English
Related papers

Related papers: Atomic layer deposition of titanium nitride for qu…

200 papers

Superconducting nanowire single photon detectors are capable of single-photon detection across a large spectral range, with near unity detection efficiency, picosecond timing jitter, and sub-10 $\mu$m position resolution at rates as high as…

Instrumentation and Detectors · Physics 2020-03-18 T. Polakovic , W. R. Armstrong , V. Yefremenko , J. E. Pearson , K. Hafidi , G. Karapetrov , Z. -E. Meziani , V. Novosad

We present in this paper the conductance maps at 100 mK in the disordered polycrystalline film of titanium nitride (TiN). At 5 nm, the film is close to quasi-two dimensional limit and exhibits features pertaining to the superconductor to…

Superconductivity · Physics 2014-01-21 P. Kulkarni , H. Suderow , S. Vieira , M. R. Baklanov , T. Baturina , V. Vinokur

We demonstrate the operation of superconducting coplanar microwave resonators in a very large frequency range up to 50 GHz. The resonators are fabricated from niobium thin films on sapphire substrates and optimized for these high…

Lithium niobate (LN) exhibits unique material characteristics that have found many important applications. Scaling LN devices down to a nanoscopic scale can dramatically enhance light-matter interaction that would enable nonlinear and…

Optics · Physics 2017-06-29 Hanxiao Liang , Rui Luo , Yang He , Haowei Jiang , Qiang Lin

Most existing implementations of silicon nitride photonic crystal cavities rely on suspended membranes due to the low refractive index of silicon nitride. Such floating membranes are not mechanically robust, making them suboptimal for…

Mesoscale and Nanoscale Physics · Physics 2018-06-12 Taylor K. Fryett , Yueyang Chen , James Whitehead , Zane Matthew Peycke , Xiaodong Xu , Arka Majumdar

We describe the fabrication of homogeneous sub-stoichiometric titanium nitride films for microwave kinetic inductance detector (mKID) arrays. Using a 6 inch sputtering target and a homogeneous nitrogen inlet, the variation of the critical…

Instrumentation and Detectors · Physics 2016-02-17 G. Coiffard , K-F. Schuster , E. F. C. Driessen , S. Pignard , M. Calvo , A. Catalano , J. Goupy , A. Monfardini

Titanium Oxynitride (TiOxNy) thin films are fabricated using reactive magnetron sputtering. The mechanism of their growth formation is explained and their optical properties are presented. The films grown when the level of residual Oxygen…

We report the high-field superconducting properties of thin, disordered Re films via magneto-transport and tunneling density of states measurements. Films with thicknesses in the range of 9 nm to 3 nm had normal state sheet resistances of…

Superconductivity · Physics 2021-01-12 F. N. Womack , D. P. Young , D. A. Browne , G. Catelani , J. Jiang , E. I. Meletis , P. W. Adams

Superconducting properties of thin films can be vastly different from those of bulk materials. Seminal work has shown the critical temperature Tc of elemental superconductors decreases with decreasing film thickness when the normal-state…

Ruthenium (Ru) is a promising candidate for the next-generation of electronic interconnects due to its low resistivity, small mean free path, and superior electromigration reliability at nanometer scales. Additionally, Ru exhibits…

Superconductivity · Physics 2025-12-03 Bernardo Langa , Brooke Henry , Ivan Lainez , Richard Haight , Kasra Sardashti

We outline the design for a photonic crystal resonator made in a hybrid Silicon/Lithium Niobate material system. Using the index contrast between silicon and lithium niobate, it is possible to guide and confine photonic resonances in a thin…

Optics · Physics 2016-04-20 Jeremy D. Witmer , Jeff T. Hill , Amir H. Safavi-Naeini

We demonstrate second order optical nonlinearity in aluminum nitride on insulator substrates. Using sputter-deposited aluminum nitride thin films we realize nanophotonic waveguides coupled to micro-ring resonators that simultaneously…

Optics · Physics 2012-06-13 W. H. P. Pernice , C. Xiong , C. Schuck , H. X. Tang

This work reports a systematic study of the evolution of charge transport mechanism in granular ultra-thin films of palladium of thickness varying between 6nm and 2nm. While the films with thickness > 4nm exhibit metallic behaviour, that at…

UV and visible photonics enable applications ranging from spectroscopic sensing to communication and quantum information processing. Photonics structures in these wavelength regimes, however, tend to experience higher loss than their IR…

We have solved numerically the diffusive Usadel equations that describe the spatially-varying superconducting proximity effect in Ti-Al thin-film bi- and trilayers with thickness values that are suitable for Kinetic Inductance Detectors…

Superconductivity · Physics 2018-07-02 Songyuan Zhao , David J. Goldie , Stafford Withington , Chris N. Thomas

Absorption of light in superconducting electronics is a major limitation on the quality of circuit architectures that integrate optical components with superconducting components. A 10 nm thick film of a typical superconducting material…

Superconducting thin-films are central to the operation of many kinds of quantum sensors and quantum computing devices: Kinetic Inductance Detectors (KIDs), Travelling-Wave Parametric Amplifiers (TWPAs), Qubits, and Spin-based Quantum…

Superconductivity · Physics 2026-04-15 Songyuan Zhao , Stafford Withington , David J. Goldie , Chris N. Thomas

A simple method has been developed for manufacturing a thin film superconducting quantum interferometer (SQI) with ultralow inductance (~10^-13 H). Current-voltage and voltage-field characteristics of the SQI are presented. The basic design…

Superconductivity · Physics 2018-09-07 S. I. Bondarenko , A. V. Krevsun , E. V. Ilichev , U. Hubner , V. P. Koverya , S. I. Link

The existing silicon-carbide-on-insulator photonic platform utilizes a thin layer of silicon dioxide under silicon carbide to provide optical confinement and mode isolation. Here, we replace the underneath silicon dioxide layer with a…

Optics · Physics 2024-02-07 Jingwei Li , Ruixuan Wang , Lutong Cai , Qing Li

We probe the effects of strong disorder (2.4 < kFl < 8.6) on superconductivity in thin films of niobium titanium nitride and titanium nitride by measuring the microwave electrodynamics in coplanar waveguide resonators. We find a gradual…

Superconductivity · Physics 2012-09-11 E. F. C. Driessen , P. C. J. J. Coumou , R. R. Tromp , P. J. de Visser , T. M. Klapwijk