Release-free silicon-on-insulator cavity optomechanics
Optics
2016-12-08 v1
Abstract
We demonstrate optically coupled nanomechanical resonators fabricated on silicon-on-insulator. Silicon fin waveguides are used to control the dispersion of mechanical waves and engineer localized resonances by modulation of the fin properties. A photonic crystal cavity is designed to localize laser light near the fin and the mechanical motion is read out and modified by radiation pressure back-action. We expect devices and systems made from similar structures to enable co-integration of signal transduction and processing capabilities via electronic, photonic, and phononic degrees freedom in a single scalable platform.
Cite
@article{arxiv.1612.02413,
title = {Release-free silicon-on-insulator cavity optomechanics},
author = {Christopher J. Sarabalis and Yanni D. Dahmani and Rishi N. Patel and Jeff T. Hill and Amir H. Safavi-Naeini},
journal= {arXiv preprint arXiv:1612.02413},
year = {2016}
}
Comments
5 pages, 3 figures