverse-kinematics experiments. The spectrometer, which consists of plastic scintillator bars, can be operated in…

The ability to create superlattices in van der Waals (vdW) heterostructures via moir\'e interference heralded a new era in the science and technology of two-dimensional materials. Through precise control of the twist angle, flat bands and…

Electron energy-loss spectroscopy (EELS) can measure similar information to X-ray, UV-Vis, and IR spectroscopies but with atomic resolution and increased scattering cross sections. Recent advances in electron monochromators have expanded…

Chemical Physics · Physics 2024-04-26 Ye-Jin Kim , Levi D. Palmer , Wonseok Lee , Nicholas J. Heller , Scott K. Cushing

Van der Waals (vdW) materials exhibit intriguing structural, electronic and photonic properties. Electron Energy Loss Spectroscopy (EELS) within Scanning Transmission Electron Microscope (STEM) allows for nanoscale mapping of such…

In situ exploration of the planetary atmospheres requires the development of laboratory experiments to understand the molecular growth pathways initiated by photochemistry in the upper layers of the atmospheres. Major species and dominant…

Reactions between light charged nuclei at sub-Coulomb energies are crucial in astrophysical environments, but accurate cross-section measurements are hindered by electron screening. Traditional methods, including polynomial extrapolation…

Nuclear Theory · Physics 2025-06-11 D. Chattopadhyay

Laser-assisted electron scattering (LAES), a light-matter interaction process that facilitates energy transfer between strong light fields and free electrons, has so far been observed only in gas phase. Here we report on the observation of…

In a recently developed methodology termed photon induced near-field electron microscopy (PINEM), the inelastic scattering of electrons off illuminated nanostructures provides direct experimental access to the structure of optical…

Mesoscale and Nanoscale Physics · Physics 2024-05-21 Niklas Müller , Gerrit Vosse , Ferdinand Evers , Sascha Schäfer

This work aims to present the current state of simulations of electroluminescence (EL) produced in gas-based detectors with special interest for NEXT --- Neutrino Experiment with a Xenon TPC. NEXT is a neutrinoless double beta decay…

Instrumentation and Detectors · Physics 2011-05-23 C. A. B. Oliveira , M. Sorel , J. Martin-Albo , J. J. Gomez-Cadenas , A. L. Ferreira , J. F. C. A. Veloso

We present a detailed study of inelastic energy-loss collisions of photoelectrons emitted from He nanodroplets by tunable extreme ultraviolet (XUV) radiation. Using coincidence imaging detection of electrons and ions, we probe the lowest He…

Atomic and Molecular Clusters · Physics 2019-02-20 M. V. Shcherbinin , F. Vad Westergaard , M. Hanif , S. R. Krishnan , A. C. LaForge , R. Richter , T. Pfeifer , M. Mudrich

We report on mask-less, high resolution etching of diamond surfaces, featuring sizes down to 10 nm. We use a scanning electron microscope (SEM) together with water vapor, which was injected by a needle directly onto the sample surface.…

Applied Physics · Physics 2019-09-04 Vasilis Dergianlis , Martin Geller , Dennis Oing , Nicolas Woehrl , Axel Lorke

Nanofabrication research pursues the miniaturization of patterned feature size. In the current state of the art, micron scale areas can be patterned with features down to ~ 30 nm pitch using electron beam lithography. Our work demonstrates…