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We report the realization of STM-based lithography with silicon layers removal on the chlorinated Si(100)-2x1 surface at 77 K. In contrast to other STM lithography studies, we were able to remove locally both chlorine and silicon atoms.…

Mesoscale and Nanoscale Physics · Physics 2020-04-07 T. V. Pavlova , V. M. Shevlyuga , B. V. Andryushechkin , G. M. Zhidomirov , K. N. Eltsov

The temperature dependence of hydrogen (H) desorption from Si(100) H-terminated surfaces by a scanning tunneling microscope (STM) is reported for negative sample bias. It is found that the STM induced H desorption rate ($R$) decreases…

Materials Science · Physics 2009-10-31 C. Thirstrup , M. Sakurai , T. Nakayama , K. Stokbro

The homoepitaxial growth of Si on Si(100) covered by a resist mask is a necessary technological step for the fabrication of donor-based quantum devices with scanning tunneling microscope lithography. In the present work, the chlorine…

Applied Physics · Physics 2019-08-02 T. V. Pavlova , E. S. Skorokhodov , G. M. Zhidomirov , K. N. Eltsov

In this paper we demonstrate atomic-scale lithography on hydrogen terminated Ge(001. The lithographic patterns were obtained by selectively desorbing hydrogen atoms from a H resist layer adsorbed on a clean, atomically flat Ge(001) surface…

Mesoscale and Nanoscale Physics · Physics 2009-12-07 G. Scappucci , G. Capellini , W. C. T. Lee , M. Y. Simmons

Hydrogen resist lithography using the tip of a scanning tunneling microscope (STM) is employed for patterning p-type nanostructures in silicon. For this, the carrier density and mobility of boron $\delta$-layers, fabricated by gas-phase…

Mesoscale and Nanoscale Physics · Physics 2020-09-11 Tomáš Škereň , Sigrun Köster , Bastien Douhard , Claudia Fleischmann , Andreas Fuhrer

We insert and manipulate a single chlorine atom in chlorine monolayer on a Si(100)-2x1 surface using a scanning tunneling microscope. Two objects were created - a Cl atom in a groove between two dimer rows, and bridge-bonded Cl on a silicon…

Mesoscale and Nanoscale Physics · Physics 2020-07-03 T. V. Pavlova , V. M. Shevlyuga , B. V. Andryushechkin , K. N. Eltsov

We perform first-principles structure optimization, phonon frequency and finite temperature molecular dynamics calculations based on density functional theory to study the interaction of chlorine atoms with graphene predicting the existence…

Materials Science · Physics 2012-12-18 Hasan Sahin , Salim Ciraci

Recently, a single atom transistor was deterministically fabricated using phosphorus in Si by H-desorption lithography with a scanning tunneling microscope (STM). This milestone in precision, achieved by operating the STM in the…

Mesoscale and Nanoscale Physics · Physics 2014-08-05 M. Rudolph , S. M. Carr , G. Subramania , G. Ten Eyck , J. Dominguez , T. Pluym , M. P. Lilly , M. S. Carroll , E. Bussmann

Halogen monolayer on a silicon surface is attracting active attention for applications in electronic device fabrication with individual impurities. To create a halogen mask for the impurities incorporation, it is desirable to be able to…

Materials Science · Physics 2022-04-20 T. V. Pavlova , V. M. Shevlyuga , B. V. Andryushechkin , K. N. Eltsov

We report STM-induced desorption of H from Si(100)-H(2$\times1$) at negative sample bias. The desorption rate exhibits a power-law dependence on current and a maximum desorption rate at -7 V. The desorption is explained by vibrational…

Materials Science · Physics 2016-08-31 K. Stokbro , C. Thirstrup , M. Sakurai , U. Quaade , Ben Yu-Kuang Hu , F. Perez-Murano , F. Grey

The adsorption of AlCl$_{3}$ on Si(100) and the effect of annealing the AlCl$_{3}$-dosed substrate was studied to reveal key surface processes for the development of atomic-precision acceptor-doping techniques. This investigation was…

We apply the standard photovoltaic technique of texturing to reduce the reflectivity of silicon cryogenic calorimetric light detectors. In the case of photons with random incidence angles, absorption is compatible with the increase in…

Instrumentation and Detectors · Physics 2007-05-23 P. C. F. Di Stefano , T. Frank , G. Angloher , M. Bruckmayer , C. Cozzini , D. Hauff , F. Proebst , S. Rutzinger , W. Seidel , L. Stodolsky , J. Schmidt

First-principles calculations of work function tuning induced by different chemical terminations on Si(100) surface are presented and discussed. We find that the presence of halogen atoms (I, Br, Cl, and F) leads to an increase of the work…

Materials Science · Physics 2018-09-24 Matteo Bertocchi , Michele Amato , Ivan Marri , Stefano Ossicini

In this work we investigate the effects of the environment on the X-ray photoelectron spectra of hydrogen chloride and the chloride ions adsorbed on ice surfaces, as well as of chloride ions in water droplets. In our approach, we combine a…

Chemical Physics · Physics 2023-09-18 Richard A. Opoku , Céline Toubin , André Severo Pereira Gomes

We report an investigation of the suitability of quantum embedding for modeling the effects of the environment on the X-ray photoelectron spectra of hydrogen chloride and the chloride ions adsorbed on ice surfaces, as well as of chloride…

Chemical Physics · Physics 2023-05-10 Richard Asamoah Opoku , Céline Toubin , André Severo Pereira Gomes

First-principles calculations using density functional theory based on norm-conserving pseudopotentials have been performed to investigate the Cs adsorption on the Si(001) surface for 0.5 and 1 ML coverages. We found that the saturation…

Strongly Correlated Electrons · Physics 2007-05-23 R. Shaltaf , E. Mete , S. Ellialtioglu

First-principle density-functional calculations have been applied to study the interaction of molecular chlorine with the (111) plane of copper. Using transition-state search method, we considered the elementary processes (Cl$_2$…

Chemical Physics · Physics 2019-03-28 Tatiana V. Pavlova , Boris V. Andryushechkin , Georgy M. Zhidomirov

Electron stimulated desorption of cyclopentene from the Si(100)-2x1 surface is studied experimentally with cryogenic UHV STM and theoretically with transport, electronic structure, and dynamical calculations. Unexpectedly for a saturated…

Mesoscale and Nanoscale Physics · Physics 2016-08-31 N. L. Yoder , N. P. Guisinger , M. C. Hersam , R. Jorn , C. -C. Kaun , T. Seideman

The absorption of thin hydrogenated amorphous silicon layers can be efficiently enhanced through a controlled periodic patterning. Light is trapped through coupling with photonic Bloch modes of the periodic structures, which act as an…

Bi$_2$Se$_3$ and Bi$_2$Te$_3$, and these same surfaces covered with Bi films, are exposed to Br$_2$ and Cl$_2$ in ultra-high vacuum. Low energy electron diffraction (LEED) and low energy ion scattering (LEIS) are used to investigate the…

Materials Science · Physics 2018-06-19 Haoshan Zhu , Weimin Zhou , Jory A. Yarmoff
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