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We report experiments on surface nanopatterning of Si targets which are irradiated with 2 keV Ar + ions impinging at near-glancing incidence, under concurrent co-deposition of Au impurities simultaneously extracted from a gold target by the…

Mesoscale and Nanoscale Physics · Physics 2016-03-30 B. Moon , S. Yoo , J. -S. Kim , S. J. Kang , J. Muñoz-García , R. Cuerno

We present ion beam erosion experiments performed in ultra high vacuum using a differentially pumped ion source and taking care that the ion beam hits the Si(001) sample only. Under these conditions no ion beam patterns form on Si for…

Mesoscale and Nanoscale Physics · Physics 2010-01-27 Sven Macko , Frank Frost , Bashkim Ziberi , Daniel F. Förster , Thomas Michely

We show that the ion beam induced incompressible amorphous solid flow in terms of advection transport mechanism leads to the erosion and deposition of atoms at the amorphous/crystalline (a/c) interface resulting in the formation of pattern…

Materials Science · Physics 2014-02-25 Tanuj Kumar , D. C. Agarwal , S. A. Khan , N. P. Lalla , D. Kanjilal

We have reported the dependence of projectile mass, chemical reactivity and effect of molecular beams on the ion induced nano structure formation, when 8 keV He1+, N1+, O1+, Ar1+ atomic ions and 16 keV N21+ and O21+ molecular ions are…

Materials Science · Physics 2015-06-03 S. Bhattacharjee , P. Karmakar , A. Chakrabarti

Off-normal low energy ion beam sputtering of solid surfaces often leads to morphological instabilities resulting in the spontaneous formation of ripple structures in nanometer length scales. In the case of Si surfaces at ambient…

Materials Science · Physics 2009-04-09 Safiul A. Mollick , D. Ghose

Ion-beam irradiation of an amorphizable material such as Si or Ge may lead to spontaneous pattern formation, rather than flat surfaces, for irradiation beyond some critical angle against the surface normal. It is observed experimentally…

Materials Science · Physics 2022-11-01 Tyler Evans , Scott Norris

We have reported nanopattern formation on carbon thin film and Si(100) surfaces by low energy inert and carbon ion beams. It is interesting to observe the role of carbon as target as well as projectile for nano patterning. Using carbon thin…

Materials Science · Physics 2013-06-13 S. Bhattacharjee , P. Karmakar , V. Naik , A. K. Sinha , A. Chakrabarti

Two-level modeling for nanoscale pattern formation on silicon target by Ar$^+$ ion sputtering is presented. Phase diagram illustrating possible nanosize surface patterns is discussed. Scaling characteristics for the structure wavelength…

Materials Science · Physics 2011-07-01 V. O. Kharchenko , D. O. Kharchenko

We have reported the dependence of projectile mass along with the chemical reactivity and nonlinear effects on ion beam induced nano structure formation when 8 keV He1+, N1+, O1+, Ar1+ atomic ions and 16 keV N21+ and O21+ molecular ions are…

Mesoscale and Nanoscale Physics · Physics 2013-11-27 S. Bhattacharjee , P. Karmakar , A. K. Sinha , A. Chakrabarti

In this paper evolution of silicon surface topography, under low energy ion bombardment, is investigated at higher oblique incident angles in the range of 63\degree-83\degree. Si(100) substrates were exposed to 500 eV argon ions. Different…

Mesoscale and Nanoscale Physics · Physics 2015-06-04 Tanmoy Basu , Jyoti Ranjan Mohanty , T. Som

The morphology evolution of Si (100) surfaces under 1200 eV Ar+ ion bombardment at normal incidence with and without metal incorporation is presented. The formation of nanodot patterns is observed only when the stationary Fe concentration…

Materials Science · Physics 2015-05-18 Jing Zhou , Stefan Facsko , Ming Lu , Wolfhard Moeller

We report a new approach for progressive and well-controlled downsizing of nanostructures below the 10 nm scale. Low energetic ion beam (Ar+) is used for gentle surface erosion, progressively shrinking the dimensions with ~ 1 nm accuracy.…

Mesoscale and Nanoscale Physics · Physics 2015-05-13 M. Zgirski , K. P. Riikonen , V. Tuboltsev , P. Jalkanen , T. T. Hongisto , K. Yu Arutyunov

Ion-beam irradiation of an amorphizable material such as Si or Ge may lead to spontaneous pattern formation beyond some critical angle of the beam versus the surface. It is known from experimental results that this critical angle varies…

Materials Science · Physics 2022-11-01 Tyler Evans , Scott Norris

Since an ion-beam is a viable attractive alternative to other material surface patterning techniques like an electron-beam, a study of the structure, composition and dimension of patterned lines created on surfaces of Si and SrTiO3 wafers…

Materials Science · Physics 2024-08-07 Supriya Ghosh , K. Andre Mkhoyan

The off-normal ion irradiation of semiconductor materials is seen to induce nanopatterning effects. Different theories are proposed to explain the mechanisms that drive self-reorganization of amorphisable surfaces. One of the prominent…

Materials Science · Physics 2022-11-24 A. Lopez-Cazalilla , F. Djurabekova , K. Nordlund

Ion beam irradiation of semiconductors is a method to produce regular periodic nanoscale patterns self-organized on wafer scale. At low temperatures, the surface of semiconductors is typically amorphized by the ion beam. Above a material…

Mesoscale and Nanoscale Physics · Physics 2016-11-22 Martin Engler , Tomáš Škereň , Stefan Facsko

Low-energy light ion beams are an essential resource in lithography for nanopatterning magnetic materials and interfaces due to their ability to modify the structure and properties of metamaterials. Here we create…

The ion-bombardment induced nanopatterning of Si(001) has been simulated by atomistic simulations with and without Fe impurity. The surface contamination has been simulated by using a new force field developed for FeSi. This is a fitted…

Materials Science · Physics 2014-01-09 P. Süle

We report on a nanoscale patterning method on Si substrates using self-assembled metal islands and low-energy ion-beam irradiation. The Si nanostructures produced on the Si substrate have a one-to-one correspondence with the self-assembled…

Materials Science · Physics 2009-11-10 B. Satpati , B. N. Dev

Controlled defect creation is a prerequisite for the detailed study of disorder effects in materials. Here, we irradiate a graphene/Ir(111)-interface with low-energy Ar+ to study the induced structural changes. Combining computer…

Materials Science · Physics 2013-11-01 E. H. Åhlgren , S. K. Hämäläinen , O. Lehtinen , P. Liljeroth , J. Kotakoski
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