High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions
Optics
2016-09-20 v1
Abstract
We report on fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of ~100 micron.
Keywords
Cite
@article{arxiv.1609.05646,
title = {High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions},
author = {Yuanxin Tan and Zhaohui Wang and Wei Chu and Yang Liao and Lingling Qiao and Ya Cheng},
journal= {arXiv preprint arXiv:1609.05646},
year = {2016}
}
Comments
7 pages, 5 figures