Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator
Abstract
Whispering gallery mode (WGM) optomechanical resonators are a promising technology for the simultaneous control and measurement of optical and mechanical degrees of freedom at the nanoscale. They offer potential for use across a wide range of applications such as sensors and quantum transducers. Double-disk WGM resonators, which host strongly interacting mechanical and optical modes co-localized around their circumference, are particularly attractive due to their high optomechanical coupling. Large-scale integrated fabrication of silicon double-disk WGM resonators has not previously been demonstrated. In this work we present a process for the fabrication of double-layer silicon-on-insulator wafers, which we then use to fabricate functional optomechanical double silicon disk resonators with on-chip optical coupling. The integrated devices present an experimentally observed optical quality factors of the order of 10^5 and a single-photon optomechanical coupling of approximately 15 kHz.
Keywords
Cite
@article{arxiv.2408.00219,
title = {Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator},
author = {Amy Navarathna and Benjamin J. Carey and James S. Bennett and Soroush Khademi and Warwick P. Bowen},
journal= {arXiv preprint arXiv:2408.00219},
year = {2025}
}