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The Fabry-P\'erot resonator is one of the most widely used optical devices, enabling scientific and technological breakthroughs in diverse fields including cavity QED, optical clocks, precision length metrology and spectroscopy. Though…
Optical microcavities trap light in compact volumes by the mechanisms of almost total internal reflection or distributed Bragg reflection, enable light amplification, and select out specific (resonant) frequencies of light that can be…
Besides being the foundational material for microelectronics, in optics, crystalline silicon has long been used for making infrared lenses and mirrors. More recently, silicon has become the key material to achieve large-scale integration of…
Optical microcavities allow to strongly confine light in small mode volumes and with long photon lifetimes. This confinement significantly enhances the interaction between light and matter inside the cavity, with applications such as…
Optical cavities are widely used in modern science and technology to enable a wide range of both quantum and classical applications. Recently, the growing demand for miniaturization and high performance has fueled the exploration of new…
We report on the realization of an optical microcavity consisting in the plane-plane arrangement of two suspended resonant mirrors possessing spectrally overlapping high-quality factor internal resonances. We first investigate its generic…
We demonstrate a fiber-type optomechanical array consisting of elastically interconnected silica microbottle resonators with high-Q optical and mechanical modes. In total, fifty optomechanical resonators fabricated by fine glass processing…
Silicon carbide (SiC) exhibits excellent material properties attractive for broad applications. We demonstrate the first SiC optomechanical microresonators that integrate high mechanical frequency, high mechanical quality, and high optical…
We present a new micromechanical resonator designed for cavity optomechanics. We have used a micropillar geometry to obtain a high-frequency mechanical resonance with a low effective mass and a very high quality factor. We have coated a…
We present a novel microfabricated optical cavity, which combines a very small mode volume with high finesse. In contrast to other micro-resonators, such as microspheres, the structure we have built gives atoms and molecules direct access…
We report a process for fabricating high quality, defect-free spherical mirror templates suitable for developing high finesse optical Fabry-Perot resonators. The process utilizes the controlled reflow of borosilicate glass and differential…
We present a simple lithographic method for fabrication of microresonator devices at the optical fiber surface. First, we undress the predetermined surface areas of a fiber segment from the polymer coating with a focused CO2 laser beam.…
Strong light interaction with a subwavelength object has been a long pursuing goal with difficulties mainly arising from the diffraction limit. We propose a high finesse cavity with one mirror made of a subwavelength resonant particle as a…
For trace gas sensing and precision spectroscopy, optical cavities incorporating low-loss mirrors are indispensable for path length and optical intensity enhancement. Optical interference coatings in the visible and near-infrared (NIR)…
On-chip optical resonators have the promise of revolutionizing numerous fields including metrology and sensing; however, their optical losses have always lagged behind their larger discrete resonator counterparts based on crystalline…
We describe a micro-fabrication method to create concave features with ultra-low surface roughness in silica, either on the end facets of optical fibers or on flat substrates. The machining uses a single focused CO2 laser pulse. Parameters…
We demonstrate optically coupled nanomechanical resonators fabricated on silicon-on-insulator. Silicon fin waveguides are used to control the dispersion of mechanical waves and engineer localized resonances by modulation of the fin…
3D printing of high-quality silica photonic structures is particularly challenging, as surface roughness at the nanoscale can severely degrade optical performance through scattering losses. Here, we develop a technique to fold ultrasmooth…
We present a highly reflective, sub-wavelength-thick membrane resonator featuring high mechanical quality factor and discuss its applicability for cavity optomechanics. The $88.5~\text{nm}$ thin stoichiometric silicon-nitride membrane,…
Micron-scale optical cavities are produced using a combination of template sphere self-assembly and electrochemical growth. Transmission measurements of the tunable microcavities show sharp resonant modes with a Q-factor>300, and 25-fold…