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Large-scale microfluidic microsystems with complex three-dimensional (3D) configurations are highly in demand by both fundamental research and industrial application, holding the potentials for fostering a wide range of innovative…

Applied Physics · Physics 2020-01-13 Zijie Lin , Jian Xu , Yunpeng Song , Xiaolong Li , Peng Wang , Wei Chu , Zhenhua Wang , Ya Cheng

Advanced three-dimensional manufacturing techniques are triggering new paradigms in the way we design and produce sophisticated parts on demand. Yet, to fully unravel its potential, a few limitations have to be overcome, one of them being…

Applied Physics · Physics 2024-07-01 Enrico Casamenti , Sacha Pollonghini , Yves Bellouard

We report on fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally…

Optics · Physics 2016-09-20 Yuanxin Tan , Zhaohui Wang , Wei Chu , Yang Liao , Lingling Qiao , Ya Cheng

Humanity's interest in manufacturing silica-glass objects extends back over three thousand years. Silica glass is resistant to heating and exposure to many chemicals, and it is transparent in a wide wavelength range. Due to these qualities,…

Due to its exceptional dimensional stability in harsh thermal conditions and excellent mechanical and optical properties, Corning ultra-low expansion (ULE) glass is the material of choice in many high-demanding fields such as aerospace,…

We report three-dimensional laser microfabrication, which enables microstructuring of materials on the scale of 0.2-1 micrometers. The two different types of microfabrication demonstrated and discussed in this work are based on holographic…

Glass materials play an increasingly important role in advanced technologies due to their superior physical properties. However, precise machining of glass remains a major challenge because of its brittleness and sensitivity to thermal and…

3D printing allows rapid fabrication of complex objects from digital designs. One 3D-printing process, direct laser writing, polymerises a light-sensitive material by steering a focused laser beam through the shape of the object to be…

In the past two decades, tremendous efforts have been exerted to understand and control the delivery of ultrashort laser pulses into various types of transparent materials ranging from glass and crystal to polymer and even bio-materials.…

Optics · Physics 2020-04-09 Haisu Zhang , Peng Wang , Wei Chu , Jianping Yu , Wenbo Li , Jia Qi , Zhanshan Wang , Ya Cheng

Hierarchical structures are abundant in nature, such as in the superhydrophobic surfaces of lotus leaves and the structural coloration of butterfly wings. They consist of ordered features across multiple size scales, and their unique…

Glass is increasingly desired as a material for manufacturing complex microscopic geometries, from the micro-optics in compact consumer products to microfluidic systems for chemical synthesis and biological analyses. As the size, geometric,…

We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in-situ melting, for centimeter-scale and bonding-free fabrication of…

Applied Physics · Physics 2022-04-19 Aodong Zhang , Jian Xu , Yucen Li , Ming Hu , Zijie Lin , Yunpeng Song , Jia Qi , Wei Chen , Zhaoxiang Liu , Ya Cheng

Nowadays three-dimensional (3D) printing has been widely used for producing geometrically complex 3D structures from a broad range of materials such as ceramics, metals, polymers, semiconductors, etc. Although it has been demonstrated that…

Applied Physics · Physics 2018-02-07 Wei Chu , Yuanxin Tan , Peng Wang , Jian Xu , Wenbo Li , Jia Qi , Ya Cheng

Nanostructuring hard optical crystals has so far been exclusively feasible at their surface, as stress induced crack formation and propagation has rendered high precision volume processes ineffective. We show that the inner chemical etching…

We observe that focusing a femtosecond laser beam simultaneously chirped in time and space domains in glass can efficiently suppress the optical aberration caused by the refractive index mismatch at the interface of air and the glass…

Optics · Physics 2018-08-15 Peng Wang , Wei Chu , Wenbo Li , Yuanxin Tan , Jia Qi , Yang Liao , Zhanshan Wang , Ya Cheng

Throughput and resolution are both of critical importance for modern manufacturing, however, they are usually contradictory with each other. Here, a high-throughput high-resolution three dimensional (3D) printing is demonstrated by…

Applied Physics · Physics 2018-12-05 Yuanxin Tan , Wei Chu , Peng Wang , Wenbo Li , Jia Qi , Jian Xu , Ya Cheng

As 3D printers become more widely available, researchers are able to rapidly produce components that may have previously taken weeks to have machined. The resulting plastic components, having high surface roughness, are often not suitable…

Instrumentation and Detectors · Physics 2020-03-18 Qingxin Meng , Kerrianne Harrington , Julian Stirling , Richard Bowman

It is well known that when the fused silica is irradiated with focused femtosecond laser beams, space selective chemical etching can be achieved. The etching rate depends sensitively on the polarization of the laser. Surprisingly, we…

We report on the fabrication of micro-axicons made of glass by laser-assisted wet etching (LAE) and laser polishing. The employed technique, relying on an efficient direct-writing process by femtosecond laser, allows revealing high fidelity…

We report on the fabrication of three-dimensional (3D) high-Q whispering gallery microcavities on a fused silica chip by femtosecond laser microfabriction, enabled by the 3D nature of femtosecond laser direct writing. The processing mainly…

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